硅测试标样

magnification calibration image distortion check; SEM, LM
Single crystal silicon, 5mm x 5mm. The squares repeat every 10µm (0.01mm). The dividing lines are about 1.9µm wide, formed by electron beam lithography. A broader marking line is written every 500µm (0.5mm) which is useful for light microscopy. Squares are etched, and approximately 200nm deep. Available unmounted or mounted on SEM specimen mounts.

Many types of samples can be mounted directly onto the Silicon Test Specimen so that an internal calibration is obtained on the micrograph.

To avoid contamination of test and calibration samples, we recommend storing these under vacuum. For the standard SEM pin mounts, the #16179 PELCO® SEM Sample Stub Vacuum Desiccator would be ideal.

A certificate of calibration can be supplied for the Silicon Test Specimen at extra cost. The guaranteed accuracy is 1%. The basic reference specimen is calibrated by the National Physical Laboratory, of England, by laser beam interferometry.