高分子材料中质谱、表面分析，材料表征等检测方案(真空泵)

edwardsvacuum.com nEXT TURBOMOLECULAR PUMPS VACUUM EQUIPMENTFOR ANALYTICALAPPLICATIONS (EDWARDS EDWARDS THE PARTNEROF CHOICE Edwards is a world leader in the design， technology andmanufacture of vacuum pumps， with over 100 years' historyand more than 80 years' manufacturing experience. We believe in delivering results that bring value to our customers by usingour breadth of industry experience to identify and apply solutions to yourproblems. Using the most innovative and up-to-date modelling techniquesand know-how， we can optimise the pumping configuration to achieve themaximum performance in the most reliable and cost-effective way. This brochure contains the most common Edwards products used inanalytical equipment. There are many more products available via ourproduct catalogue， website or by contacting your local sales representative. CONTENTS 04 VACUUM PRODUCTS FOR KEY APPLICATIONS Vacuum pumps and accessories 52 MEASUREMENT AND CONTROL Pressure measurement and display options 62 LEAK DETECTION AND MEASUREMENT 双 Leak detection solution 64 COMPONENTS AND HARDWARE Vacuum components and hardware for configuring your vacuum system 70 SERVICE AND SUPPORT Cost-effective service and support from the experts ULTIMATE VACUUM SOLUTIONS We are the technology leader in vacuum pumps， gaugingand systems. At Edwards we understand the ever-evolving challenges within the scientificfield. Through this knowledge and our extensive experience of workingwith the leading OEMs we have developed high quality vacuum pumps andcontrollers to achieve clean and reliable vacuum environments. Our in-housemodelling capabilities can support your system development cycle， helpingyou to achieve the most appropriate solution and avoiding costly trial anderror processes. With a broad range of products， pumping from atmospheric pressure toultra-high vacuum， you can be assured Edwards has the right solution for you. o 3 taata 3一a5 工 amc3r nEXT turbomolecular pumps Turbomolecular pumpingstations STP magnetically levitatedturbomolecular pumps XDD1 dry diaphragm pumps nXDS/XDS dry scroll pumps nXLi air cooled single phase drypump EM/RV rotary vane pumps lon getter pumps Titanium sublimation pumps Non-evaporable getter pumps Measurement and control ● Leak detection and measurement Components and hardware nEXT turbomolecular pumps are hybrid bearing pumps with acompound drag stage and integrated controllers for pumping speedsfrom 47 to 400 Is. They all feature a permanent magnetic upperbearing， which eliminates hydrocarbons at the top of the rotor andan oil lubricated lower bearing for reliable high speed operation. The on-board controller allows direct control via l/O or RS232/485serial communications for easy integration with a PLC controller oralternatively it interfaces directly with our TIC and TAG controllers. PRODUCT FEATURES INTEGRATED CONTROLLER offers direct l/O or serial control or canbe connected to one of our TAG or TICcontrollers for easy systemisation. FULLY USER-SERVICEABLE oil cartridge and bearings can be changed inthe field with minimal tooling. UPPER MAGNETIC BEARING ensures clean vacuum，low power andlow vibration. INLET SCREENsupplied as standard (not shown). OPTIMISED ROTOR DESIGNS deliver high speeds and high compression. RANGE OF VARIANTS SUITABLE FORMANY APPLICATIONS D =standard nEXT pump variant.H=optimised rotor design for high light gascompression T= additional regenerative stage forincreased compression and higher backingpressure capability. MANUAL VENT VALVE offers a safe place to vent system with norisk of damage to pump and can be replacedwith a solenoid valve for fully automatedventing. Technical data nEXT85 nEXT300 nEXT400 Dimensions (nEXT85) 096(3.78)、.D114(4.49) CF63 ISO63 R54.125 Product description Product description Order no. Cooling WCX85 water cooling kit (4 position) B8G200833 nEXT85D ISO63 ACX85 air cooler connector fitted B8G200820 Venting N/O TAV5 vent valve connector fitted B8G200834 nEXT85D ISO100 N/C TAV5 vent valve connector fitted B8G200835 Vibration Isolators ISO63 B58115000 nEXT85ID ISO63 NW16 INTERSTAGE CF63 B58101000 Bakeout CF63 flange heater 110 V B8G200823 nEXT85H NW40 CF63 flange heater 240 V B8G200824 Controller TAG controller D39592000 nEXT85H CF63 TAG power supply D39592800 nEXT85HISO100 TIC100 turbo and instrument controller D39721000 Extension cables 1 m pump to controller cable D39700835 3 m pump to controller cable D39700836 5 m pump to controller cable D39700837 Power cables 2 m electrical supply cable UK plug D40013025 2 m electrical supply cable EU plug D40013030 2 m electrical supply cable US plug D40013120 Miscellaneous Accessory"Y"adaptor B8G200837 Accessory extension B8G200836 Vent port adaptor B58066011 PRX10 purge restrictor B58065001 nEXT85 base mount to adapt from EXT75DX B8G200838 Service Bearing replacement kit B8G200827 Oil cartridge kit B8G200828 Bearing and oil cartridge kit B8G200811 Bearing replacement tool kit B8G200845 Dimensions (nEXT240/300/400) Performance (nEXT240/300/400) Boost technology (nEXT240/300/400) For our Analytica Instrument Customers the“T”variants of nEXT 240，300，400 employ a unique viscous pumping stage which canbe used to 'boost'the performance of the backing pump. This offers a much simplified vacuum solution with greatly improvedpumping speeds and system power reduction. The example in the image below shows how the boost ports can be used toreplace a primary pump on a differentially pumped system. Customers in general laboratory and R&D applications will also benefit from the improved compression achieved with the "T”variant. To take maximum advantage of boost technology， please contact Edwards. Ordering information (nEXT240/300/400)Pumps： Accessories and spares： Product description Product description Order no. Cooling nEXT radial air cooler B58053175 nEXT240D CF100 80W nEXT axial air cooler B58053185 nEXT240D ISO100 160W nEXT water cooler B80000815 Venting TAV5 solenoid operated vent valve B58066010 VibrationIsolators ISO100 B58120000 nEXT240T B180 ISO100 160W CF100 B58105000 nEXT300DISO100 80W CF160 B58110000 Bakeout CF100100-120 V flange heater B58052773 nEXT300D ISO100 160W CF100 200-240 V flange heater B58052774 nEXT300D CF100 160W CF160 100-120V flange heater B58052775 nEXT300ID 1225 ISO100 160W CF160 200-240V flange heater B58052776 Controller TAG controller D39592000 nEXT300T B90 CF100 160W TAG power supply D39592800 nEXT300T B180 ISO100 160W TIC200 turbo and instrument controller D39722000 Extension cables 1 m pump to controllercable D39700835 nEXT300IT I225 B90 ISO100 160W 3 m pump to controller cable D39700836 nEXT400D ISO160 80W 5 m pump to controller cable D39700837 Power cables 2 m electrical supply cable UK plug D40013025 nEXT400D ISO160 160W 2 m electrical supply cable EU plug D40013030 nEXT400D CF160 160W 2 m electrical supply cable US plug D40013120 Miscellaneous Vent port adaptor B58066011 nEXT400T B90 CF160 160W PRX10 purge restrictor B58065001 Service Oil cartridge tool kit B80000812 Bearing tool kit B80000805 Oil cartridge B80000811 Bearing and oil cartridge B80000810 Number after B indicates Boost port location relative to backing port Number after l indicates Interstage port location relative to backing port nEXT240/300/400 pumps are also available in a special low vibrationand low stray magnetic field version. These pumps have a modifiedlower bearing， extra balancing steps during manufacture andespecially selected magnets to reduce stray fields. The result is a set of pumps that is extremely well suited to electronmicroscopy applications， but also any other applications where thesefactors are critical. However， these pumps can only be operatedupright and the lower bearing is not user serviceable as we cannotguarantee the vibration in these instances. PRODUCT FEATURES MODIFIED LOWER BEARINGARRANGEMENT Optimised bearing cartridge to furtherreduce transmitted vibration MATCHED MAGNETS FOR UPPERBEARING Magnets used in the upper bearing arematched so that opposing fields cancel eachother out， reducing stray fields EXTRA ROTOR BALANCING For L variant pumps the turbo rotorundergoes additional balance steps in orderto reduce vibration MULTIPLE CONFIGURATIONS AVAILABLE L variant pumps are available in D orTconfigurations and can be ordered withinterstage ports or alternative power to meetspecific customer requirements Vibration and magnetic field data Axial Frequency range Deterministic Random Deterministic Random 40 to 280Hz 5 5 8 12 280 to 990Hz mms² rms 7 10 4 5 990 to 1900Hz 100 N/A 100 N/A STRAY MAGNETIC FIELD DATA - ALL L VARIANTS Max field strength at 200mm from centre Tangential Axial Radial Total uG-pk 450 450 450 1150 nT-pk 45 45 45 115 * Indicative data， measured values can differ depending on test method， contact Edwards for details. With Edwards you can quickly and flexibly create the perfect vacuumsolution for your needs. When an off the shelf pump will not meet your requirements forspace or performance， our Applications & Derivatives team willdevelop a bespoke vacuum solution to turn the proposed modelledsystem into reality. At Edwards a partnership approach is taken to system design， andit all starts with a vacuum expert using TransCalc HSM to optimiseyour vacuum system. Developed in-house， TransCalc HSM is aunique program used to simulate the complete vacuum system fromatmosphere to ultra-high vacuum (UHV). This software has beendeveloped to give rapid simulation of the behaviour of the proposedvacuum solution to ensure it perfectly meets your requirements.Accurate computer simulation offers you the chance to streamlineyour development cycle， avoiding a costly iterative approach anddelivering a quicker time to market. Contact us for ordering information PRODUCT FEATURES SPLIT FLOW PUMPS custom built split flow pumps featuremultiple inlets to deliver high performancewhen space is at a premium CONFIGURED TO YOUR NEEDSbespoke vacuum solutions optimallydesigned to deliver the precise performancedemanded by your application RIGHT SOLUTION advanced in house TransCalc HSM modellingsoftware not only ensures the correctpumping solution， but can also help youoptimise your vacuum system design PEACE OF MIND comprehensive field proven product andapplications know-how TransCalc HSM enables the rapid modelling of vacuumsystems in order to decide on variables such as inter-chamberaperture sizes and pump combinations without the need of anextended trial and error process. A typical example of how TransCalc HSM would be used tooptimise your system follows three simple steps： STEP 1： Define the system with unknowns You provide us with your vacuum system requirements. CUSTOM TURBOMOLECULAR PUMPS STEP 2： A TransCalc HSM model is built An Edwards vacuum expert will produce models of solutionsthat match your requirements. A variety of alternativeconfigurations will be considered to deliver reduced powerconsumption or increased gas throughput. Screenshot taken from TransCalc HSM STEP 3： The simulation is run and will provide the modelling data in a concise format Performance Data Throughput(sccm) Aperture 1Diameter (mm) Chamber Aperture 2 Chamber Aperture 3 Chamber 3 (mbar) Total Power (W) 1 (mbar) Diameter(mm) 2 (mbar) Diameter (mm) Twin discrete nEXT240D 778 0.30 3.74 1.00 2.62E-03 1.00 1.08E-06 71.3 nEXT splitflow 778 0.30 3.74 1.00 2.84E-03 1.00 1.48E-06 48.8 nEXTsplitflow+boost 778 0.30 2.41 1.00 1.81E-03 1.00 9.39E-07 62.0 nEXT splitflow +boost=aperture 1562 0.43 3.73 1.00 2.83E-03 1.00 1.47E-06 81.4 You can then decide which solution best satisfies the priorities of your application； be it cost， power consumption orabsolute performance. Our T-Station 85 is a low cost， compact turbomolecular pumpingstation that seamlessly combines an nEXT85H turbomolecular pumpwith either a dry diaphragm