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Specifications
Measurement resolution: 10nm
Stitching + Overlay Accuracy: +/- 100 nm
Travel ranges available: 55 to 120 mm, depending on model
Travel speed: 2 mm/s
Yaw-, Roll- and Pitch- error: < 0,002°
Controlled axis: X and Y, Z controlled via SEM main stage
Vacuum and Materials: < 10-6 mbar, completely oil free and non-magnetic design
Quantum Design-FusionScope扫描电镜——SEM+AFM二合一显微镜
日本电子 JEOL 钨灯丝扫描电子显微镜 JSM-IT210
Apreo 2超高分辨场发射扫描电镜
高分辨热场发射扫描电镜 SU3900/SU3800 SE Series
日本电子 JSM-IT810场发射扫描电子显微镜
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