在线非接触式测厚仪中精确的非接触式在线PET薄膜厚度测量检测方案(白光干涉测厚)

Film Metrology & More...For further information， please contact us at info@thetametrisis.com or sales@thetametrisis.comThetaMetrisis @ 2018， www.thetametrisis.com ThetaMetrisis APPLICATION NOTE #033 Accurate， Non-Contact On-Line PET film ThicknessMeasurements Introduction： The FR-inLine is an online no-contact thickness gauge designed for measuring at real-time thethickness of transparent and semi-transparent single films or stack of films and most materials produced insheet or strip form. In this application note， we demonstrate on-line thickness measurements of a PET film，using FR-Tools. Means & Methods： Reflectance measurements of aPET film， during roll-to-roll process(Figure 1)，performed usingThetaMetrisis FR-inLine tool.operating at the spectral range of 350-1000nm. Thereal-time measurement shows in Figure 1. Results： Typical experimental (black line) and fittedreflectance spectra (red line)， as recorded and processed Figure 1： Real-time thickness measurement of PET film by the FR-Monitor software， are illustrated in Figure 2a. The fitting was applied in the 650-700 nm spectralrange， and the thickness of the PET found to be 13.5um. In Figure 2b the thickness variation of PET film rollingwith a speed of 5.6m/sec is presented. Figure 2a： Specular Reflectance of PET film as recorded by FR-Monitor. Thickness measured at 13.5um Figure 2b： Thickness variation of a PET filmrolling with a speed of 5.5m/min Conclusions： FR-inLine is an easily to install compact & robust solution for accurate & precise non-destructivereflectance/transmittance measurements for films in the VIS/NIR spectral range. 精确的非接触式在线PET薄膜厚度测量简介：FR-inLine是一种在线非接触式测厚仪，用于实时测量透明和半透明的单层或多层薄膜的厚度，以及以片状或带状形式生产的大多数材料的厚度。在本应用说明中，我们演示了使用FR工具在线测量PET薄膜的厚度。方法和手段：在逐卷过程中，使用ThetaMetrisis FR内联工具，在350-1000nm的光谱范围内对聚酯薄膜的反射率进行测量。结果：由FR监测软件记录和处理的典型实验（黑线）和拟合反射光谱（红线）在650-700nm光谱范围内进行了拟合，发现PET的厚度为13.5um。显示了以5.6m/sec的速度轧制聚酯薄膜的厚度变化结论：FR-inLine是一种易于安装的紧凑、可靠的解决方案，可用于VIS/NIR光谱范围内薄膜的精确无损反射/透射测量。FR的工具基于白光反射光谱(Reports) 。准确同步的厚度测量及薄膜的折射率-一个广泛的多样化的应用范围广泛的光电特性的工具和整体解决方案，如:半导体、有机电子、聚合物、涂料和涂料、光伏、生物传感、化学传感...