or oil sealed backing pump， and a simplecontroller， providing pumping speeds of 47 to 84 ls"l. The T-Station 85 comes with an integrated Turbo and Active Gaugecontroller which enables single button start/stop of the system. Withthe ability to control one of our active gauges， vent valve control anddelayed start of the turbomolecular pump to either time or pressureif a gauge is fitted， the T-Station 85 ideal for general laboratory needs. PRODUCTFEATURES CUSTOM INTEGRATED CONTROLLERFEATURES： Single dedicated button to start/stop pumps；Easy to read accurate display； Ability toselect vent mode where a TAV5 vent valveis fitted for automated venting with no userintervention. HIGH CAPACITY BACKING PUMPS E2M1.5 or XDD1high capacity backingpumps giving the choice between an oilsealed pump or a totally dry diaphragmpump. COMPACT LOW PROFILE Base plate includes rubber feet and cut-outsin the sides for manual handling， giving acompact low profile but stable design thatcannot be knocked over. USER SERVICEABLE The nEXT85 turbomolecular pump， XDD1 drydiaphragm pump and E2M1.5 backing pumpare all user serviceable. INTEGRATED AIR COOLER Acts to cool internal power supply andpump/controller for quiet operation avoidingmultiple fans. RUGGED METAL FRAME All metal frame means rugged design thatcan take abuse without cracking or breaking. INLETFLANGE OPTIONS Available with either an NW40， ISO63 or CF63 inlet flange to suit your application. Dimensions T-Station 85D with XDD1 backing pump 395(15.55) Top view Front view T-Station 85W with E2M1.5 backing pump 395(15.55) Ordering informationPumping station： Product description Order no. T-Station 85H Wet NW40 200-240V TS85W1001 T-Station 85H Wet ISO63 200-240V TS85W2001 T-Station 85H Wet CF63 200-240V TS85W3001 T-Station 85H Dry NW40 200-240V TS85D1001 T-Station 85H Dry ISO63 200-240V TS85D2001 T-Station 85H Dry CF63 200-240V TS85D3001 T-Station 85H Wet NW40 100-120V TS85W1002 T-Station 85H Wet ISO63 100-120V TS85W2002 T-Station 85H Wet CF63 100-120V TS85W3002 T-Station 85H Dry NW40 100-120V TS85D1002 T-Station 85H Dry ISO63 100-120V TS85D2002 Technical data T-Station 85 Pumping speed for N， NW40 47 Is ISO/CF63 84 Is- Compression ratioforN. >1x1011 Backing pump speed，50 Hz (60Hz) E2M1.5(TS85W) 1.6 m³h-1(1.2 cfm) XDD1 (TS85D) 1.2 m²h1(0.9 cfm) Ultimate vacuum (CF) <5x10-10 mbar Inlet connection NW40， ISO63 or CF63 Exhaust connection E2M1.5 (TS85W) 11mm OD nozzle or3/8”BSP XDD1 (TS85D) Fitted silencer or1/8”BSP Weight E2M1.5 system(TS85W) 21 kg max XDD1 system (TS85D) 17 kg max Noise level at ultimate ≤56dB(A) Leak tightness (static) <1x10-6mbar Is1 Operating temperature range 12 to40°C Accessories and spares： Product description Order no. Accessories EMF3 mist filter for E2M1.5 A46220000 N/O TAV5 vent valve connector fitted B8G200834 N/C TAV5 vent valve connector fitted B8G200835 APG100 XLC NW16 Pirani Gauge D02603000 AIM X NW25 Inverted Magnetron Gauge D14642000 WRG-S NW25 Wide Range Gauge D14701000 APGX-H NW25 Convection Gauge D02391000 Cord sets 2 m electrical supply cable UK plug A50505000 2 m electrical supply cable EU plug A50506000 2 m electrical supply cable North America/Japan plug A50507000 2m electrical supply cable no plug A50508000 0.5 m Gauge cable D40001005 1 m Gauge cable D40001010 nEXT turbomolecular pumping stations are configurable withturbomolecular pump speeds ranging from 47 to 400 Is"and a choiceof oil sealed or dry backing pumps ranging from 1 to 20 mh1. Allour nEXT turbomolecular pumping stations feature an integrated TICturbo and instrument controller offering full control of the packagevia a simple intuitive interface. The nEXT turbomolecular pumping stations are supplied fullyassembled and ready to run straight out of the box and includecommon accessories such as mist filters and mains cables asappropriate to the chosen pumps. As fully featured high end stationsthey include RS232 serial communications and Windows@ softwarefor monitoring and control. PRODUCT FEATURES RANGE OFTURBOMOLECULAR PUMPOPTIONS Choice of turbomolecular pump with speedsranging from 47 to 400 Isand inlet flangesfrom DN40 to DN160. FULLY CONTROLLABLE TIC turbo and instrument controller offersfull control of pumps and up to 3 Activegauges as well as offering full serial remotecommunications. VENT VALVE OPTION Optionalturbomolecular pump vent valvecan be ordered as part of cart assembly. USER SERVICEABLE All nEXT turbomolecular pumps and backingpumps are fully user serviceable. ROBUST METAL FRAME All metal frame with locking castors for arobust but easily mobile system. Benchmounting kit included for safe bench topoperation. CHOICE OF BACKING PUMPS Choice of oil sealed and dry backing pumpswith capacities ranging from 1 to 20 mh. LOW VIBRATION Backing pump mounted on anti-vibrationmounts for low levels of transmittedvibration. Dimensions Technical data 500 mm refers to large platforms with nXDS/RV backing pumps nEXTTurbo Station Peak pumping speedfor N. NW40 47 Is ISO/CF63 84ls ISO/CF100 240 or 300 Is-1 ISO/CF160 400 Is Compression ratio for N， >1x1011 Backing pump speed，50Hz(60Hz) E2M1.5 1.6m³h1(1.2cfm) RV 5.1 m³h-1(3.6 cfm) RV12 12 m³h-1 (8.4cfm) XDD1 1.2 mh(0.9 cfm) nXDS6i 6.2 m²h1(3.6 cfm) nXDS10i 11.4 m³h-1(6.7 cfm) nXDS15i 15.1 m³h1(8.9 cfm) nXDS20i 22m³h-1(13.0cfm) Ultimate vacuum (CF) <5x1010 mbar Inlet connection NW40， ISO63， CF63，ISO100， CF100， ISO160 or CF160 Exhaust connection E2M1.5 NW16 XDD1 Fitted silencer or 1/8” BSP RV/nXDS NW25 Weight E2M1.5/XDD1 24.9 to 35 kg RV/nXDS 41.2 kg to 55 kg Noise level at ultimate ≤56dB(A) Leak tightness (static) <1x10-mbarls1 Operating temperaturerange 12 to 40°℃ (1) 380 mm refers to small platforms with XDD1 backing pumps Ordering informationPumping station： Accessories： Product description Order no. APG100 XLC NW16 Pirani Gauge D02603000 AIM XNW25 Inverted Magnetron Gauge D14642000 WRG-S NW25 Wide Range Gauge D14701000 APGX-HNW25 Convection Gauge D02391000 0.5 m Gauge cable D40001005 1m Gauge cable D40001010 STP maglev turbomolecular pumps are the first choice forapplications demanding high up-time， hydrocarbon-free pumping，minimal maintenance and low vibration. The multi-axis magneticbearing system is used to suspend the rotor during operation，ensuring there is no risk of contamination while minimising noiseand vibration. The STP maglev turbomolecular pump range has a market leadingreputation for quality and reliability and are the preferred choicefor many of the most challenging semiconductor applications. Forlaboratory applications this makes STP maglev turbomolecularpumps extremely reliable and normally maintenance free. PRODUCTFEATURES VIBRATION FREE magnetic levitation means no friction andthus extremely low vibration， in addition thisremains constant and does not change asparts wear. OIL FREE the use of magnetic bearings eliminates allhydrocarbon lubricants. AUTOMATIC BALANCING SYSTEM Edwards 5-axis pumps are able adjust themagnetic field dynamically to take out rotorimbalances. MAINTENANCE FREE zero friction means no wear and thus noroutine maintenance is required in normaloperation. CORROSION RESISTANCE most models of Edwards STP maglevturbomolecular pumps are also available in aspecial corrosion resistant version with nickelcoated rotors and a nitrogen purge facility，making them ideal for chemical laboratoryapplications. Technical data Units STP301 DN100 STPL301 DN100 STP451 DN160 STP451L DN160 STPiX455 STPiXU457 DN100 STPiX457DN160 STPiXU457 DN100 DN160 Vacuum data Pumping speed N Is 300 260 480 450 300 450 420 H 300 290 460 410 300 460 410 Compression ratio N >108 2x104 1x104 Ultimate vacuum (CF) mbar <1x10-10 <1x10-9 Maximum flow rate N SCcm 120 Maximum inlet pressure mbar 6.7x10-4 3.2x103 Maximum backing pressure mbar 0.13 0.67 Motor data Maximum power consumption W 350 240 Nominal rotational speed rpm 48，000 55，000 Physical data Weight kg 11 13 12 14 16 19 16 19 Vibration um <0.01 <0.01 <0.005 <0.0001 <0.005 <0.0001 Inlet connection ISO100 or CF100 ISO160 or CF160 ISO100 or CF100 ISO160 or CF160 Backing connection NW25 Run-up time secs 180 480 Magnetic field toleranceaxial/radial mT 15/3 Orientation of installation Any Cooling method Ambient/Air/Water Ambient/Air Maximum flange temperatureduring bakeout (CF only) °C 120 Bearing technology 3 axis magnetically levitated 5 axis magnetically levitated Controllertype External Integrated Power supply type External External Interfaces RS232，I/O Optional interfaces Profibus Profibus， EtherCAT STP301 STP451 STPL301 STPL451 STPiX457 Dimensions A LL F CO G Note： STP301 pump shown 1. Electrical connector2. Outlet port 3. Purge port A B C D E F G H J K L D130 ISO100 12 STP301 230 197 D152 DN100CF 22 0156 0180 108 110 100 8xM8x16 D180 IS0160 12 STP451 200 167 0203 DN160CF 22 33 0130 ISO100 240 207 12 STPL301 0180 @152 DN100CF 260 227 22 0180 108 110 100 8xM8x16 0180 IS0160 250 217 12 STPL451 0214 D0203 DN160CF 270 237 22 0130 ISO100 12 286 264 152 DN100CF 22 STPiX457 0152 0180 108 124 101 4xM10x18 0180 ISO160 22 12 256 234 0203 DN160CF 22 STPiXU457 D130 ISO100 321 299 12 0180 0180 108 124 101 4xM10x18 Performance Ordering informationPumps： Accessories and spares： Pump Order number Product description Order number STP301/451 Controller (1) SCU350 100-240V YT21ZOZ01 STP301 ISO100 YT21B0350 SCU350 100-240V with RS232 YT21ZEZ20 STP301 CF100 Pump to controllercables(1) 3m cable B70700010 STPL301 ISO100 YT47B0030 5m cable B70700000 STPL301 CF100 YT470Z000 10m cable B70700130 STP451 20m cable B70700150 STP451ISO160 YT21B0460 30m cable PT21YOB00 STP451 CF160 Mains cables (1) 3m B70700090 STPL451 ISO160 YT47B0150 5m B70700040 STPL451 CF160 YT74B0010 10m PT21Y0A00 STPiX457 Cooling 115V air cooler YTO11A003 STPiX457 ISO100 YT860Z120 220-240V air cooler YT011A005 STPiX457 CF100 YT860Z150 Water cooling kit YT21CA001 STPiX457 Power supplywith display(1) iPD240 AC power supply 240V YT86WOZOO STPiX457 CF160 Pump to powersupply cables(" 2.5mcable YT86YOB15 STPiXU457 5m cable YT86YOB20 STPiXU457ISO100 YT862Z160 10m cable YT86YOB30 STPiXU457 CF100 YT862Z120 15m cable YT86YOB40 STPiXU457 ISO160 YT862Z140 20m cable YT86Y0B50 STPiXU457 CF160 Mains cables (1) 3m PT64Y1A10 5m PT64Y1A20 10m PT64Y1A30 Cooling* 24Vdc air cooler YT860U201 100-240V air cooler YT860U301 Vent valve* Vent valve YT860T211 All Bakeout CF100 100-120V flange heater B58052773 CF100 200-240 V flange heater B58052774 CF160 100-120V flange heater B58052775 CF160 200-240 V flange heater B58052776 * Only 1 accessory can be controlled by the pump， so if fitting both air cooler and vent valve we recommend fitting ventvalve to pump and using a mains air cooler(1) denotes required accessory， others are optional depending on application XDD1 diaphragm pumps are compact and efficient pumps， usedfor backing small compound turbomolecular pumps in clean， highvacuum applications， and also designed to be free standing benchtop units. A typical ultimate pressure of better than 5 x108 mbar canbe achieved when using an XDD1 to back a 70 Isturbomolecularpump. The XDD1 pumps are intended for use on non-aggressive， safearea applications. Under normal conditions the XDD1 is virtually maintenance free， thelifetime of the diaphragms and valves is typically > 10，000 operatinghours，depending on the application. PRODUCT FEATURES DRY PUMPING， LUBRICANT FREETECHNOLOGY eliminating the need for costly oil changesand disposal LIGHTWEIGHT AND COMPACTwith a small footprint allowing flexibilityof use. IDEAL BACKING PUMPfor small turbomolecular pumps. COMPLIESwith EN61010，EN1012， CSA/UL standards. WORLDWIDE115/230 V or 24 Voptions. IEC 60320 C13 CONNECTORon a.c. pumps. Technical data a.c. d.c. Pumping speed 50Hz 1.2 m3h-1 600 rpm 0.6 m³h1 60Hz 1.4m3h-1 1700 rpm(Factory setting) 1.4 m³h-1 2400 rpm 1.8m3h-1 Motor power Weight Motor power Weight 80W 6.5kg 64W 4.5kg