卷对卷柔性薄膜沉积设备
Cassette houses flexible material
卷筒用于装载柔性衬底材料
Cassette transported from one process chamber to another via a robotic handler
制备薄膜时,卷筒可由真空机器手从一个腔室输送至另一个腔室
Advantages 此沉积系统的优点
- Eliminates cross-contamination 在制备多层膜器件时消除了交互掺杂影响
- Flexibility to adjust parameters on any part of the process. 制备薄膜时,能灵活控制各种运转沉积参数
- Down time reduced, i.e. each chamber can be serviced independently 因每个腔室可单独维护,减少了停机非运转时间
Reel to Reel Cassette Cluster tools
Cluster tool w/ 8 port locations
具有8个腔室的团簇型沉积系统
15cm and 30cm webwidth
柔性衬底的宽度可从15cm至30cm
Computer controlled
可完全由电脑程序控制操作运行
PECVD, HWCVD and Sputter capability
制备方式包括等离子体和热丝化学气相沉积,及溅射
(US patent #6,258,408B1)
(本产品获美国专利#6,258,408B1)
MVSystems镀膜机Reel to Reel Cassette System的工作原理介绍
镀膜机Reel to Reel Cassette System的使用方法?
MVSystemsReel to Reel Cassette System多少钱一台?
镀膜机Reel to Reel Cassette System可以检测什么?
镀膜机Reel to Reel Cassette System使用的注意事项?
MVSystemsReel to Reel Cassette System的说明书有吗?
MVSystems镀膜机Reel to Reel Cassette System的操作规程有吗?
MVSystems镀膜机Reel to Reel Cassette System报价含票含运吗?
MVSystemsReel to Reel Cassette System有现货吗?
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