薄膜涂层中表面成像与形貌像比较检测方案(扫描探针)

Kelvin Probe Measurement Topography Topography Phase Contact (Kelvin) Potential nm 0.4 0.6 0.8 1 pm 0.75 -70 0.5 -60 -0.25 50 40 -0.25 -30 -0.5 -20 -0.75 -10 -0 --1.25 --10 -1.5 -20 -1.75 um um This image shows the topography of thesurface. The topography consists of arough ground layer with round nanoparticles of about 100nm in diameter ontop. This image shows the phase contrastmeasurement of the sample surfacerecorded simultaneously and on thesame position as the topography image.The phase contrast technique helps toquantitativety measure materialdifferences in terms of stiffness andenery dissipation.It appears the nanoparticles do have a different stiffnesscompared to the sublayer. This image shows the local contact(Kelvin) potential distribution of the surfaceand was recorded simultaneously withand at the same position as thetopography and phase image. Themeasurement shows that the nanoparticles do not only have a differentelasticity but also a different contact(Kelvin) potential. Moreover some zones ofthe ground layer also show a differentcontact potentials. Measurement Setup The images were recorded with an easyScan2 FlexAFM operated in dynamic mode withan EFM cantilever (75kHz resonance frequency). The Kelvin probe reference signal had afrequency of 1400Hz and an amplitude of 300mV. The setup was as illustrated in the schema below. detector Controller + Signal Module nm Extracted profile 0-1 Extracted profile V 0.8 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0 -0.1 -0.2 -0.3 -0.4 -0.5 -0.6 Extracted profile -0.7 -0.8 -0.9 -1 一-1.1 -1.2 -1.3 -1.4 -1.5 -1.6 -1.7 -1.8 0-1 Smart Instruments for Nanoscience & Nanotechnology-Microspor tremonstration purposes only!Page FlexAFM原子力显微镜是Nanosurf公司最新研发的在大气环境和液体环境下都可以进行测试，并且可与倒置光学显微镜和温度样品台联用。可以满足绝大多数研究的需要。瑞士Nanosurf公司，全球知名的专业研发扫描探针显微镜制造商和技术服务供应商，在扫描探针显微镜领域有超过15年的研发经验，一直致力于新型扫描探针显微镜的创新性研发和制造。目前已推出新一代低噪音-快速扫描-超高稳定性的AFM 和大扫描范围Nanite AFM系统。瑞士Nanosurf公司承诺提供最高品质的服务和客户支持，同时还提供纳米技术的OEM 客户定制，外包等业务。技术参数：FLEXAFM原子力显微镜测量模式：接触式原子力显微镜（大气和液态环境），真正非接触式原子力显微镜（大气和液态环境），横向力/摩擦力显微镜（LFM），导电原子力显微镜，磁力显微镜（MFM），开尔文探针（Kelvin Probe），扫描热原子力显微镜（SThM），电容和静电力显微镜（EFM），高级的纳米光刻和纳米操作能力，音叉原子力显微镜，三维扫描成像。扫描范围：100 μm，10 μmZ方向范围：10 μm，3 μmXY方向驱动分辨率：0.152 nmZ方向驱动分辨率：0.046 nm最小Z方向测量噪音水平：0.15nm样品尺寸：直径100mm主要特点：FlexAFM无论是在大气环境下还是在液体环境下都可以进行测试，操作和测试的方便程度是完全一样，没有什么区别。灵活弯曲结构的扫描头设计，可以引用于平的或粗糙的样品表面。XY-扫描通过电磁驱动，XY平面的运动是完全线性的 。Z方向的运动是通过压电陶瓷来驱动，Z方向的运动速度很快。激光光束进入液体时会发生一定偏移，通常实验时需要耐心和复杂的调整。而FlexAFM 使用了专利SureAlign™ 的激光光学系统，无论是在大气下还是在液体中根本不需要做任何调整。所以FlexAFM 的激光信号永远处于最佳状态。两个方向的视窗，非常方便观察和针尖逼近。并且由于特别的设计，使得无论在大气环境还是液体环境得到同样质量的视像。FlexAFM 使用"Liquid Ready" easyScan 2控制器, 可以扩展STM 等技术。