Accessories & spares Product description Order number 2m electrical supply cable for 1-ph pumps， UK plug 3A A50516000 2m electrical supply cable for 1-ph pumps， no plug A50508000 2m electrical supply cable for 1-ph pumps， North America/Japan plug A50507000 2m electrical supply cable for 1-ph pumps， North European plug A50506000 XDD/DX/EXDC extension cable 1m D39700835 XDD/DX/EXDC extension cable 2m D39700836 XDD/DX/EXDC extension cable 5m D39700837 XDD1 diaphragm service kit A74601800 223(8.78) Performance Ultimate vacuum (typical) <2 mbar Ambient temperature limit 10 to 40°C Inlet connection NW16 Exhaust connection The pump is fitted with a silencer which can be removed and an exhaust lineconnected with a 1/8 inch BSP fitting Max allowed inlet pressure 1 bar (abs) Power connector (a.c.) IEC EN60320 C13 Ordering information Product description Order number XDD1 Diaphragm Pump 100-115V/200-230V 50/60 Hz A74602983 XDD1 Diaphragm Pump 24V d.c. Mk3 A74603991 With exceptional pumping capability， ultimate vacuum performanceand state-of-the-art design features， the nXDS dry scroll pump is thebest performing pump in its class. nXDS improves on other scroll pumps by offering increased pumpingspeeds， combined with lower ultimate pressures， low powerconsumption and reduced noise. The gas ballast allows for pumpingof condensable vapours， including water， solvents， dilute acids andbases.nXDS pumps feature the very latest in tip seal technology，giving a significantly longer life between tip seal changes. nXDS-C has been modified so that it is more suitable for use onvapour handling processes and may be used in some applicationsinvolving corrosive substances. This chemically resistant version isfitted with Chemraz° internal valve pads and stainless steel fittings.nXDS-R has the gas ballast blanked off so it cannot be accidentallyopened. This is useful for applications such as rare gas recirculationor gas recovery. PRODUCT FEATURES TEMPERATURE CONTROLLED FAN Allows reduced fan speed under low loadconditions for reduced acoustic noise fromonly 52 dB(A). BEARING SHIELD Ensures separation between process gasesand bearing lubrication to ensure cleanvacuum and no possibility of contaminationto lubrication from process gases， whichprolongs bearing life. SMART DRIVE Means consistent performance globally， easeof control，lower power consumption andautomatic voltage adjustment delivering theultimate in user experience. ENHANCEMENTS IN SCROLL DESIGNDeliver higher speeds and a decade lowerultimate pressures than first generationscroll pumps with ultimate from only7x10mbar IMPROVED TIP SEAL TECHNOLOGY Delivers a step change in life， with a typicaltip seal life of more than 2 years on mostapplications. HIGH FLOW GAS BALLAST FEATURE Allows pumping of vapours including watervapour at up to 240 gh. Technical data Units nXDS6i nXDS10i nXDS15i nXDS20i Vacuum data Peak pumping speed m³h1(cfm) 6.2(3.6) 11.4(6.7) 15.1(8.9) 22.0(13.0) Ultimate vacuum (1) mbar (Torr) 0.02(0.015) 0.007 (0.005) 0.03 (0.022) Ultimate vacuum with gas ballast mbar (Torr) 0.05(0.038) 0.04 (0.03) 0.06(0.045) Water vapour tolerance mbar (Torr) 35(26) 20 (15) Water vapour handling capacity gh1 110 145 240 220 Maximum continuous inlet pressure (2) mbar a (Torr a) 200(150) 50(38) Maximum gas ballast/purge pressure bar gauge (psig) 0.5(7) Motor data Supply voltage V 100-127/200-240(+/-10%) Supply frequency Hz 50/60 Nominal rotational speed rpm 1800 Minimum standby rotational speed rpm 1200 Speed control resolution 1 Power at ultimate W 260 280 300 260 Motor power W 660 Power connector IEC EN60320 C13 Recommended fuse， 230 V (115 V) A 10(13) Physical data Weight kg (lb) 26.2(58) 25.8(57) 25.2(56) 25.6(56) Inlet connection NW25 Exhaust connection NW25 Noise level at ultimate dB(A) 52 Noise level with acoustic enclosure dB(A) 47 Vibration at inlet flange mmsl(rms) <4.5 Leak tightness (static) mbarls1 <1x10-6 Operatingtemperature range ℃ (°F) 5 to 40 (41 to 104) (1) Measured as total pressure. (2) These pumps are designed to pump down from atmospheric pressure， but prolonged operation at inlet pressures higher than specified may reduce bearing life. Dimensions in millimetres (inches) B. (4x)Rubber feet Performance nXDS10i nXDS6i nXDS15i nXDS20i 1. Normal pumping speed 4. Min standby power2. Normal full power 5. Min standby speed 3. Normal GB speed Pumps： Accessories and spares： Product description Order number Standard product nXDS6i A73501983 nXDS10i A73601983 nXDS15i A73701983 nXDS20i A73801983 Corrosion resistant variants (C) nXDS6iC A73502983 nXDS10iC A73602983 nXDS15iC A73702983 nXDS20iC A73802983 Variants without gas ballast (R) nXDS6iR A73503983 nXDS10iR A73603983 nXDS15iR A73703983 nXDS20iR A73803983 nXDS with common accessories Product description Order number Accessories TIC (Turbo)200 W D39712000 TIC (Turbo and Instruments) 200 W D39722000 Inlet/exhaust filter NW25 A50597805 Gas ballast adaptor blank A73501806 Gas ballast adaptor with 0.25 mmrestrictor A73501809 Gas ballast adaptor with no restrictor A73501811 Silencer NW25 A50597000 Vibration isolators (pack of 4) A24801441 Acoustic enclosure 110-120 V NRY5CO000 Acoustic enclosure 200-240 V NRD797000 Spares Tip seal kit A73501801 Bearing replacement kit (1) A73501802 Exhaust and ballast valve kit(standard and R version) A73501803 Exhaust and ballast valve kit(C version only) A73501804 Chemical adaptor kit for nXDS6i，10i or 15i A73501807 Chemical adaptor kit for nXDS20i A73501808 Inlet/exhaust filter spares-5 micron element A50597802 Inlet/exhaust filter spares- 1 micron element A50597803 Silencer spares kit A50597800 Cooling fan A73501707 Gas ballast control knob A73501059 Cord sets UK，three pin plug A50505000 North European plug A50506000 North American plug A50507000 No plug A50508000 XDS dry scroll pumps have become industry standard when drypumping is essential， proving to be a robust and clean vacuum pumpsolution in a range of applications and processes. The XDS35i family of scroll pumps offer proven dry， cleanvacuum solutions for a wide range of applications， with smartdrive technology to look after the pump and provide worldwideperformance. Now， a combination of the patented double start scroll formtechnology and by-pass valves have enabled Edwards to offer theXDS35i Enhanced range of pumps to complement our original family. XDS35i and XDS35i Enhanced pumps are available as standard pumpswith gas ballast， versions of the pump with no Gas Ballast (wellsuited for rare gas recirculation and gas recovery applications)andthe C versions of the pumps featuring Chemraz@ internal valves andstainless steel fittings for extra protection from the pumped media. The XDS46i shares many of the same features of the XDS35i butwith a peak speed of 40 mh. The pump has been optimised formaximum pumping speed at inlet pressures between 1 mbar and 10mbar， making it ideally suited for backing turbomolecular pumps. Chemraz@ is a registered trademark of Greene Tweed PRODUCTFEATURES BEARING SHIELD Ensures separation between process gasesand bearing lubrication to ensure cleanvacuum and no possibility of contaminationto lubrication from process gases， whichprolongs bearing life SMART DRIVE Means consistent performance globally，pump overload protection and remote start/stop capability. HIGH FLOW GAS BALLAST FEATUREAllows pumping of vapours including watervapour at up to 240 gh. UNIQUE AXIAL AIR GAP MOTOR Reduces overall pump size and gives lowpower and noise. SIMPLE SINGLE SIDED SCROLL DESIGN Allows maintenance to be done in minutesfor low cost of ownership and maximumup-time. TAKE ANOTHER STEP The Enhanced versions offer up to 20%lower peak power requirements duringinitial pump down which enables the pumpdown of large volume chambers with no lossof performance and has up to 25% morepumping speed at these roughing pressureswhich helps on higher frequency cycling.applications as well Technical data Units XDS35i XDS35i Enhanced XDS46i Vacuum data Peak pumping speed m³h-1(cfm) 35(21) 40(23.5) Ultimate vacuum (1) mbar(Torr) 0.01 (0.008) 0.03 (0.02) 0.05 (0.04) Ultimate vacuum with gas ballast 1 mbar (Torr) 0.02 (0.015) 0.04(0.03) 0.08(0.06) Ultimate vacuum with gas ballast 2 mbar (Torr) <10(7.5) Max inlet pressure for water vapour mbar (Torr) 35(23) 40(30) Water vapour handling capacity GBII gh 240 Maximum continuous inlet pressure (2) mbar a (Torra) 40(30) 1000(760) 40 (30) Maximum gas ballast/purge pressure bar gauge(psig) 0.5(7) Motor data Supply voltage V 100-120/200-240(+/-10%) Supply frequency Hz 50/60 Nominal rotation speed rpm 1750 Power at ultimate W 440 380 Motor power W 520 Power connector IEC EN60320 C19 Recommended fuse， 230 V (115 V) A 16(3)(20) Physical data Weight kg (Ib) 48 (105) Inlet connection NW40 Exhaust connection NW25 Noise level at ultimate dB(A) 57 55.4 Noise level with acoustic enclosure dB(A) 48 46.4 Vibration at inlet flange mms(rms) <4.5 Leak tightness (static) mbar ls-1 <1x10-6 Operating temperature range ℃(F) 5 to 40 (41 to 104) (1) Measured as total pressure. (2) These pumps are designed to pump down from atmospheric pressure， but prolonged operation at inlet pressures higher than specified may reduce bearing life.(3) For UK 240 V use 13 A fuse. Dimensions A.NW40B. NW25 Performance 1. Speed 2. Power 3. Transient power Ordering informationPumps： Accessories and spares： Edwards is delighted to introduce the new air cooled nXLi dry pumprange， designed to deliver a consistent performance worldwide withcomplete user flexibility in mind. This new single-phase pump isavailable in two options： nXL110i and nXL200i. Both are optimisedfor LCMS and ICPMS duties and are capable of handling gas loads ofup to 25 slm. nXLi can also be used on chambers up to 100 litres， atcontinuous inlet pressures up to 15 mbar with occasional pump down. PRODUCT FEATURES AIR COOLED SINGLE-PHASE DRY PUMP offering two pumping speed options of either110m’hror 200 hrl in the pressure range of1 to 10mbar COMPACT AND QUIET small footprint and quiet operation for animproved work environment and better useof lab space OIL FREE NON-CONTACTING MECHANISM no oil to dispose of and maintenance freeensures extended operation and maximumup time FLEXIBILITY OF CONTROL Manual control， simple remote control andserial communications (RS485 with Modbuscommand set) allow more control options forthe system builder PROVEN RELIABILITY based on Edwards iXL range ofsemiconductor dry pump technology forpeace of mind with a proven track record ofperformance ENHANCED EMCVARIANT high volt variant to meet the EU harmonicemissions requirement of EN61000-3-2 5 YEAR SERVICE INTERVAL Long service interval minimises down timereducing cost of ownership Technical data Dimensions Units nXL110i nXL200i Pumping Speed (Pneurop 6602) m3h1 110 200 Ultimate Vacuum (Total Pressure) mbar <2x102 Displacement (50/60Hz) mh1 131 283 Inlet Flange* NW40 Outlet Flange* NW25 Maximum Permitted Outlet Pressure bar gauge/ psig 0.5/7.0 Operating Temperature Range °C 10-40 Nominal Rotational Speed rpm 9000 Power Connector 1-ph IECEN60320 C19 Power at Ultimate kW 0.65 Power at Typical Application Condition (2-10 mbar) kW 0.7-0.9 Flow at Typical Application Condition slm 3-15 6-22 Max Power During Ramp Up kW 1.1 Leak Tightness mbar Is-1 1.0x10-5 Weight kg 75 81 Noise (Pressure) dB(A) 56.7 Vibration at Inlet Flange mmsl (rms) <2.5 BOTH= 307mm *Alternative connections available upon request Pertormance @o 1.nXL110i 2. nXL110i in transient overload protection 3. nXl110i supply power (kW) 4.nXL200i 5. nXL200i in transient overload protection 6. nXI200i supply power (kW) Order information Product description Order number nXL110i NW40 200-230V 50/60 Hz A77012320 nXL110i NW50 200-230V 50/60 Hz A77012420 nXL200i NW40 200-230V 50/60 Hz A77022320 nXL200i NW50 200-230V 50/60 Hz A77022420 Accessories