Features
| Typical Applications
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Product Description |
The Nano-MZ is a compact Z-axis nanopositioning system with a small center aperture designed to be easily integrated into existing instrumentation where space is restricted. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. A related model, the Nano-M3Z, includes additional “tip” and “tilt” motions (θX ,θY) to the linear motion in the Z-axis. The Nano-MZ can also be used as a “building block” with other systems to form complex nanopositioning assemblies with multi-axis motion - see the Nano-M350 and the Nano-Man5. |
Technical Specifications | |
Range of motion (Z) | 25 μm |
Resolution | 0.05 nm |
Resonant Frequency | 1100 Hz ±20% |
Stiffness | 1.0 N/μm |
Recommended max. load (horizontal)* | 0.5 kg |
Body Material | Aluminum |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
Additional Information | |
Nano-MZ Drawing | Nano-MZ Catalog Pages |
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