EDS在陶瓷材料中的应用
Silicon drift detector (SDD) systems have become state of
the art technology in the field of EDS (X-ray microanalysis).
One of the main advantages of XFlash® SDDs is the extremely
high pulse load capacity of up to 750,000 counts per
second combined with good energy resolution (<123 eV
Mn-Kα, 47 eV C-K at 100,000 cps). These two factors and
modern data processing allow spectrum imaging where
an entire EDS spectrum at each pixel of the SEM image is
collected in a database termed “HyperMap”. This approach
allows data evaluation with advanced analysis options, such
as the Maximum Pixel Spectrum (Bright & Newbury 2004,
Application Note # EDS-04) for improved element identification
and spectroscopic phase analysis called “Autophase”
(Application Note # EDS-03) for evaluating the composition
and area fraction of major and minor components.