Silicon drift detector (SDD) systems have become state of the art technology in the field of EDS (X-ray microanalysis). One of the main advantages of XFlash® SDDs is the extremely high pulse load capacity of up to 750,000 counts per second combined with good energy resolution (<123 eV Mn-Kα, 47 eV C-K at 100,000 cps). These two factors and modern data processing allow spectrum imaging where an entire EDS spectrum at each pixel of the SEM image is collected in a database termed “HyperMap”. This approach allows data evaluation with advanced analysis options, such as the Maximum Pixel Spectrum (Bright & Newbury 2004, Application Note # EDS-04) for improved element identification and spectroscopic phase analysis called “Autophase” (Application Note # EDS-03) for evaluating the composition and area fraction of major and minor components.