and spares Product description Order number 2m electrical supply cable， UK， three pin plug A50505003 2m electrical supply cable，North European Plug A50506003 2m electrical supply cable， North America/Japan plug contact Edwards 2m electrical supply cable， right angled connector， UK， three pin plug A50505006 2m electrical supply cable， right angled connector， North European plug A50506006 2m electrical supply cable， right angled connector， North America/Japan plug contact Edwards Digital operator D37520056 EM single and two stage oil sealed rotary vane pumps are renownedfor achieving high ultimate vacuum and rapid pumping speeds， withquiet operation and compact size. These pumps have been proven toprovide long term reliable performance over many years in a rangeof scientific and laboratory applications， and are the ideal partner foryour turbomolecular pump. PRODUCTFEATURES HIGH QUALITY OILS with additives to prolong life whilst notimpacting vapour pressure. LARGE WATER VAPOUR HANDLINGCAPACITY gas ballast valve. NO CUSTOMER WIRINGintegral IEC connector. VISUAL INSPECTION OF OIL LEVEL ANDCONDITION O ring sealed sight glass. LOW SURFACE TEMPERATUREforced air cooling. WIDE VOLTAGE MOTORS all major countries covered with less variants. Technical data Units E2M0.7 E2M1.5 E1M18 E2M18 E2M28 Vacuum Data Peak pumping speed， 50 Hz (60 Hz) mh(cfm) 0.75(0.5) 1.6(1.2) 17(12.1) 17(12.1) 27.5(19.5) Ultimate vacuum(1) mbar (Torr) 3.0x103(2.3×103) 1x103(7.4x104) Ultimate pressure with gas ballast mbar (Torr) 2x101(1.5x10-1) 2.5x10²(1.9x102) 6.5x101(4.8x10-1) 1.5x10²(1.1x102) Ultimate pressure with PFPE oil mbar (Torr) 3x101(2.3x10-l) 1x102(7.5x103) Water vapour tolerance mbar (Torr) 15(11) 50(38) 20(15) 30 (23) Water vapour capacity gh-1 8 16 650 300 700 Maximum continuous inlet pressure mbar a (Torr a) 1013(760) Maximum gas ballast/purge pressure bar gauge (psig) 0.5(7) Motor Data Supply voltage V 100-120/200-240(+/-10%) 115/200-230(+/-10%) Supply frequency Hz 50/60 Motor power， 50 Hz (60 Hz) W 90(90) 160(160) 550(750) 750(900) Nominal rotation speed， 50 Hz (60 Hz) rpm 1400 (1700) 2800 (3400) 1440 (1720) Power connector (1) IEC EN60320 C13 IEC EN60320 C19 Recommended fuse， 230V (115V) A 6(10) 15(3)(25) Physical Data Weight kg (lb) 10 (22) 37 (82) 39(86) 44(97) Oil type (recommended) Ultragrade 15 Ultragrade 19 Oil capacity (min-max) litre 0.2-0.28 0.9-1.4 0.75-1.05 1.2-1.5 Inlet flange NW10 NW25 Exhaust flange(2) Nozzle 11mm external0removable from 3/4 in BSP tapped hole Nozzle 15 mm external diameter removable from 3/4 in BSP tapped hole Noise level at ultimate (50 Hz) dB(A) 43 54 57 Noise with acoustic enclosure dB(A) 36 47 50 Vibration at inlet flange mms l(rms) No data <4.5 Operating temperature range 12-40 13-40 (1) measured as total pressure ( ( 2) p um ps liste d with IE C con n ector only ) (3) for UK 240 V use 13 A fuse (4) PFPE variants are supplied with NW25 outlet connection 18 1118 28 E2M0.7 E2M1.5 Dimensions A B D E F G H K E1M18 504(19.84) 247(9.72) 10(0.39) 260(10.24) 83(3.27) 20(0.79) 251(9.88) 170 (6.69) 159(6.26) 27.4(1.08) E2M18 550(21.65) 295(11.61) 10(0.39) 260(10.24) 131(5.16) 20(0.79) 251(9.88) 170(6.69) 207(8.15) 27.4(1.08) E2M28 584(22.99) 331(13.03) 13(0.51) 347(13.66) 111(4.37) 20(0.79) 251(9.88) 170(6.69) 240.5 (9.47) 25.5(1.00) Pertormance E1M18/E2M18 and E2M28 Order informationPumps： Product description Order no. Ultragrade PFPE E2M0.7 200-230V， 1-ph，50/60Hz， IEC 60320 connectors A37141919 - E2M0.7 100-120V， 1-ph，50/60Hz， IEC 60320 connectors A37141902 - E2M1.5 200-230V，1-ph，50/60Hz， IEC 60320 connectors A37132919 E2M1.5 100-120V， 1-ph，50/60Hz， IEC 60320 connectors A37132902 - E1M18 200-230/380-415V，3-ph， 50Hz or 200-230/460V，3-ph，60Hz A34310940 - E1M18 115/200-230V，1-ph， 50/60Hz with IEC60320 connector， factory set to 230V A34317984 A34325984 E2M18 200-230/380-415V，3-ph， 50Hz or 200-230/460V，3-ph，60Hz A36310940 A36321940 E2M18 115/200-230V，1-ph，50/60Hz with IEC60320 connector A36317984 A36325984 E2M28 HC IE3 EU/US 50/60Hz， 380-400V 3-ph， 50Hz or 230/460V 3-ph， 60Hz A37333940 A37343940 E2M28 HC IE3 Asia 50/60Hz，200V 3-ph， 50/60Hz or 380V 3-ph， 60Hz A37333934 A37343934 E2M28 115/200-230V，1-ph， 50/60 Hz with IEC60320 connector A37317984 A37325984 Accessories and spares： (1) suitable for EM18 and E2M28 on low throughput applications RV oil sealed pumps have been the industry standard rotary vanepump for laboratory applications for many years thanks to designfeatures that make them low cost to operate and maintain versusother rotary pumps. With their unique mode selector， one pump can be used for bothhigh throughput and high vacuum applications； self-centringmechanism， no dowels to set and can replace any component； highvapour pumping capability and broad range of accessories makes RVpumps the best long term proposition for laboratory applications. Edwards new nRV14i two stage oil sealed rotary vane pump hasbeen designed to deliver an enhanced and a consistent performanceworldwide. By incorporating Edwards drive technology， with theindustry leading RV pump， oil sealed vacuum technology has beenbrought into the 21st century. PRODUCT FEATURES UNIQUE MODE SELECTOR SWITCH enables high vacuum and high throughputoperation from a single pump. HIGH GAS BALLAST FLOW RATEfor up to 220 gh-water vapour pumpingcapacity. FAST ACTINGINLET VALVE with controlled opening for systemprotection. HIGH QUALITY OILSwith additives to prolong life whilst notimpacting vapour pressure. .LOW NOISE at just 48 dB(A) O RING SEALED SIGHT GLASS allows visual inspection of oil level condition. FORCED AIR COOLING ensures low pump surface temperature. FLEXIBLE CONTROL-ENJOY THE DIFFERENCE control is at the core ofnRVi，either manual，simple I/O remote or serial communicationsmay be utilised to provide real control andbetter installation for the system builder.Standby mode allows the user to set thepumping speed and tune performance. Technical data Units RV3 RV5 RV8 RV12 nRV14i Vacuum data Peak pumping speed， 50 Hz (60 Hz) m3h1(cfm) 3.3(2.3) 5.1(3.6) 8.5(5.9) 12(8.4) 14.2(8.4) Ultimate vacuum (1) mbar (Torr) 2.0x103(1.5x10-3)；2.0x102(1.5x10-2) with PFPE oil Ultimate vacuum with gas ballast 1 mbar (Torr) 3.0x10²(2.3x102) Ultimate vacuum with gas ballast 2 mbar (Torr) 1.2x10- (9.1x102) 6.0x10² (4.6x10) 1.2x101(9.1x102) Ultimate vacuum in high throughput mode mbar (Torr) 3.0x10(2.3x10-2) Water vapour tolerance mbar (Torr) 80(60) 50(38) 60 (45) 32(24) 32(24) Water vapour handling capacity gh1 220 290 290 Maximum continous inlet pressure (2) mbar a (Torr a) 1013 (760) Maximum gas ballast/purge pressure bar gauge (psig) 0.5(7) Motor data Motor rating 1 phase (nominal)， 50 Hz (60 Hz) W 450 (550) Motor rating 3 phase， 50 Hz (60 Hz) W 250(300) 450 (550) N/A Nominal rotational speed， 50 Hz (60 Hz) rpm 1470 (1760) 1800 Physical data Weight kg (lb) 25 (55) 28(61.6) 29(63.8) 31.5(69.3) Oil type (recommended) Ultragrade 19 Oil capacity (min -max) litres 0.42-0.7 0.45-0.75 0.65-1.0 Inlet connection NW25 Exhaust connection NW25 Noise level at ultimate (50 Hz) dB(A) 48 54.5 Noise level with Acoustic Enclosure (50 Hz) dB(A) 41 48 Vibration at inlet flange mm(rms) <4.5 Operating temperature range C(°F) 12 to 40 (54 to104) (1) measured as total pressure (2) pump should be operated in high throughput mode for continuous operation above 100 mbar Dimensions 1. Lifting bracket (RV8 and RV12 pumps only； a lifting handle is fitted to the RV3 and RV5 pumps).2. On-off switch (single-phase pumps only). A B D E F RV3 430(16.93) 158(6.22) 225(8.86) 156(6.41) 111(4.37) 29(1.14) RV5 430(16.93) 158(6.22) 225(8.86) 156 (6.41) 111(4.37) 29(1.14) RV8 470(18.50) 158(6.22) 225(8.86) 196(7.72) 111(4.37) 35(1.38) RV12 490(19.29) 158(6.22) 225(8.86) 216(8.50) 111(4.37) 35(1.38) Single phase pump diagram shown， 3 phase pumps look different but share the same dimensions.Dimensions shown in mm(inch). Pertormance RV3/RV5 50 Hz RV3/RV5 60 Hz RV8/RV12/nRV14i 50 Hz 1. High vacuum mode， gas ballast =0 2. High throughput mode， gas ballast =0， High vacuum mode， gas ballast =1 3. High throughput and vacuum mode， gas ballast=l/ Order informationPumps： Accessories and spares： Product description Order no. Order no. Product description Order no. UltragradeOil PFPE prepared() Accessories Foreline trap-FL20K A13305000 RV3 115/230V，50/60Hz set to 230V A65201903 A65209903 Oil mist filter-EMF10 A46226000 100/200V， 50/60Hz A65201904 A65209904 Oil mist filter-EMF20 A46229000 200-220/380-415V，50Hz200-230/460V， 60Hz，3 phase A65201905 A65209905 Clean application oil return kit A50419000 115/230V，50/60Hz set to 115V A65201906 A65209906 Adjustable gas ballast oil return kit A50523000 RV5 115/230V，50/60Hz set to 230V A65301903 A65309903 Vibration isolators (pack of 4) A24801404 100/200V， 50/60Hz A65301904 A65309904 Acoustic enclosure 110-120V NRD317000 200-220/380-415V，50Hz 200-230/460V，60Hz，3 phase A65301905 A65309905 Acoustic enclosure 200-240V NRD318000 Spares Clean and overhaul kit A65201131 115/230V，50/60Hz set to 115V A65301906 A65309906 RV3 blade kit A65201130 RV8 115/230V，50/60Hz set to 230V A65401903 A65409903 RV5 blade kit A65301130 100/200V， 50/60Hz A65401904 A65409904 RV8 blade kit A65401130 200-220/380-415V， 50Hz200-230/460V， 60Hz，3 phase A65401905 A65409905 RV12/nRV14i blade kit A65501130 Oil Ultragrade 19， 1 litre bottle H11025015 115/230V，50/60Hz set to 115V A65401906 A65409906 Ultragrade 19， 4 litre bottle H11025013 RV12 115/230V，50/60Hz set to 230V A65501903 A65509903 Fomblin YVAC 06/6 1 kg (532 ml) H11301019 100/200V，50/60Hz A65501904 A65509904 Fomblin YVAC 06/65kg H11301020 200-220/380-415V，50Hz200-230/460V， 60Hz， 3 phase A65501905 A65509905 Cord sets UK，three pin plug A50505000 115/230V， 50/60Hz set to 115V A65501906 A65509906 North European plug A50506000 nRV14i 100-127/200-240V1-ph50/60 Hz A65921983 - North American plug A50507000 A50508000 No plug A50508000 Pumps fitted with ATEX approved motors are available， contact Edwards for detailsPumps are supplied with initial charge ofUltragrade oil. GAMMAVACU U M Capture pumping technologies create high vacuum (HV) andultra-high vacuum (UHV) environments for a variety of applications，ranging from portable mass spectrometers to large scale particleaccelerators. They can create the highest possible vacuum at aneconomical cost. Edwards offers a range of Ion Pumps， Titanium Sublimation Pumps，Non-Evaporable Getter Pumps and accessories exclusively throughGamma Vacuum. PRODUCT FEATURES MECHANICALVIBRATION ELIMINATED Capture pumps have no moving parts.Vibration from moving parts and electricalnoise is eliminated. HIGH RADIATION TOLERANCE Capture pumps are built with radiationtolerant materials in excess of 10° Gray.Connectors and cables are also built withradiation tolerant materials for years ofcontinuous operation. HIGH TEMPERATURE TOLERANCEWithout any special consideration， capturepumps can be baked to 250°℃. Removing themagnets allows for hotter bakes up to 450℃.Long hot bakes are critical to every UHV system. REGULAR MAINTENANCE ELIMINATED Capture pumps require virtually nomaintenance and avoid costly vacuum eventsbecause they are sealed from atmosphere，saving time， money and resources. LOW INITIAL AND OPERATIONAL COSTSInitial cost is typically less than comparablespecifications of other types of vacuumpumps. They use minimal or no power foryears of low cost operation. Technical data： Smaller Pumps 6-Magnets removed Ordering informationlon pumps and integrated TSP/NEG： Technical data： Larger Pumps Units 100L 200L 300L 400L 400LX 600L 600LX 800LX 1200LX Pumping speed I/s 80-100 160-200 240-300 320-400 320-400 480-600 480-600 640-800 960-1200 Port option DN100 (6")(1) 6S or 6D DN160 (8")(2) 8S or 8D 8S，8D or 8P 8S or 8D 8S，8D or 8P 8S or 8D DN200 (10") (3) 10S or 10D 10S， 10D or10P 10S or 10D Element choice TiTan CV (Diode) . TiTan