全自动椭圆偏振光谱仪

第一部分中文介绍
English introduction to part II
 仪器简介：

    我公司生产世界顶尖级椭偏仪，在国际同类产品中性价比最高。仪器具有高稳定性、长寿命、测量速度快、高准确性、高精度等一系列突出优点，是国内唯一大量出口销售美、欧、亚的椭偏产品。采用该仪器已经在美国“应用物理快报(Appl. Phys. Lett.)”等国际一流学术刊物上发表多篇论文，并被写入美国科学出版社出版的专著中。该仪器已在世界著名高校和标准计量局广泛应用。公司具有一流的生产和应用工程师全程跟踪为您解决一切使用和学术论文分析问题， 是您最值得信赖和发表高质量学术论文的椭偏产品。

    SC630型全自动椭圆偏振光谱仪是单色仪分光连续波长、入射角自动控制的全自动椭圆偏振光谱仪。仪器采用国际上特有的高稳定度的移相器大大提高了仪器测量的灵敏度，消除了整个波长范围的椭偏角度测量盲点。宽范围、高精度的入射角自动控制系统极大满足了用户分析错综复杂样品的检测和分析需求。既可以适合于各科研院所对介电、半导体、金属、有机物等各种材料的光学特性、结构特征、生长过程和材料质量的快速测试,也可以对更多未知材料开展研究工作。

技术参数：

1．光 源：氙灯
2．波长范围：350-850 nm；250-1100 nm；250-1700 nm
3．波长精度：1 nm
4．光斑直径： 1-3 mm
5．入射角范围：20度 to 90度，自动控制
6．入射角控制精度：0.01度/步
7．样品台尺寸：Ø160 mm（可进行高低、俯仰调节） 
8．椭偏参数测量范围：Psi(0-90度）；Delta(0-360度）
9.椭偏参数准确性：tg(Psi)≤0.003；cos( Delta)≤0.00001
10．集成化专用测量和分析软件

主要特点：

   具有补偿器技术，实现0-360度全角度范围的准确测量，无测量盲点
 只需轻松点击鼠标即可到需要的入射角、出射角
 强大的数据分析功能
   特殊的光学机械设计，对测量环境要求大大降低
   具有最简便快捷的样品准直方法
 允许用户自定义色散模型
 全波长多角度同时数据拟合,EMA模型用于多成分化合物和表面粗糙度分析
 具有实验数据和模拟数据三维绘图功能
Part II English introduction
SC630 Automatic Spectroscopic Ellipsometer
Instrument Introduction:
 
We produce the world's top-class ellipsometer with the highest quality to price ratio in the international similar products. The instrument has a series of outstanding advantages of high stability, long lifetime, high speed, high accuracy, and high precision, and a large number of sales have been exported to the United States, Europe and Asia. The measured data of the instrument has been published in world-class academic journals and written in monographs published by the American Science Press. The instrument has been widely used in the world-renowned universities and the Bureau of Standards and Metrology. The company has first-class production tracking solution for your usage and academic analysis of problems. It is your most reliable and high-quality academic ellipsometric products.
 
SC630 is a continuous wavelength scanning, automatic incident angle control ellipsometer. The instrument uses a unique high stability phase shifter to greatly improve the sensitivity of the measurement, which eliminates the blind spot of ellipsometric angle measurement for the entire wavelength range. Wide-range, high-precision angle of incidence of the automatic control system greatly meets the user to analyze the intricate sample detection and analysis needs. It is not only suitable for quick test of the optical properties of dielectrics, semiconductors, metals, organic compounds and other materials, the structural characteristics of the growth process and the quality of the materials, but also for carrying out research work on various unknown materials.
 
Technical parameters:
1. Light source: xenon lamp
2. Wavelength range: 350-850 nm; 250-1100 nm; 250-1700 nm
3. Wavelength accuracy: 1 nm
4. Spot diameter: 1-3 mm
5. Incidence angle: 20 degrees to 90 degrees, automatic control
6. Angle of incidence control accuracy: 0.01 degree / step
7. Size of sample stage: Ø160 mm (can be height and title adjustment)
8. Measurement range of ellipsometric parameters: Psi (0-90 degrees); Delta (0-360 degrees)
9. Accuracy of ellipsometric parameters: tg (Psi) ≤ 0.003; cos (Delta) ≤ 0.00001
10. Integrated dedicated measurement and analysis software
 
Main features:
l  Compensator technology to achieve accurate measurement range of 0-360 degrees, full angle measurement without blind spot
l  Just a few mouse clicks to realize the needs of the angle of incidence
l  Powerful data analysis capabilities
l  Special optical and mechanical design, greatly reduce the measurement of environmental requirements
l  Easiest and fastest sample collimator
l  Allow users to customize the dispersion model
l  Perspective of full wavelength multiple data fitting simultaneously, EMA model for multi-component compounds and surface roughness analysis
l  3D drawing capabilities with experimental data and simulation data