相位调制型椭偏仪

The UVISEL VIS spectroscopic ellipsometer covers the spectral range from 210 to 880 nm, and can be easily extended in both FUV and NIR range (see UVISEL FUV and NIR models). The measurement is performed in a few minutes and is extremely repeatable.

The UVISEL spectroscopic ellipsometer is ideally suited for research and development applications in a variety of fields, including semiconductor, displays, optical coatings, chemistry and biology. 
详细指标参数可访问

Characterization of thickness and optical constants in the VIS spectral range of thin films and multilayer stacks for:
- Dielectrics
- Amorphous semiconductors
- Polymers
- Thin metal films
- Glass

Material properties: graded, anisotropic, porous layers

1.测试薄膜厚度、成份
2.折射率、吸收系数
3.表面结构及相关性质
4.光谱型相调制椭圆偏振仪
5.同类产品中的高精度和高灵敏度
6.模块化设计
7.包含成熟的光谱型椭圆偏振仪软件包