DI (Noble Diode) . . D . . . . . TiTan CVX (Diode XHV) . . . . . . . . . TiTan DIX (Noble Diode XHV) . . . . TiTan TR (Triode) Feedthrough choice SC 10kVSAFECONN OP Perkin Elmer OV Old Varian D . . . *VR Varian StarCell@ . . . . . . . FI FisherInterlock Other data Internal heater option Internal TSP/NEG option (4) D . ● . . . . Weight kg (lbs) 29(65) 50(112) 66(145) 67(148) 95 (210) 103(226) 122(270) 127(280) 206(452) Shipping weight kg(Ibs) 47(105) 69(152) 89(195) 85(188) 113(250) 127(280) 141 (310) 145(320) 254(560) Ultimate pressure mbar <1x1011 Starting pressure mbar <1x103 Lifetime(hrs at 1x 10mbar) hours Diode/Noble Diode 50，000； Triode 80，000 Operating bake temperature 250 Maximum bake temperature (5) 450 Dimensions (LxWxD) mm 326x128x252 325x413 x233 325x413x337 325x413x413 537x413x233 325x513x513 537x413x336 537x413x413 650x513x 513 1 -6S= single 6" port； 6D=double 6" ports (top and bottom) 2-8S = single 8"port； 8D=double 8" ports (top and bottom)； 8P= double 8” ports (top and side) 3 - 10S= single 10”port； 10D= double 10"ports (top and bottom)； 10P= double 10”ports (top and side) 4-Extra side or bottom port required 5-Magnets removed Ordering information lon pumps and integrated TSP/NEG： 1200LX 1200I/s Titanium Sublimation Pumps (TSPs) are often used in combinationwith ion pumps or independently to remove reactive gases from thevacuum environment. Combined with an ion pump， the TSP allowsfor low ultimate pressures in a shorter amount of time. All TSPcomponents are bakeable to 400°C. TSPs operate by heating a titanium filament and subliming (convertingfrom solid to gas phase) titanium molecules onto a surface. Sublimedtitanium molecules are then available to chemically react with reactivegases， like oxygen and nitrogen， and disassociate and diffuse hydrogen.TSPs can operate from 10 to 1012 mbar and have pumping speeds inexcess of 10，000 Is for hydrogen. Product features TSP FILAMENT CARTRIDGE The filament cartridge is mounted on a 2-3/4” CFF (DN40). The feedthroughsupports three titanium-molybdenum filaments and a return path for groundisolation. Each filament contains 1.5 grams of usable titanium and averages20 hours of operation. LIQUID CRYOSHROUD The liquid cryoshroud consists of a double walled， type 304L stainless steelcylinder with two liquid nitrogen feedthroughs (.375 in. diameter) with flaretype fittings. It provides 1578 cm2 (245 in2) of liquid nitrogen cooled surfacearea that provides pumping speeds up to 12，000 Is-1 for hydrogen (see table).The shroud is mounted on an 8 in. CFF (DN160). AMBIENT SPUTTER SHIELD The ambient sputter shield economically maximizes surface area whencooling is not practical or possible. It provides 827cm2 (128in2) of ambienttemperature surface area that provides pumping speeds up to 2200 ls-1 forhydrogen (see table). The shield is mounted on an 8 in. CFF (DN160) or a 6 in.CFF (DN100). H CO H，O Area Temperature Rate Speed Rate Speed Rate Speed Typical TSP pumping speeds cm²/inch² ℃ Is/cm² Is1 ls/cm² Is1 Is1/cm² Is1 Liquid cryoshroud (8”) 709/110 20 2.6 1843 8.2 5814 7.3 5176 1578/245(1) -195 17 12053 11 7799 14.6 23039 Ambient sputter shield (8") 827/128 20 2.6 2150 8.2 6780 7.3 6037 Ambient sputter shield (6") 621/96 20 2.6 1614 8.2 5092 7.3 4533 (1) applies to H，O speed only Ordering information Product description Order number Product description Order number TSP cartridge 3 filaments 2-3/4” CFF G360819 1.5metre cable with MS connectors MSHC1MS TSP ambient sputter shield 6”CFF G360190 3 metre cable with MS connectors MSHC3MS TSP ambient sputter shield 8" CFF G360044 6 metre cable with MS connectors MSHC6MS TSP liquid cryoshroud 8”CFF G360051 10 metre cable with MS connectors MSHC10MS NON-EVAPORABLE GETTER PUMPS (NEG) NEGs are reactive metals that have been pressed onto solid substrates or sintered into discs. The amount of material usedcontrols the speed and capacity of the NEG pump， but typically ranges from 50 to 3，500 Is"lof hydrogen. As NEGs becomesaturated with gases， they can be reactivated without venting to atmosphere. Their prime advantage is their ability to pumpfor extended periods without the need for power. NEGs are ideal for pump down， stay down applications and can be used to boost the performance of an ion pump or as astandalone pump. They are ideal for UHV applications due to their compact size and high H， pumping speed. They are notsuitable for applications that cycle up to atmospheric pressure regularly as this will saturate the surface and they can only bereactivated a finite number of times. N50 N100 N200 N300 N400 Technical data Units N50 N100 N200 N300 N400 Flange DN40 (2.75") CFF Total mass kg (lbs) 0.48(1.05) 0.54(1.19) 0.75(1.65) 0.8 (1.79) 0.85(1.88) Alloy composition Zr (70%)，V (24.6%)， Fe (5.4%) Getter mass g 31.5 58 108 144 180 Getter surface cm2 187 348 642 856 1070 H， pumping speed ls-1 55 106 208 312 412 CO pumping speed ls-1 27 51 94 125 156 H， sorption capacity Torrl 630 1170 2160 2880 3600 Co (25℃) sorption capacity Torr| 0.1 0.2 0.4 0.6 0.8 CO total sorption capacity Torrl 284 526 972 1296 1620 Insertion length mm 46 61 89 110 130 Diameter mm 34 Ordering information Product description Ordernumber Product description Order number 50 IsNEG cartridge pump 2-3/4”CFF GN50 400IsNEG cartridge pump 2-3/4” CFF GN400 100 IsNEG cartridge pump 2-3/4”CFF GN100 1 metre cable with XLR connectors XLRS1N100 200 IsNEG cartridge pump 2-3/4” CFF GN200 3 metre cable with XLR connectors XLRS3N100 300 IsNEG cartridge pump 2-3/4” CFF GN300 6 metre cable with XLR connectors XLRS6N100 The DIGITELTM family of ion pump controllers offers the right balance of performance， power and protection. DigitelTM SPCe small pump controller The SPCe is a versatile way to fully operate a single ion pump. An LCD pressure/current/voltage display along withstandard serial communications makes the SPCe able to accommodate the needs of basic and advanced users. DigitelTM QPC quad pump controller The new QPC controller offers adjustable output voltage， nano ampere resolution plus up to four independent powersupplies， allowing for high current control of up to four ion pumps independently. It has an easy-to-read colourtouchscreen LCD display that simultaneously displays pressure， current， and voltage and includes serial and ethernetcommunications as standard. DigitelTM TSPq and NEGq controller The TSPq/NEGq controller has an easy-to-read touchscreen LCD display that displays all manual or programmedfiring parameters. Manual operation is as simple as pressing one button. Programming is just as easy by viewing allprogramming options on one screen. The TSPq/NEGq controller can operate up to 8 TSP filaments or 2 NEG pumps. Units SPCe QPC TSPq NEGq Input power Voltage 90-240 V a.c. or 24 Vd.c. 90-130 or 200-240 V Frequency Hz 48-62 Independent outputs 1 1to 4 1 1 Open circuit voltage 3000-7000 V d.c. (+/-configurable) 17 V a.c. 35 Va.c. Current (maximum) mA 50 125 55000 8000 Watts (maximum) 50 125 800 220 Resolution 1nA 1nA 0.1A - High voltage connections 1 10 kV SHV or Fischer 1-4 10 kV SHV or Fischer 1-2MS style， configurable 1-2 XLR Display type LCD 1/4 VGA colour touchscreen LCD 1/4 VGA touchscreen LCD 1/4 VGA touchscreen LCD Readouts Pressure， current， voltage and programmable options Current， on-time and programmable options Analog outputs Voltage Linear， configurable Current/pressure Linear or logarithmic， configurable Setpoints One relay，one TTL Four relay， four TTL Communications Local/Remote/Full Ethernet Serial： 232， 422，485 Weight kg (lbs) 1.5 (3.3) 9.5 (21) 16.8 (37) Size 2U high， 1/4 rack wide 3U high， 1/2 rack wide 313 mm (12.3") deep 438 mm (17.2") deep Additional features SAFECONN SAFECONN Manual， programmed or remote control AUTOSTART/AUTORUN AUTOSTART/AUTORUN TSP enable NEG enable High voltage enable High voltage enable Fowler-Nordheim calibration High-pot capability SAFECONNTM High voltage interlock The integrated SAFECONNTM high voltage interlock system was introduced by Gamma Vacuum to create a safe environmentwhen working with the high voltage cables of an ion pump. Materials carry up to 10kV of DC current at temperatures up to 250°C. Radiation tolerance is balanced with material flexibility to providea 90°turning radius while maintaining exposures up to 2 x 10 Gray. The silicone cable carries high voltage and an isolated 5-volt signal for the safety circuit. When properly connected， the 5-volt circuit is satisfiedand only then can the DIGITELTM controllers enable high voltage by the end user or through remote commands. Once high voltage is enabled， the controller automatically disables high voltage when the cable is disconnected from the ion pump or controller. The system is electrically isolated to eliminate noise potential that could interfere with other electrical equipment on the same vacuum system. The SAFECONN safety connection guarantees ground， high voltage， and then safety interlock connectivity when connecting to preventaccidental arcing. The SAFECONN system guarantees the safety of the operator and equipment from the hazards of working with high voltage by eliminatingelectrical shocks and false positive vacuum Standard SAFECONN Connector Options Controller Connector Options Pump End Options Compatible with Gamma Vacuum or Agilent/Varian Interlock System Compatible with current or legacy Gamma Vacuum orAglient/Varian Feedthroughs (non-SAFECONN connectors available) Technical data Specification Material (reference) Radiation (Gray， tolerance) Temperature(℃， max) Copper (1，3， 4) >10° 250 Brass/nickel (8) >108 327 Beryllium/copper/gold (8) >108 643 Spring steel/nickel (8) >108 1427 PEEK (8) 5x10' 325 Fiberglass braid (6) 2x10 250 Silicone rubber (2， 5， 7，8) 2x105 250 Description Unit Value Bend Radius mm (in) 12.7 (0.5) Diameter， nominal mm (in) 8.0(0.3) Minimum removal clearance mm (in) 127(5.0) Ordering information Controllers： Ion pump cables： Controller connector Cable type Cable length Pump connector SCP SAFECONN (Silicone) SC Silicon 33m SC SAFECONN (Silicone) FB Fischer Interlock (Silicone) TF PTFE 66m Fl Fischer Interlock (Silicone) 10K 10kV SHV (PTFE) 10 10m SCO Original SAFECONN (Silicone) N None (ALL) 30 30m OV Original Varian (Silicone) 50 50 m VR Varian Starcell (Silicone) 75 75m 5K 5kV SHV (Silicone) 100 100 m 10K 10kV SHV (ALL) N None (ALL) Edwards offers a complete range of active and digital gauges covering pressures from atmospheric to 5x10-10mbar. Each typehas its own benefits making them suitable for different applications. The below should give some guidance as to which maybe more suited to your application： Active Active gauges are complete self-contained head and driver electronics in acompact unit. These gauges typically need 24Vdc and then provide a 0-10Voutput that relates to the pressure. This output can be S-shaped or Lineardepending on the chosen unit. The benefits of active gauges are： Low power surface mount integrated circuit electronics used for acompact unit Long flexible cables can be used as they only contain a drive voltage andhigh voltage output signals rather than low voltage signals that could beprone to interference Non-specific controllers eg TIC and ADC can be used that can controlmultiple gauges without needing to specify exact gauges to use at timeofordering Digital Digital gauges are similar to Active in that they are self-contained includingdriving electronics， however they take this one step further and eliminatethe need for a separate controller. The Digital gauges simply need a supplyvoltage in the range of 15 to 48Vdc and then are serial comms enabled， socan be directly interrogated via a PC or PLC using either RS232 or RS485communications.The benefits are： Elimination of an external controller reduces overall costs， where serialcommunications can be used Units are compact and