蚀刻剂中铜离子检测方案(自动电位滴定)

Data No.NZ15-05048 No.ETIQ-05092上海市漕曹路222号航天大厦北楼902室网址： http：//www.kyoto-kem.net. cn电话：021-54488867 电邮： kemu-kem@163. com KEM Application Note No.ETIQ-05092 Oxidation-Reduction Titration Kyoto Electronics Manufacturing Co.， Ltd. Determination of copper ion (Cu) in etchant (Oxidationreductionmethod) -Summary- Checked the possibility of measuring copper ion in etchant with AT-510， and goodrepeatability was obtained. -Measuring instrument- Main unit：AT-510 Automatic potentiometric titrator Preamplifier： STD-510Standard preamplifier Electrode： C-272 Combined glass electrode -Reagent- Titrant： 0.1mol/L-Sodium thiosulfate solution Solvent： distilled water Additive： Acetic acid， 10%-Ammonium acetate， Potassium iodine -Measurement method- Preparation： (1) Dissolve Ammonium acetate in water to prepare 10%-Ammonium acetate. Measurement： (1) Place 2.0mL of the sample in 100mL beaker and add 50mL of distilled water. (2) Add 4mL of Acetic acid and 5mL of 10%-Ammonium acetate. (3) Add 3g of Potassium iodine and dissolve it completely. (4) Titrate with 0.1mol/L-Sodium thiosulfate solution. (EP is detected from the inflection point on the titration curve.) -Calculation- Concentration (g/L)=(EP1-BL1)xTFxC1xK1/SIZE EP1： Volume at EP (mL) BL1： Blank volume (mL) TF： Factor of titrant C1： Conc. conversion coefficient (6.354) (1mL of 0.1mol/L-Na2S203=6.354mg Cu) K1： Unit conversion coefficient (1) SIZE： Sample size (mL) -Ambient conditions- Temperature： 23.2C R. Humidity：71% Weather： Rain 京都电子工业株式会社-可睦电子(上海)商贸有限公司 -Measurement parameter- -Titration curve- [Titration Parameter] Calc. Type ：Sample Method No. 35 Conc. 1 ： Set CO1=(EP1-BL1)*TF*C1*K1 Method Type ：Titration /SIZE Unit ：g/L EP No. ：1 Form ：EP STOP APB No. ：1 Conc. 2 ： Off Unit No. ：1 Detector No. ：1 Conc. 3 ： Set Unit ：mV CO3=EP1 Max. Volume ：40.0mL Unit ： Wait Time ：0s EP No. ：1 Direction ：Auto Conc. 4 ： Off Conc. 5 ： Off < Control> Temp. Comp.： Off End Point No. ：1 End Sense ：Auto End Point Area ： Off Separation ： Off C1(mg/mL) ：6.354 Over Titr. Vol. ：0.0mL K1 ：1 Gain ：1 Data Samp. Pot.： 4.0mV Data Samp. Vol.：0.5mL Control Speed： Medium -Measurement results- Run Sample size(mL) Titer(mL) Concentration(gL) 1 2 3 2.0 2.02.0 11.5179 11.4465 11.4781 36.592 36.36636.466 Statistics MeanSD RSD 36.475 g/L0.1132 g/L0.3105% -Comments- Precipitation was observed when adding Potassium iodine in the sample measurements，but it did not affect the measurement results. -Key word and entry number in Data Base- Copper ion： 43 entries 京都电子工业株式会社-可睦电子(上海)商贸有限公司上海市漕溪路222号航天大厦北楼902室电话：021-54488867 电邮： kemu-kem@163.com网址： http：//www.kyoto-kem.net.cn