微波等离子去胶机

Q 150

Q 235

Q 240

Process Chamber

石英 Quartz

Glass

Chamber Size(mm)

φ150 x L260

φ240 x L260

φ240 x L460

Volume(L)

6

11

21

最大样片尺寸 Wafer Size

4”

6”

8”

Chamber door

铝制抽屉式,带微波屏蔽观察窗Aluminum,drawer type door with viewing port

工作压力 Working Pressure(Pa)

≤100

Microwave Source

2.45GHz,50~600W连续可调50~600W Adjustable

2.45GHz,50~1200W连续可调50~1200W Adjustable

Gas Supply

标配2路MFC控制最大支持6路

2 MFC Standard,Max to 6

标配3路MFC控制最大支持6路

3 MFC Standard,Max to 6

Vacuum Gauge

Pirani, 1~1*10⁵ Pa

Baratron, 1~1000Pa

Vacuum Valve

电子气动阀 Electro-pneumatic valve

显示屏尺寸 Display Size

7”

10.4”

10.4”

Interface

Ethernet,USB,RS 232

System Control

正版Windows Embedded Compact 2013,触摸控制图形界面显示, 图形化参数设置;支持权限控制、安全互锁、多级菜单设置;可保存并 导出运行、报警、错误等数据;导出数据格式兼容Windows Office软件。

Windows Embedded   Compact 2013, Graphical user interface Software.

Dimensions(mm)

W500*H370*D550

W620*H500*D550

W760*H775*D775

Weight(Kg)

40

70

95

Utilities

1 connection 3/N/PE AC 50/60 Hz 400/240 V 16 A

Vacuum Pump

标配干泵，可选配油泵 Dry pump or oil pump on request.

Options:

Wafer Boat

√

Light Tower

-

√

HT加热台盘 Heating Chuck

-

√

TC温控台盘

Temperature Control Chuck

-

√