efficient due to the use of low power surfacemount integrated circuit electronics Long standard flexible serial cables can be used(although an external power supply will be required) Indicates the primary accuracy range for the specified gauge. Indicates pressure range where the gauge can be used but will not provide accurate readings. APG100 series Active Pirani Vacuum Gauges are available in 2 models. TheAPG100-XM is the standard model and measures to 10mbar， the APG100-XLC is a corrosion resistant version with measurement to 104 mbar. Both gauges feature compact size for easy installation， a linear output and areplaceable sensor tube. These gauges are compatible with all Edwards TICinstrument controllers and other Active gauge controllers and displays. Features and benefits Cable connections and gauge adjustment conveniently located， thereby minimisingthe space envelope required for access SSensor tube can be baked to 150°C AAdjustable set-point for simple process control and interlocking CSA， C/US Approved -Meets safety requirements for electrical equipment for measurementLinear output-1 Volt per decade for easy interface with vacuum control systems NW16， NW25 and DN16CF flange options for easy connection to vacuum systems ●DLED status indicator shows normal and fault conditions Remote calibration possible Replaceable sensor tube/electronics lead to a low cost of ownership · Tool-less replacement of spare parts Active Pirani Gauges Ordernumber APG100-XM atmosphere to 10mbar NW16 flange APG100-XLC=10to 104mbar D02601000 APG100-XM atmosphere to 10-mbar NW25 flange APG100-XLC=<10 mbartypically+/-15% D02602000 APG100-XM DN16CF NRD710000 Operating Storage APG100-XLC atmosphere to 104 mbar corrosionresistant NW16 flange -30 to +70°C D02603000 temperature with electronics removed APG100-XLC atmosphere to 10-4 mbar corrosionresistant NW25 flange D02604000 APG100-XLC DN16CF NRD712000 Spare sensor tubes 15 to 30 V d.c. nominal Spare sensor for APG100-XM NW16 flange D02601801 Spare sensor for APG100-XM NW25 flange D02602801 Spare sensor for APG100-XLC NW16 flange D02603801 Spare sensor for APG100-XLC NW25 flange D02604801 Spare electronic modules Spare APG100-XM electronics module DO2601800 Spare APG100-XLC electronics module D02603800 APGX H-Active Linear Convection Gauge 10-10 10-9 108 10 106 105 104 103 10 101 1 10 10 10 Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum The Active Linear Convection Vacuum Gauge has a wide measuring range from 1333 to 3 x 10mbar.The use of convection technology ensures accuracy and sensitivity are maintained to the top of thepressure range compared to conventional Pirani gauges， which lose accuracy above 100 mbar. The gauge is compact and may be mounted in any orientation， simplifying installation where space islimited. The gauge incorporates a setpoint and two LEDs， which indicate setpoint and gauge status. Wide measuring range -11333 to 3x104 mbar (1000 to 2.3 x104 Torr) · Consistent measuring accuracy -LUse of convection technology ensures consistent measuringaccuracy (typically ±15%) and repeatability (+5%) to top of range Reduced cost of ownership - Replaceable tubes are available .Standard analog output -LLog linear in range 2.5 to 9.125 V (1V/decade) -Compatible with our ADC， AGD and TIC controllers Technical data Performance Pressure range 1333 to 3x104mbar Accuracy Typically+/-15% Max overpressure 10 bar absolute (145 psi) Power supply 14.5 to 30 V d.c. Power consumption 1.5 W maximum Output signal 1.9 V to 9.12 SV d.c. Enclosure rating IP40 Dimension mm (NW25) 75x56x56 Temperature range Operating +5 to +60°C Storage -30 to +70 °C Maximum bakeout temperature with electronics removed 70°C Calibration data held in tube一Tubes are shipped pre-calibrated Easy installation in restricted spaces - Maintains accuracy in any orientation across the wholemeasuring range .Compact instrument - Significantly smaller than leading competitor convection gauges .Local status indication - LEDs indicate setpoint and gauge status at the gauge head.CSA， C/US approved Order information APGX H- Active Linear Convection Gauges Order number APGX-H NW16 aluminium D02391000 APGX-H NW16 stainless steel D02395000 APGX-H NW25 stainless steel D02392000 APGX-H 1/8" NPT stainless steel DO2396000 APGX-H electronics module D02391800 NW16 AL tube D02391801 NW16 ST/ST tube D02395801 NW25 ST/ST tube D02392801 1/8" NPT ST/T tube D02396801 APGX-H filter pack 5 (not NPT version) D02391805 AlM- Active Inverted Magnetron Gauge 10-10 109 10-8 10-7 10-6 10 104 10 102 101 1 10 102 103Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum Edwards Active Inverted Magnetron (AIM) Gauges provide accurate measurement over thevacuum range of 1 x 10to 1x10° mbar. These gauges have proved to be rugged and reliable ina wide range of applications， ranging from scientific instruments to industrial processes. The AIM-X Gauge is an inverted magnetron gauge head and gauge controller combined into asingle compact unit， and features a linear output for easy integration with a computer or PLC. The XL variants have a very low external magnetic field， these are ideally suitable for use withsensitive analytical instruments or in applications where the gauge needs to be mounted in closeproximity to a turbomolecular pump. Features and benefits 0Drive electronics combined in the gauge head - Reduce the system cost -SSave valuable rack space Wide-range， regulated， internal power supplyRuns from standard d.c. power supplies +13.5 to +36 V Tolerant to voltage fluctuations ·Standard analog output 0 to +10 V d.c. and gauge identifier-EEasy to interface with a computer or PLC - Fault output indication DLLow output impedance and integral Faraday shield - Provide high level of noise immunity - Permit long cable runs (up to 100 m) Technical data Performance Pressure range 10to 10°mbar Accuracy Typically +/-30% Max overpressure 10 bar absolute (145 psi) Power supply +13.5 to +36 V d.c. (max 1V ripple) Power consumption 2 W maximum Output signal 2 to 10 V d.c. Enclosure rating IP40 Dimension mm (NW25) 79x79x116 Temperature range Operating +5 to +60 °C Storage 0 to +70°C Maximum bakeout temperature with electronics removed NW25 70°C DN40CF 300°c Order information Active Inverted Magnetron Gauges Order number AIM-X-NW25 D14642000 AIM-XL-NW25 D14645000 AIM-X-DN40CF D14662000 AIM-XL-DN40CF D14665000 Replacement body tube assembly NW25 D14545801 DN40CF D14661801 Body tube service kt NW25 D14545802 DN40CF D14661802 AlGX- Active lon Gauge 1010 10-9 108 10 106 105 104 103 102 101 1 10 Ultra High Vacuum Medium Vacuum Low Vacuum 103 The Active lon Gauge (AIGX) is a compact active ion gauge with dual yttria coated iridium filaments，a wide measuring range from 6.6 x 10 to 6.6 x1010 mbar and a 1 Volt/decade linear output. The AIGX incorporates all benefits of the industry standard active gauging concept， with integral electronicsand replaceable tube. The gauge has a degas facility and includes features to protect and extend the lifeof the filaments. The AIGX benefits from extremely low emissions of charged particles， which makes it anexcellent choice for processes where background noise is undesirable. Features and benefits Full 8-decade measurement capability，to 6.6x1010 mbar (5x10-10 Torr) Two versions available， each with three vacuum coupling variants：-‘D’versions have a 9-pin'D'connector and standard interface 'S'versions have enhanced functionality and are fully compatiblewith the range of Edwards controllers Up to a thirty-fold reduction in charged particle processcontamination compared to leading competitors Automatic filament protection against switching on at atmosphereand running or degassing at high pressure Gauge sensitivity remains constant over the whole measuringrange， thus maintaining output accuracy at higher pressures Technical data Performance Pressure range 6.6x10²to 6.6 x10-10 mbar Accuracy Typically+/-15% Max overpressure 10 bar absolute (145 psi) Power supply +14.5 to +30.0 d.c. Power consumption Normal operation： 7W (max) Degas： 14W (max) Output signal 0.7 V to 8.7 V Enclosure rating IP30 Dimension mm (NW25) 70x70x96 Temperature range Operating Storage 0 to +40 °C-30 to +70°C Maximum bakeout temperature with electronicsremoved 200°C Continuous pressure measurement output during degas Innovative design eliminates the effects of X-ray limits Bi-colour LED gives local indication of gauge status. Wide input voltage range Electronics very easily removable for bakeout at up to 200 ℃ ‘S'versions provided with seamless automatic emission currentswitching， for prolonged filament life ‘S’versions provided with diagnostic outputs indicating emissionoff'， 'broken filament' and 'overpressure trip'to help withtroubleshooting ‘S'versions provided with a push-button adjustable set point Order information AIGX-Active lon Gauge Ordernumber AIGX-S NW25 D04850000 AIGX-S DN16CF D04851000 AIGX-S DN40CF D04852000 AIGX-DNW25 D04860000 AIGX-D DN16CF D04861000 AIGX-D DN40CF D04862000 Spare electronics module AIGX-S-replacement electronics module D04850800 AIGX-D-replacement electronics module D04860800 WRG-Wide Range Gauge 10-10 109 108 107 10-6 105 104 103 10UItra Highh Vacuum High Vacuum Medium Vacuum 10 1 10 10 103 Low Vacuum The Wide Range Gauge (WRG) family offers the capability of single port pressure measurement in the rangeatmosphere to 10° mbar， with a linear output. It's a compact solution， halving the space and connectivity hardware requirement， which can be all important inmany applications. The WRG has many novel features， including a patented striker， push-button calibration andset point controls and comprehensive diagnostics. The WRG is a cost-effective vacuum management solutionwhen used either with an Edwards controller or directly integrated into the vacuum system controls. Features and benefits Single push-button atmosphere setting Ultra compact， featuring recessed electrical connector ●Easy service； both Pirani and magnetron elements are individuallyreplaceable LLow magnetic field version (SL) available for particularly sensitiveapplications e.g. mass spectrometry and microscopy Comprehensive failure mode diagnostics facility Compatible with Edwards TIC， TAG and ADC controllers ●· D-type version including cable strain relief and enhanced ingressprotection (IP44) Technical data Performance Pressure range 103 to 10°mbar Accuracy Typically+/-15% at <100 mbar+/-30% at<10mbar Max overpressure 10 bar absolute (145 psi) Power supply +14.5 to +36Vd.c. Power consumption 2 W maximum Output signal 1.8 to 10.2 V d.c. S'and 'SL' versions IP 40 D'version IP 44 Dimension mm (NW25) 65x65x106 Temperature range Operating Storage +5 to +60°C 0 to +70°C Maximum bakeout temperature with electronics removed 70°℃ Active gauge cables Connection cable options Order number Connection cable options Ordernumber 0.5m D40001005 10m D40001100 1m D40001010 15m D40001150 3m D40001030 25m D40001250 5m D40001050 50m D40001500 Cables include FCC68/RJ45 compatible connections at both ends. Magnetron uses an advanced technique for highly reliable striking，even at high vacuum or in relatively contaminated conditions Automatic vacuum setting of Pirani gauge element Easily programmed set point covering entire measuring range Extended service intervals and gauge lifetime， through reduction ofHT voltage after ignition and low discharge current ●Microprocessor signal processing gives seamless transitionbetween Pirani and magnetron outputs as well as linear output(log pressure scale) Order information Wide Range Gauges Order number WRG NW25 stainless steel D14701000 WRG DN40CF stainless steel D14703000 WRG-SL NW25 low stray magnetic field D14711000 WRG-D-NW25 D14702000 Electronics and magnet housing WRG-S D14701800 WRG-SL D14711800 WRG-D D14702800 Replacement body tube