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Features
 | Typical Applications
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Product Description |
The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance. |
Technical Specifications | |
| Range of motion (XY) | 10 μm |
| Range of motion (Z) | 5 μm |
| Resolution | 0.01 nm |
| Resonant Frequency (X) | 1.6 kHz |
| Resonant Frequency (Y) | 1.5 kHz |
| Resonant Frequency (Z) | 13.5 kHz |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Aluminum or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum | ||
| The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. | ||
Additional Information | |
Nano-HS3M Drawing | Nano-HS3M Catalog Pages |
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