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Features
 | Typical Applications
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Product Description |
| The Nano-UHV200 is a three axis UHV compatible nanopositioning system constructed from titanium and 316 stainless steel. Made entirely from non-magnetic UHV compatible materials, the Nano-UHV200 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 2 inch x 2 inch center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested. Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.  |
Technical Specifications | |
| Range of motion (X) | 200 μm |
| Range of motion (Y) | 200 μm |
| Range of motion (Z) | 200 μm |
| Resolution (XYZ) | 0.4 nm |
| Resonant Frequency (X) | 300 Hz ±20% |
| Resonant Frequency (Y) | 150 Hz ±20% |
| Resonant Frequency (Z) | 175 Hz ±20% |
| Stiffness | 2 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Titanium and 316 SS |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-UHV200 Drawing | Nano-UHV200 Catalog Pages |
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