assembly NW25 D14701801 DN40CF D14703801 Electrode assembly kit D14701802 Pirani tube replacement kit D14701803 Full body tube service kit D14701804 Active Digital Controller The Active Digital Controller (ADC) is a compact singlegauge controller and display. It features a bright LEDdisplay and simple push button controls. The ADCautomatically recognises compatible Edwards gauges，loads the appropriate look-up table and displays thepressure in commonly used vacuum units. Enhanced Active Digital Controller The Enhanced Active Digital Controller (ADC) is acompact dual gauge controller and display. It features abright LED display and simple push button controls fortwo compatible Edwards gauges. The Enhanced ADCautomatically loads the appropriate look-up table anddisplays the pressure in commonly used vacuum units. TIC Controller The TIC instrument controller offers comprehensivecontrol and display of up to 6 compatible Edwardsgauges. Intuitive user interface， 6 set points andfull Windows Software for control and data loggingfunctionality. -Plug and measure operation Bright LED display for clear visibility Choice of display units- mbar， Torr， Pascal -Supports APG100， APGXH and WRG gauges -Controls two active gauges of the same typer 2 set-point relays· Simple push button control·RS232 interface and analog output-Supports APG100， APGXH， WRG and AIM gauges -·Universal controller for up to 6 active gauges -Compact design Controller Order number Max no. of gauges No. ofsetpoints Windows software Data logging TIC controller (3 gauge) D39700000 3 3 Yes Yes TIC controller (6 gauge) D39701000 6 6 Yes Yes Active digital controller (ADC) D39590000 1 0 No No Enhanced digital controller (eADC) D39591500 2 2 No No UK power cable for TIC/ADC D40013025 EU power cable for TIC/ADC D40013030 US power cable for TIC/ADC D40013120 nAPG Digital Active Pirani Gauge 10-10 10° 108 107 10-6 10 10-4·4 103 10 101 1 10 102 103Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum Edwards nAPG series Digital Active Pirani vacuum gauges are available in two models. The nAPG-M is thestandard model and measures from atmosphere to 10mbar， the nAPG-LC is a corrosion resistant versionwith measurement from atmosphere to 10 mbar. Both gauges feature compact size for easy installation， a serial output and a replaceable sensor tube. Theyare also CSA and C/US approved as well as fully RoHS compliant due to their lead-free construction. Features and benefits Wide-range supply voltage allows operation from 15 to 48 VDC Gauge naming allows user to store gauge identification data Sensor tube can be baked to 150°℃ AAdjustable open collector set-point output for simple process control and interlocking NW16 flange for easy connection to vacuum systems -NW25 flange options on request Serial communications based on a simple ASCII， low latency， query and command protocol that canoperated in a point to point or multi-drop system with minimum overhead Remote calibration possible Cable connections and gauge adjustment conveniently located， thereby minimising the space envelope required for access CSA and C/US approved， meets the safety requirements for electrical equipment for measurement RS485 or RS232 versions Technical data Order number Performance D02690000 Measurement range nAPG-M Atmosphere to 10mbar nAPG-LC RS485 NW16 flange nAPG-LC Atmosphere to 10-4mbar Accuracy D02691500 nAPG-M Typically ±15% at <100 mbar nAPG-LC Typically ±15% at<10 mbar Maximum over-pressure 10 bar absolute Operating and storage conditions D02603801 Temperature range Operating 5 to 60°C Storage 30 to 70°C Bake-out with 150°C electronics removed Humidity 80% RH up to 31 °C decreasing linearly to 50% RH at 40Cand above Maximum altitude 3000 m Filament temperature 100°C above ambient Electrical data Electrical supply voltage 15 to 48 VDC nominal Power consumption 1W Set-point open collector transistor Rating 48 V DC 100 mA nAIM Digital Active Inverted Magnetron Gauge 10-10 10° 108 107 106 105 104 103 10 101 1 10 10 103Ultra High Vacuum High Vacuum Medium Vacuum Low Vacuum Edwards nAlM series Digital Active Inverted Magnetron Vacuum Gauges combine the gauge-head andcontroller in one compact active unit. These are new digital versions of gauges that have proved to be ruggedand reliable in a wide range of applications ranging from scientific instruments to industrial processes. The nAIM gauges feature compact size for easy installation， a serial output and a replaceable sensor tube.They are also CSA and C/US approved as well as fully RoHS compliant due to their lead-free construction. Features and benefits ●Wide-range supply voltage allows operation from 15 to 48 V DC Gauge naming allows user to store gauge identification data Rapid tube replacement without pre-calibration Low external magnetic field version (L) for sensitive analytical instruments available upon request Serial communications based on a simple ASCII， low latency， query and command protocol that can operated in a pointto point or multi-drop system with minimum overhead AAdjustable open collector set-point output for straightforward process control and interlocking CSA and C/US approved， meets the safety requirements for electrical equipment for measurement RS485 or RS232 versions 9600 to 38400 baud， 8bits， 1 start bit， 1 stop bit， no parity Technical data Performance Measurement range 10to 109mbar Accuracy typically ±30% Maximum over-pressure 10 bar absolute Operating and storage conditions Temperature range Operating Storage 5 to60°C 0 to 70°C Humidity 80% RH up to 31°C decreasing linearlyto 50% RH at 40°C and above Maximum altitude 3000 m Electrical data Electrical supply voltage 15 to 48 V DC nominal Power consumption 2W Set-point Rating open collector transistor 48 VDC 100 mA Rating 48 VDC 100 mA Order information Accessories and spares Order number Spare body tube assembly for nAIM-MNW25 flange D14545801 nAIM-IRS485 NW25 flange D14690030 nAIM RS232 NW25 flange D14690510 nAIM-I RS232 NW25 flange D14690530 Other flange sizes and low field version (L)available upon request nWRG Digital Wide Range Gauge 10-10 10 108 107 106 105 10 103 10Ultra High Vacuum High Vacuum Medium Vacuum 101 1 10 10 103 Low Vacuum Edwards nWRG series Digital Wide Range vacuum gauges offer single port pressure measurement in therange atmosphere to 10° mbar. These are new digital versions of gauges that have proved to be ruggedand reliable in a wide range of applications ranging from scientific instruments to industrial processes. The nWRG gauges feature compact size for easy installation， a serial output and a replaceable sensor tube.They are also CSA and C/US approved as well as fully RoHS compliant due to their lead-free construction. Features and benefits ●Wide-range supply voltage allows operation from 15 to 48 V DC ●Gauge naming allows user to store gauge identification data Automatic vacuum setting of Pirani gauge element Unique striker design ensures rapid striking even at high vacuum or in contaminating conditions ●儿Low external magnetic field version (L) for sensitive analytical instruments available upon request Serial communications based on a simple ASCII， low latency， query and command protocol that canoperated in a point to point or multidrop system with minimum overhead Technical data Performance Measurementrange Atmosphere to 10 mbar Accuracy Typically ±15%<100 mbar ±30%<10mbar Maximum over-pressure 6 bar absolute Operating and storage conditions Temperature range Operating Storage Bake-out with electronics removed 5 to 60 °C 0 to 70 °C 150°C Humidity 80% RH up to 31 °℃ decreasing linearly to50% RH at 40°Cand above Maximum altitude 3000m Electrical data Electrical supply voltage 15 to 48V DCnominal Power consumption 2 W Set-point open collector transistor Rating 48V DC 100 mA Order information nWRG Digital Wide Range Gauge Order number nWRG RS485 NW25 D14790010 nWRG RS232NW25 D14790510 Other flange sizes and low field version (L) available upon request Accessories and spares Order number Replacement body tube assemblyNW25 flange D14701801 The ELD500 precision leak detector is designed for fast， accurate leakdetection in a wide range of applications， fully mobile and with aneasy to control interface. Featuring with low energy consumption，extended warranty and even longer life ion source， Edwards ELD500leak detector ensures exceptional low cost of ownership with nocompromise on performance. Available in three variants： FLEX， WET and DRY， Edwards ELD500 leakdetector is versatile. All models feature a rugged turbomolecularpump optimised for the rigours of portable leak detection， idealacross all applications. PRODUCT FEATURES FLEXIBLE REMOTE CONTROL OPTIONS Colour touch screen control with localgraphical display and audible leak detection.Wireless models allow simultaneous controlof up to 10 leak detectors. MOBILE SOLUTION Low weight and integrated carry handleswhich allow it to be bench top or trolleymounted. HIGH SENSITIVITY Measurement of leaks for Helium of<5x10-2mbar ls-lin vacuum mode and<7x10mbar ls-l in sniffer mode. CUSTOMISABLE FORANY APPLICATION -VWET version with an integrated oil sealedrotary vane pump DRY version with an integrated heliumoptimised diaphragm pump 一FLEX version without a primary pump. PARTIAL FLOW KIT Allows effective pump down of large ofcontaminate flows compatible with WET andFLEXvariants. ACCURATE PIN-POINTING OF LEAKS Standard sniffer line enables operation upto 4m from the ELD500. Longer sniffer linesof up to 50m can be used with the snifferextender interface. LONG TERM STABILTIY Ensured by class leading 180°massspectrometer. Technical data ELD500 Leak Detector Units WET DRY FLEX Lowest detectable helium leak rate Vacuum operation mbar Is ≤5x10-12 ≤3x10-11 ≤5x10-12 Sniffer operation mbarIs-l ≤7x10° ≤7x10-9 s7x10-9 Maximum measurable helium leak rate Vacuum operation mbar Is1 >0.1 >0.1 >0.1 Measurement ranges decades 12 12 12 Maximum permissible inlet pressure mbar 15 15 15 Pumping speed during pumpdown， 50 Hz/60 Hz 2.5/3 1.6/1.8 N/A Helium pumping speed in the fine mode Is1 3.1 3.1 3.1 Time constant for leak rate signal S <1 <1 <1 Time until ready for operation min ≤2 ≤2 ≤2 Power consumption VA 420 350 200 Inlet flange NW25 NW25 NW25 Dimensions (WxHxD) mm 495x456x314 495x456x314 495x456x314 Weight kg 40 35.5 30 Ordering information Product description Order number ELD500 WET， 200-240V，50/60Hz D13510903 ELD500 WET， 100-120V，50/60Hz D13510904 ELD500 WET， 100-120V， 60Hz D13510906 ELD500 DRY， 200-240V，50/60Hz D13520903 ELD500 DRY， 100-120V，50/60Hz D13520904 ELD500 DRY，100-120V， 60Hz D13520906 ELD500 FLEX， 100-240V，50/60Hz D13530000 ELD500 RC-wired-remote control D13550100 ELD500 RC-wireless - remote control D13550110 ELD500 RC-wired-8m extension cable 14022 ELD500 RC-wireless - extra transmitter D13550130 ELD500 SL-standard sniffer line 4m D13550300 ELD500 SL-extended SL Interface D13550200 ELD500 SL-extended sniffer line 5m 14008 ELD500 SL - extended sniffer line 20m 14009 ELD500 SL-extended sniffer line 50m 12183 ELD500 partial flow adaptor D13550400 ELD500 transport case D13550500 ELD500 mobile trolley D13550630 ELD500 auto-start cable D13550631 ELD500 SG-helium spray gun 16555 CL-internal calibrated leak D13550910 CL-cal leak bspk. 0.5 -1E-7. screw skt D13550930 CL-calibrated leak HE 4 to 6 D13550950 CL-calibrated leak He 8 D13550943 VACUUM COMPONENTSAND FLANGE FITTINGS When you buy vacuum pump components fromEdwards， you can expect the quality and service thatonly a leading international supplier can provide.We understand that flanges and fittings are criticalto the performance of your vacuum system， andsupply only high quality products which meet thehighest specification. Convenience of supply： Single source supplier， able to provide the complete systemsolution either online or via local