Hitachi Metals Aera® FC-R7800 series delivers precise flow control, as well as the corrosion resistance and high leakintegrity of metal seals, to suit the majority of gas-controlled applications.
Convenience-enhancing features, such as standard electrical connectors and standardized critical dimensions allow quick-and-easy replacement of existing mass flow controllers (MFCs).
Fast Response Advances in the FC-R7800 series’ technical design deliver enhanced operation compared to competing mass flow controllers. These advances include a highly sensitive, rapid-response, small-diameter sensor. Further, the FC-R7800 series’ normally-open or normally-closed solenoid design supplies superior response times. These speed enhancements minimize over-shoot and under-shoot, and produce an actual-flow settling time of < 1 sec between set points. (Less than 3sec for FC-R7820CD,FC-R7820D). Superior Reliability High-quality electronic components and a robust, minimal-parts design stand up to the effects of strong RF fields and other operational demands, delivering outstanding long-term zero-drift stability — < 0.5% of full-scale flow over one year. With over 70,000 units delivered in FC78X FCR78X series MFCs, < 0.5% are returned within a year of shipment. Easy Integration Obtain the performance and reliability advantages of Aera MFCs by replacing other brands—with no installation hassles. Certain models feature standard electrical connectors and critical dimensions to easily fit existing systems.