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Features
 | Typical Applications
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Product Description |
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion. |
Technical Specifications | |
| Range of motion (X) | 50 μm |
| Range of motion (Y) | 50 μm |
| Range of motion (Z) | 25 μm |
| Range of motion (θX) | 1 mradian |
| Range of motion (θY) | 1 mradian |
| Resolution (X) | 0.1 nm |
| Resolution (Y) | 0.1 nm |
| Resolution (Z) | 0.05 nm |
| Resolution (θX) | 2 nradian |
| Resolution (θY) | 2 nradian |
| Resonant Frequency (X) | 1 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Resonant Frequency (Z) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.2 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al and Titanium, or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Man5 Drawing | Nano-Man5 Catalog Pages |
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