supply centres. High quality and reliability： Precision material control ensures a dependable vacuumperformance on sensitive or demanding applications. Comprehensive choice： Complete range for all common flange sizes in aluminium andstainless steel. NW FLANGE ASSEMBLY NW fittings， otherwise known as ISO-KF， are theindustry standard for many applications in the lowto high vacuum range. They are ideal for achievingdependable cost effective performance down to10°mbar across a range of applications from light toharsh duty. A simple fastening method means thatsystems can be easily assembled and a leak tightvacuum seal is quickly achieved. -Manufactured to ISO 2861 and DIN 28403 standards-Nominal diameters 10 mm to 50 mm-- Use with either elastomer or formed aluminium seals Choice of clamp type depending on application， access， convenience and costFor use in high-vacuum applications： pressures >10 'mbar This brochure details our most popular flange components and valves. Please refer to ourfull Product Catalogue or visit www.edwardsvacuum.com for a complete list if there are anycomponents which are not listed here. Operating pressure range (absolute) Minimum Maximum "C" clamp and centring ring 10mbar 1bar Stainless steel clamping ring and Co-seal 107mbar 10 bar Stainless steel clamp and metal seal 10-8mbar 3 bar Stainless steel clamp and Co-seal (all sizes) 107mbar 10 bar Polymer and aluminium clamps and Co-seal 107mbar 10 bar NW10 to NW25 10mbar 10 bar NW40 to NW50 10mbar 10 bar NW trapped O ring 107mbar 10 bar ISO trapped O ring 107mbar 1 bar O ring and centring ring (vacuum use only) 10mbar 1 bar Bellows 107 mbar 1 bar Flexible pipelines (1) 107mbar 1.5 bar Braided flexible pipelines (1) 107mbar 10 bar (1) Depends on size Stainless steel equivalents AISI number DIN standard Composition 304L 1.4306 X2 CrNi 19 10 316L 1.4404 X2 CrNiMo 17 13 2 Operating temperature Polymer Co-seal -10 to 80°C Aluminium Co-seal and nitrile seal -10 to 100°C Aluminium Co-seal and fluoroelastomer seal -10 to 150°C Polymer centring ring and nitrile O ring -10 to 100°C Polymer centring ring and fluoroelastomer seal -10to 125°C Nitrile O ring -10 to 100°C Fluoroelastomer O ring -10 to 150°C Polymer clamp -10 to 100°C Stainless steel clamping ring -10 to 125°C Aluminium swing/hinge clamp -10 to 200°℃ Stainless steel clamp -10 to 200°C The maximum temperature for continuous operation with fluoroelastomer is 150℃. Itmay be intermittently baked at 200 ℃. Material Generally resistant to： Generally attacked by： Nitrile Butadiene Acrylonitrile copolymer Many hydrocarbons fats， oils greases， hydraulic fluids Ozone， ketones， esters， aldehydes，chlorinated and nitro hydrocarbons Neoprene Chloroprene polymer Moderate chemicals and acids， ozone， oily fats，greases， manyoils and solvents Strong oxidizing acids and esters， ketones， chlorinatedaromatic and nitro hydrocarbons Fluoroelastomer Fluorocarbon polymer All aliphatic， aromatic and halogenated hydrocarbons，acids，animal and vegetable fats Ketones， low molecular weight esters and nitrocontaining compounds Aluminium Organic acids， fatty acids， freons， nitric acid Strong acids， alkalis chlorinated solvents， mercury Stainless Steel Organic acids， alkalis， nitric acid. Sulphuric acid (10%) Oxidizing chlorines， some organic acids， hydrochloricacid， hydrofluoric acid Polymer Liquid crystal polymer Organic acids， glycols， chlorinated solvents， ketones，mineral and oxidising acids， caustic solutions freons Sodium hydroxide， sulphuric acid (70%) Our components and flange fittings are designed to be leak-tight across the range of vacuum applications， and not intended toprovide full structural support. When designing any vacuum system， it is essential that consideration is given to the static anddynamic loads imposed on each connection. If necessary， additional mechanical support should be provided and built into thedesign. Regular inspection including leak-checking and， where appropriate， periodic replacement of components should beconsidered to ensure system efficiency and safety is maintained. CLAMPS，TUBES， VALVES AND HOSE ADAPTORS Clamps shown include our standard stainless steelclamping ring and our premium products-swing clampsand hingeclamps-both of which are available inpolymer and aluminium and are easier to use than the clamping ring. The speedivalve is our best-selling manually operatedvalve and is simple to use. It incorporates indicationof status and is available with either nitrile orfluoroelastomer diaphragm. PVC hose clamp Tube to fit Clip ID Order number NW10/16 25mm C10512408 NW20/25 36 mm C10514408 NW32/40 50 mm C10516408 PVC hose adaptor Flange size Hose ID in (mm) Order number NW10 1/2 in (12.7) C10504081 NW16 1/2 in (12.7) C10504104 NW16 3/4 in(19.1) C10504105 NW25 1 in (25.4) C10504225 NW40 1 1/2 in (38.1) C10504326 Hinged clamp Flange size Order number Aluminium Polymer NW10/16 C10512402 C10512303 NW20/25 C10514402 C10514303 NW32/40 C10516402 C10516303 Flange size Order number NW10/16 C10512401 NW20/25 C10514401 NW32/40 C10516401 Flange size Ordernumber Aluminium Polymer NW10/16 C10512403 C10512304 NW20/25 C10514403 C10514304 NW43/40 C10516403 C10516404 This page shows some of our other common hardwarecomponents and， in particular， our range of NWO ring based seals. These include our standard Oring with centering ring available in either nitrile orfluoroelastomer and with polymer， aluminium andstainless steel carriers. Material selection depends on application andoutgassing， operating temperature and leak tightnessrequirements. Co-Seals keep the carrier out ofthe vacuum and thus have the added benefit ofeliminating crevices and trapped volumes that canlead to instability and gas bursts. The centering ringsare only designed for vacuum applications. Wheresome positive pressure may be seen (such as exhaustlines)， Co-Seals and trapped O rings should be used.They have carriers which support the O ring on bothsides， making them ideal for both vacuum and positivepressure use. Centering ring (Nitrile O ring) Flange size Order number Polymer carrier Aluminium carrier Stainless steelcarrier NW10 C10511393 C10511398 C10511396 NW16 C10512393 C10512398 C10512396 NW25 C10514393 C10514398 C10514396 NW40 C10516393 C10516398 C10516396 Flange size Order number Polymer carrier Aluminium carrier Stainless steel carrier NW10 C10511394 C10511397 C10511395 NW16 C10512394 C10512397 C10512395 NW25 C10514394 C10514397 C10514395 NW40 C10516394 C10516397 C10516395 Trapped O ring (Fluoroelastomer) Flange size Ordernumber NW10/16 C10512490 NW20/25 C10514490 NW32/40 C10516490 Co-Seal (Nitrile O ring) Flange size Order number Polymer carrier Aluminium carrier NW10/16 B27158426 B27158480 NW20/25 B27158447 B27158490 NW32/40 B27158454 B27158500 Flange size Order number Polymer carrier Aluminium carrier NW10/16 B27158427 B27158481 NW20/25 B27158448 B27858491 NW32/40 B27158453 B27858501 90°elbow Flange size Order number Aluminium Stainless steel NW10 C10511410 C10511420 NW16 C10512410 C10512420 NW25 C10514410 C10514420 NW40 C10516410 C10516420 Cross piece Flange size Length Order number Aluminium Stainless steel NW10 60 mm C10511412 C10511422 NW16 80 mm C10512412 C10512422 NW25 100mm C10514412 C10514422 NW40 130 mm C10516412 C10516422 T-piece Flange size Length Order number Aluminium Stainless steel NW10 60mm C10511412 C10511421 NW16 80 mm C10512412 C10512421 NW25 100mm C10514412 C10514421 NW40 130 mm C10516412 C10516421 Reducing piece Flange size Ordernumber Aluminium Stainless steel NW25/10 C10514436 C10514446 NW25/16 C10514437 C10514447 NW40/16 C10516438 C10516448 NW40/25 C10516439 C10516449 SUPPORT YOU CAN TRUST At Edwards we pride ourselves on developing servicesolutions that deliver optimum performance andup-time to our customers. Convenience， quality andvalue are at the heart of everything we do. Whetheryou are looking for immediate help and advice orrequire a long-term total service partner， we make theperformance of your business our priority. Well-maintained systems last longer Maximise the lifetime of your product by servicing your ownproducts regularly using original parts and tooling. Edwards cansupport you with spares， maintenance kits， tools and training.Combining the reliability of original spare parts with quality toolsmeans you are well on the way to achieving years of trouble-freeoperation. Comprehensive repair solutions When products require more than just routine maintenance， Edwards offer a complete suite of Repair， Overhaul and‘ReManufacturing' solutions. All are covered by the assurance of themanufacturer's guarantee. We offer a fixed price servicing for swiftresponse and simple budgeting， or a more flexible pricing， structuredto reflect the specific needs of the repair. All ReManufacturing'services are completed to the highest standards using the provenassembly and test procedures developed in our factories. If turnaround is critical a service exchange product can usually bedispatched to you from local stock within hours. Effective managed maintenance For any business the ability to plan ahead is key.ManagedMaintenance is about easy access to the right services at the righttime. Regular scheduled maintenance is crucial to identifyingpotential problems before they occur. Avoiding unplanned downtimeis essential to achieving outstanding operational performance andlowering the total cost of ownership (TCO). Our qualified serviceengineers can help you monitor and maintain your vacuum system toavoid one-off costly repairs while managing service on a fixed budgetas part of a Managed Maintenance agreement. Economy without compromise ‘Edwards CERTIFIED' are genuine Edwards products‘ReManufacturered'to provide a cost-effective route to expand，upgrade or replace your installations without compromising quality，reliability or performance. Like our service exchange product，Certified' products are tested as new and are supported by a12 month warranty， and come with original accessories and manualsrequired to aid installation. Prolonged peace of mind Extending the new equipment warranty gives you a simpleopportunity to add peace of mind to your purchase of newequipment， should a fault occur as a result of a manufacturingdefect， equipment is expressly repaired or replaced. Cover isavailable on many of our products allowing the original factorywarranty to be extended from 12 months to 2 years and beyond. Your global partner We understand the importance of local support. Edwards has anumber of major service facilities located throughout the world，each location is supported by an extensive team of engineers andtechnicians to provide local， rapid response and great value service.All our service operations are conducted at the highest internationalstandards in accordance with ISO9001 (Quality)， ISO14001(Environmental)， and OHSAS18001 (Workplace safety). ( Publication Number： 360 1 0579 0 1@Edwards Limited 2019. A l l r ights reserve d Edwards and the Edw a rds logo are tradem a rk s of Ed wa rds Limited. ) Whilst we make every effort to ensure that weaccurately describe our products and services，we give no guarantee as to the accuracy orcompleteness of any information provided inthis brochure. Edwards Ltd，registered in England and WalesNo. 6124750， registered office： Innovation Drive，Burgess Hill， West Sussex， RH15 9TW，UK. EMEA ASIA PACIFIC UK +441444253000 China +864001119618 (local rate) 08459 212223 India +9120 4075 2222 Belgium +3223000730 Japan +81 47 4588836 France +33141211256 Korea +82317167070 Germany 08000001456 Singapore +65 6546 8408 Italy +3902484471 Taiwan +886 37581000 israel +9728 681 0633 AMERICAS Brazil +551139525000 EDWARDS nEXTturbomolecular pump shownPage 应用于质谱分析（如GCMS、LCMS）、表面分析（如SEM、TEM、AFM）、材料表征（如XRD、XRF、FTIR）等分析应用，Edwards拥有齐全的真空产品，包括涡轮分子泵、干式涡旋泵、干式隔膜泵、离子泵、油封旋片泵、检漏仪等，可灵活提供合适的解决方案。应用矩阵：