高性能多功能扫描电子显微镜

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1) Resolution　   　    3.0nm @ 30KeV, Possible Low KV Image Acquisition (from 0.2KV)
2) Magnification 　     10 - Max. 200,000X

3) Auto-Function     Auto-Focus / Stigmator/ Contrast & Brightness/ Gun Alignment / Wobble and etc.

4) Stage                   5-axis STAGE (X, Y, R, Z, T)

5) Stage Stroke          40 / 40 / 40mm (X / Y / Z) , 0~60? Tilt / 360? Endless

                                mage Shift(150 X-Y), Image Rotation 360?

6) Chamber Volume        Φ210mm X 180mm (H)

7) Vacuum System          Rotary Pump + TMP (80liter/sec)

8) Pixel Resolution          4096 X 3072 (Max.)

9) Analysis S/W               Image Enhancement/ Multi-Focus / Tiling / 3-D View / AOI / etc.

10) Option Port                3ea; SE(1), EDS(1), BSE Port

1) Compact design with a wheeled chassis for easy transport

2) Allow Low KV Image(from 1KV) for non-conductive sample
3) Equipped with ET-BSE Detector(SE & BSE Image Acquisition) 
    Possible Image observation on Non-Coating condition
4) Competitive SEM with economic price
5) Minimized Installation Space & Utility;540(W)X570(D)X1500(H)mm3
6) Equipped with powerful "Analysis S/W" and "Measurement Tool"
7) User-Friendly operating system

9) Low Vacuum Mode supply