光学薄膜中薄膜厚度检测方案(光纤光谱仪)

Thin Film measurements 薄膜测量  || 薄膜测量系统是基于白光干涉的原理确定光学薄膜的厚度，通过对白光干涉图样进行数学运算来计算出薄膜的厚度。 薄膜计量学包括计算薄膜是否存在和其厚度的数学方法，这些薄膜可以通过各种方法沉积到基片材料上。该项技术适合于从轮廓测量法到椭圆测量法，光谱反射法和X射线分析的测量方法。Avantes设备和光纤采样工具有利于光学反射测量，支持从半导体到太阳能和光学镀膜等多领域测量应用。Avantes为各种基片上的单层膜或多层薄膜的测量提供测量系统和解决方案。 Thin Film Quality Control 薄膜质量控制 薄膜沉积过程尤其是一个新方案在镀膜设备中实施和优化的时候，需要规律的监测和质量控制。典型的应用需要在最初阶段进行常规的质量控制检测过程，这需要一个高速的离线测试系统确认薄膜的厚度。Avantes薄膜解决方案可实现高速测量有利于确认薄膜存在和其相应的厚度。 Thin Film Reflectometry 薄膜反射测定法 光谱反射测量法采用白光照明样品（通常是卤钨灯或氘卤灯）以一个角度入射向样品，然后测量从该样品发出的反射光和干涉光。根据膜层的性质，紫外、可见、红外波段的测量对获得与理论计算反射率曲线最佳拟合的测量曲线非常重要。 Single-layer Thin Film Metrology Avantes’ single-layer thin film metrology system consists of our AvaSpec-ULS2048-USB2 fiber-optic spectrometer, AvaLight-DHc/AvaLight-DH-S deuterium-halogen light source or AvaLight-HAL tungsten halogen light source, the FCR-7UV200-2-ME (optional FCR-7UV400-2-ME for higher throughput) fiber-optic reflection probe and our Thin Film Stage. The software that drives the single layer system is Avantes’ AvaSoft-Thinfilm which is a 32 or 64-bit application which supports single layer measurements of thin films ranging from 10 nm-50 µm with 1 nm resolution. AvaSoft-ThinFilm supports UV/VIS and NIR wavelength measurements from 200-1100 nm. The system is available with an optional thin film standard which provides samples of uncoated and coated substrates for validation purposes. For most specular surface UV measurements, the AvaLight-DHc compact deuterium halogen source is adequate, but for more diffuse coated surfaces, the higher power AvaLight-DH-S is recommended. Multi-layer Thin Film Metrology Avantes’ multi-layer thin film metrology system consists of our AvaSpec-ULS2048-USB2 fiber-optic spectrometer, AvaLight-DHc/AvaLight-DH-S deuterium halogen light source or AvaLight-HAL tungsten halogen light source, the FCR-7UV200-2-ME (optional FCR-7UV400-2-ME for higher throughput) fiber-optic reflection probe and our Thin Film Stage. The software which drives the multi-layer system is TFProbe 2.0 which is developed by Angstrom Sun Technologies and is fully compatible with Avantes spectrometers. This sophisticated application supports up to five layer measurements and supports a variety of methods including nk constants, dispersion, and effective media approximation (EMA). TFProbe provides a user-friendly graphical user interface to input layer structure parameters. The system can include an optional thin-film standard which provides sample uncoated and coated substrates for validation purposes. TFProbe supports UV/VIS and NIR wavelengths from 200-1700 nm and enables the connection of multiple spectrometers to support this broadband wavelength measurement capability. For most specular surface UV measurements, the AvaLight-DHc compact deuterium halogen source is adequate, but for more diffuse coated surfaces, the higher power AvaLight-DH-S is recommended. Thin Film Bundle Order code Ava-ThinFilm Spectrometer AvaSpec-ULS2048-USB2 Grating UA (200-1100nm) 100 µm slit, DCL-UV/VIS, DUV coating OSC-UA Software AvaSoft-ThinFilm Lightsource AvaLight-DHc with PS-12V/1.0A Fiber optics FCR-7UV200-2-ME reflection probe Accessories ThinFilm stage & standard   薄膜测量系统是基于白光干涉的原理确定光学薄膜的厚度，通过对白光干涉图样进行数学运算来计算出薄膜的厚度。  薄膜计量学包括计算薄膜是否存在和其厚度的数学方法，这些薄膜可以通过各种方法沉积到基片材料上。该项技术适合于从轮廓测量法到椭圆测量法，光谱反射法和X射线分析的测量方法。Avantes设备和光纤采样工具有利于光学反射测量，支持从半导体到太阳能和光学镀膜等多领域测量应用。