CVD系统

OTF-1200X-4-III-9HV is CE certifed 4" diameter split three zone tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion.

Specifications:





Furnace Structure

•Double layer steel casing with air cooling.
•High purity alumia fiber board liner for energy cost effective operation.
•Three heating zones with in depend temperature control.
•Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.

Power 7 Kw

Voltage
AC 208-240V Single Phase, 50/60 Hz

Heating Element Fe-Cr-Al Alloy doped by Mo
Max. Temperature
1200 oC

Continuous Temperature
1100 oC

Max. Heating Rate
<= 20 oC /min

Tube Size and Materials
100 mm O.D x 92 mm ID. x 1400 mm fused quartz tube included

Heating Zone length
Three zones: (880mm, 35" in total)

Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm

Constant temperature zone 20" (500 mm) length (three zone at equal temperature within +/- 1oC)
Temperature controllers


•Three precision digital temperature controllers programmable with 50 segments, which control each heating zone separately.

•PID adjustable with auto tune function to ensure temperature stability within +/ - 1 oC.

•Full protection in each controller for over-temperature and broken thermal couple.

•Please click here to download operation manual.
Operation Manual

Thermal Couple
Three K type thermal couples built in

Vacuum Flanges



•Two stainless steel flanges with vacuum hose and gas fitting pipe.
•Double high temperature silicone O-ring for using under 300oC.
•Porous alumina blocks included for protecting flange from heat radiation.

Vacuum pumps


Tow stages vacuum pump installed in bottom case:

•One Double Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110 with max. vacuum pressure of 10-2 torr.

•One turbo molecular pumpwith max. vacuum pressure of 10-5 torr.

•One precision vacuum sensor installed.

•Stainless steel hose tube is included for connecting to tube furnace.

•Digital vacuum meter / controller installed.

•Please click here to review : how to operate High vacuum system.

Vacuum Sensor & display


•Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

•Vacuum controller and display areinstalled in bottom mobile cart.


Gas flow meter
( click to enlarge )



User Manual (Click to download)

software(click to download)
Multi-DMFC V1.02
Single V1.12

•9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35% - 100% of full scale).
•3 MFC at range 0 - 1000scc
•3 MFC at range 0 - 200scc
•3 MFC at range 0 - 10 scc
•one floating meter will be installed for N2 gas only
•One mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
•9 mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.


•Software and interface (optional at extra cost). Please click uderline for software operation instruction.


Pipe connection, valves and gas mixer

•SS 316 1/4" pipe / fitting.
•SS316 vacuum needle valves.
•21 sets of stainless steel vacuum valves are installed outside of right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
•Please click here to see sketch of pipe connection.


Dimension
Furnace: 550 x 380 x 520 Bottom Mobile case: 800x600x597

Net Weight
about 100 kg

Shipping weight
350 Lbs

Shipping package size after crating
Two pallets

Warranty & Certificate
•One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
• CE Certificate