牛津仪器C-Swift EBSD探测器

Introduction Application Note As semiconductor devices continue to decrease in size to improve performance and take advantage of advances in fabrication techniques, there is a need to analyse both their structure and chemistry at ever increasing resolution. Typically this requires the use of TEM for metrology and failure analysis. Using ultrahigh resolution FEG-SEM, low kV imaging and the new X-Max® Extreme EDS detector we demonstrate the ability to retain some of this high resolution analysis in the SEM. This allows for better targeting of resources and increased throughput of analysis.

Development and testing of semiconductor devices requires extensive knowledge of local structure and elemental composition. With feature sizes of <5 nm, it is often necessary to perform imaging and EDS analysis in a S / TEM. Once in the TEM, there are still many difficulties to be overcome to acquire accurate elemental maps. Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. This brief shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis. TEM Semiconductor Mapping in the TEM Solving peak overlaps in real-time Application Brief

Transmission Kikuchi diffraction (TKD) is a relatively recent development in EBSD that allows high resolution analysis of electron transparent samples. Most applications in the literature have used TKD for targeted measurements of relatively small areas, on samples where conventional EBSD struggles to deliver the required resolution [1]. These samples are typically nanocrystalline metals and alloys, although increasingly the technique is also being used to characterise highly

Gunshot residue (GSR) is produced from the condensation of the vapour cloud which is generated from the primer and propellant when a bullet is fired from a gun. The condensing vapour from the primer will form particles which are typically spherical and range from potentially less than 0.5 μm up to significantly larger sizes and of a characteristic composition depending on the type of ammunition. These particles may land on the hands and body of the shooter or other persons present when the gun was fired. By collecting and identifying these particles it is possible to associate a person with a crime scene where a gun was used