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Performance | ||||||
Model型号 | PS-230 | PS-250 | ||||
Motorize 5 axis 五轴马达驱动 |
Manual各轴手动 |
Motorize 5 axis 五轴马达驱动 |
Manual各轴手动 | |||
Resolution分辨率 | 3nm | 3nm | ||||
Magnification放大倍数 | ×10 to ×300,000 | ×10 to ×300,000 | ||||
Detector探测器 | SE Detector | |||||
BSE Detector * | ||||||
LN2 free EDS * | ||||||
Electron Optic System电子光学系统 | ||||||
Acceleration Voltage加速电压 | 0.5kV ~ 30kV | |||||
Electron Gun Type电子枪类型 | W Hairpin Filament发叉式钨丝阴极 | |||||
Lens System透镜系统 | 3 Lenses De-magnifying System 三透镜倍缩系统 | |||||
Objective Aperture物镜孔径 | 30/50/100/200um (Variable Aperture) | |||||
Automation Function自动功能 |
Auto Start, Auto Focus, Auto Contrast/Brightness, Auto Stigmation 自动开始,自动聚焦,自动亮度对比度,自动像散 |
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Display System显示系统 | ||||||
Reduced-Focus Mode减少聚焦模式 | 320 × 240pixel | |||||
Video Mode Ⅰ TV模式Ⅰ | 800 × 600pixel | |||||
Video Mode Ⅱ TV模式Ⅱ | 800 × 600pixel | |||||
Photo Mode 1照相模式1 | 800 × 600pixel | |||||
Photo Mode 2照相模式2 | 1280 × 960pixel | |||||
Photo Mode 3照相模式3 | 1600 × 1200pixel | |||||
Photo Mode 4照相模式4 | 3200 × 2400pixel | |||||
Specimen Position Handling System样品承载台 | ||||||
X/Y Travel Distance X/Y行程 | 50 × 40 mm | 80 × 60 mm | ||||
Z Travel DistanceZ行程 | 30 mm | 50 mm | ||||
Rotation旋转 | 360° | |||||
Tilt倾斜 | -10° ~ +90° | |||||
Max. Specimen Size最大样品尺寸 | 100mm | 150mm | ||||
Vacuum System真空系统 | ||||||
Vacuum Control真空控制 | Full Automation全自动控制 | |||||
Pump真空泵浦 | Oil rotary pump + Turbo molecular pump旋转式油泵+涡轮分子泵系统 | |||||
Option选配 | Low-Vacuum Mode *低真空模式* | |||||
Control System控制体统 | ||||||
Control PC & Monitor操作系统 | Desktop PC / DualCore / Windows 7 / 22" Monitor | |||||
Software Functions软件功能 | System Control / Recipe / Image Manager / Documentation | |||||
Utility Requirements厂务需求 | ||||||
Power电压 | 187V ~ 253V(50/60Hz) | |||||
Power Consumption功率 | Max. 3.5kW | |||||
Room Temperature环境温度 | 15° ~ 30° | |||||
Relative Humidity相对湿度 | 70% or less | |||||
*: Option选配 | ||||||
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