英国Hiden Analytical公司的SPACI-MS是世界上第一台商业化的空间分辨质谱仪。SPACI-MS可以在反应器的径向和轴向上进行物种分析和温度分布测量。有着很高的空间和时间分辨，以及可忽略的对气流和温度的干扰。16通道的多路进样系统结合Hiden公司的快速的瞬态分析质谱仪，提供自动的和快速的温度绘图和物种分布分析。

Hiden公司的二次离子质谱仪的应用文章，已经发表的论文。High-temperature oxidation of CrN/AlN multilayer coatings

Organic salts composed ofcationsand conditions around room emperature Phase Behavior of Ionic Liquid and Carbon Dioxide

The storage of H2 in a safe and compact form represents a significant current challenge,[1] and there is wide-ranging interest in materials that can store and release H2 with fast kinetics and high reversibility over multiple cycles.[2] Porous coordination frameworks have become competitors to other porous materials, such as zeolites[3] and carbon materials (for example, activated carbon or nanotubes),[4] with recent studies confirming that these frameworks can store considerable quantities of H2 at 78 K.[5–11] Most studies of H2 adsorption in coordination frameworks focus on the lowpressure region (0–1 bar) and, therefore, do not fully address the relationship between porosity and storage capacity. Although recent high-pressure volumetric measurements on some coordination frameworks revealed a correlation between maximum uptake and surface area,[9] the study involved several coordination frameworks with different structure types, and the influence of pore size and shape on guest adsorption was not investigated systematically. Herein, we report the structures of three close structural analogues, along with studies of high-pressure H2 adsorption by these materials, to establish a route to higher H2 storage capacity.

LaNiO3
LNO electrode was intensively studied as electrodes because LNO has a pseudocubic perovskite crystal structure with a lattice parameter of 3.84 Å. But the etching process of LNO thin films must be developed in order to realize highly integrated ferroelectric random access memories. In this work, we investigated etching characteristics and mechanisms of LNO thin films using inductively coupled BCl3 /Ar plasma
ICP system. The maximum etch rate of LNO thin films was 41.1 nm/min at a BCl3
20/Ar
80 gas mixing ratio. The positive ions and the ion energy distributions were measured with a quadrupole mass spectrometer
QMS. As rf power and dc bias voltage increased and working pressure decreased, the ion energy and etch rates of LNO thin films were increased. A chemically assisted physical etch of LNO was experimentally confirmed by ICP system and QMS measurements.The positive ions and the ion energy distributions
IEDs were measured with a Hiden EQP plasma probe
Hiden Analytical Ltd., EQP 510.

The development of anisotropic etching process for
Pb,SrTiO3
PST thin films is an important task to provide a small feature size and an accurate pattern transfer. Etching characteristics of PST thin films were investigated using inductively coupled plasma etching system as functions of Cl2/Ar gas mixing ratio. The PST etch rate increased with the increase of chlorine radical and ion energy intensity. It was found that the increasing of Ar content in gas mixture lead to sufficient increasing of etch rate. The maximum etch rate of PST film is 56.2 nm/min at Cl2 /
Cl2+Ar of 0.2. It was proposed that the sputter etching is a dominant etching mechanism while the contribution of chemical reaction is relatively low due to low volatility of etching products.The electron temperature and plasma density were measured by using the Langmuir probe
Hiden Analytical Ltd, ESPION.The mass and the ion energy distributions
IEDs were measured with a Hiden EQP plasma probe
Hiden Analytical Ltd, EQP 510 that consists of an electrostatic ion energy analyzer
ESA in series wi tha

The kinetics of uptake of gaseous HNO3 on thin films and crystallite grains of NaCl has been studied in a coated wall tubular flow reactor coupled to a quadrupole mass spectrometer. A rapid gas-solid reaction occurs with release of gaseous HCl. Uptake coefficients were measured at room temperature with a range of partial pressures of HNO3 and H2O in the flow tube. ç values decreased with increasing HNO3 concentration (4  1011 to 700  1011 molecule cm-3) and increased with H2O over the range 2  10-4 to 10 mbar. The results were interpreted in terms of a mechanism of the reaction HNO3(g) + NaCl(s) f HCl(g) + NaNO3(s), which involves ionization of adsorbed HNO3 molecules aided by surface-adsorbed water followed by reaction of H3O+ with Cl- and desorption of product HCl molecules. The results allow estimation of the reactive uptake coefficient for HNO3 on sea salt aerosol under atmospheric conditions.It consists of a Pyrex tubular reactor mounted vertically below a differentially pumped molecular-beamsampling quadrupole mass spectrometer (Hiden HAL RGA301) as illustrated in Figure 1.

