德国Kleindiek Nanotechnik生产的纳米显微操纵仪有以下型号以适用于不同的环境: MM3A-LMP Micromanipulator for Light Microscopy MM3A-EM Micromanipulator for Electron Microscopy MM3A-UHV Micromanipulator for UHV MM3A-LT Micromanipulator for low temperature
Length / Width / Height 60/22/25 mm Operating range XY / Z 240°/12 mm Scan range X / Y / Z 20/15/1μm Max Speed XY / Z up to 10/ 2 mm/s Resolution X 10-7 rad (5 nm) Resolution Y 10-7 rad (3.5 nm) Resolution Z 0.25 nm Hysterisis deviation Z <200 nm Hysterisis Angle (α) Z <10° (0.2 rad)
Lowest temp 273K Highest temp 353K Lowest pressure 10-7 mbar Holding force 1 N Holding torque 3 Nmm - 4 Nmm Lift Y 5g Signal resistance (probing) 7.0Ω Max voltage (probing) 100V ;Max current(probing)100mA