PAIMS高级离子迁移谱用于六甲基二硅氮烷HMDS检测

The ion mobility spectrometry technique offers advantages like high sensitivity (ppb range), fast response (ms range), compact design, operation in atmospheric pressure and ability to separate the isomeric compounds. In this short report we demonstrate the sensitivity and fast response of IMS technique at low ppb level. As a case compound was chosen hexamethyldisilazane HMDS.

离子迁移谱技术具有高灵敏度（ppb范围）、响应速度快（ms范围）、结构紧凑、常压操作、分离异构体等优点。在这篇简短的报告中，我们展示了低ppb水平下IMS技术的灵敏度和快速响应。以六甲基二硅氮烷HMDS为例。

The HMDS C6H19NSi2 of molar mass 161.4 g/mol, is frequently used in various fields like semiconductor industry, photolithography, electron microscopy and many others. The HMDS is toxic irritates skin and eyes and after decomposition can emit highly toxic nitrogen oxide fume. Due to this reasons is monitoring of HMDS in low concentration required especial in clean industrial hall like semiconductor hall are.

分子量为161.4g/mol的HMDS C6H19NSi2，广泛应用于半导体工业、光刻、电子显微镜等领域。HMDS有毒，对皮肤和眼睛有刺激作用，分解后会释放出剧毒的氮氧化物烟雾。因此需要对低浓度的HMDS进行监测，特别是在洁净车间，如半导体车间。

Fig.1. Hexamethyldisilazane

In this short Laboratory Report we demonstrate the ability of Ion Mobility Spectrometer operated in sub-atmospheric pressure for continuous monitoring of HMDS at low ppb level.

在这篇简短的实验室报告中，我们证明了离子迁移率谱仪在低ppb水平下工作在大气压下连续监测HMDS的能力。