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Nano-Align5 Series
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Features
 | Typical Applications
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Product Description |
The Nano-Align5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θXθY). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ®technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning. |
Technical Specifications | |
| Ranges of motion (Nano-Align5-100) | 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) |
| Ranges of motion (Nano-Align5-200) | 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) |
| Ranges of motion (Nano-Align5-300) | 300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY) |
| Resolution (Nano-Align5-100) | 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY) |
| Resolution (Nano-Align5-200) | 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY) |
| Resolution (Nano-Align5-300) | 0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY) |
| Resonant Frequencies | |
| X axis (100/200/300 μm) | 450/400/350 Hz ±20% |
| Y axis (100/200/300 μm) | 350/300/250 Hz ±20% |
| Z axis (100/200/300 μm) | 450/350/250 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum (all models), Invar or Titanium (100 or 200μm only) |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Align5 Series Drawing | Nano-Align5 Series Catalog Pages |
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