Amicroporous hypercrosslinked polymer resin was synthesized and shown to adsorb 3.04 wt.% hydrogen at 77 K and 15 bar; this represents the highest level of hydrogen adsorption yet observed for an organic polymer.The Hiden IGA was used to do hydrogen adsorption.

Plasma based implant systems produce multiple ion species as compared to a beamline implant using a single mass selected ion, such as BF2 +. Similarly, plasma implant produces a distribution of ion energies relative to the nearly monoenergetic ions of a beamline implant. To evaluate the significance of these differences, the ultra shallow junction
USJ dopant depth profiles of these two implant techniques are compared with an advanced secondary ion mass spectrometry
SIMS profiling technique and a novel diagnostic to measure the “as-implanted” ion mass and energy distributions during the pulse of a plasma implant. The plasma and beamline implants match depth and dose extremely well, consistent with the measured plasma ion characteristics. Additionally, the depth profile effects of plasma pulse timing, relative to the application of the bias voltage pulse, a collisional sheath, and USJ dose loss during device mask removal are explored.

利用氢能实现清洁、健康的环境是当今世界迫切解决的问题。当前最关键的问题是如何解决氢的储存，即储氢（hydrogen storage）。 Hiden公司的智能重量分析仪IGA是利用重量分析技术，为储氢研究提供了优异的研究工具，使得PCT数据的准确性更为真实、可靠。2004年，英国的研究者宣布了新型储氢材料的诞生，他们正是利用IGA对PCT数据进行了精确的表征。文章发表在《Science》杂志上。 http://www.isochema.com/corporate/newsletter.html

Hiden的EQP等离子体质量、能量分析仪在薄膜的磁控溅射沉积研究中可以提供残余气体分析、随磁控源开关产生的气体分析、离子能量分布、中性粒子分析等多种分析手段。

Hiden公司的HPR20 和 HPR40可分别应用于发酵过程的挥发气体和溶解气体的在线分析。对过程中产生的气体进行组份和定量的分析，从而对工艺进行评估和改进。

实验报告的是通过二次离子质谱仪（ＳＩＭＳ）对CrN/AlN高温氧化物多涂层进行的深度剖析．涂层是通过一个封闭非平衡的磁电管沉积成的．氧化是在９００度下进行２小时，在１１００度下进行４小时．

Hiden公司利用HPR60的高端技术，成功的解决了利用质谱仪进行常压等离子体分析的难题。仪器采用三组真空泵站取样技术。

Proteus 多气路选择阀系统(Multi-Stream Gas Selector Valve，multi-port selector valve system )是独特设计的多路选择阀系统(多路阀)，用于多气流分析，便于生产过程中的多路气体转换。 · 20, 40 ，80路取样选择，可定制路数 · 内置温度传感器/ 加热器可达120℃ · 气体流量从 0.01～10 l/min

ESPion高级Langmuir探针（Advanced Langmuir Probes for Electrical Plasma Characterisation）可快速、可靠、精确地进行等离子体诊断，是最先进可靠的 Langmuir 探针。 应用： · 蚀刻/沉积/ 清洁等离子体 · 脉冲等离子体操作 · 离子密度 (Ni & Gi) · 电子温度(Te & EEDF) · 电子密度(Ne) · 等离子体电位 · Debye 长度,悬浮电位 http://www.hiden.com.cn/admin/productsm.asp?ArticleID=72&classID=9

文章介绍了利用XPS（X-ray Photoelectron Spectroscopy）和SIMS（Secondary Ion Mass Spectrometry）进行多层材料的结构和组成分析。实验方法有很多值得广大材料研究者借鉴之处。

利用Hiden RGA残余气体分析仪可以进行各种真空状态下的残余气体分析和过程、工艺监测。可以实时在线得到实验过程的真实情况，即使反馈处理过程中出现的问题。在等离子体工艺过程中，更是可以有效地表征等离子体产生的过程。

The activated mesocarbon microbeads (a-MCMBs) with high BET specific surface area of 3180m2/g are prepared. Experimental characterization of a-MCMBs is carried out in terms of the adsorption isotherm of nitrogen at 77 K by the ASAP-2010 apparatus. Then, methane and hydrogen adsorption isotherms on a-MCMBs are measured by the IGA-003 gravimetric analyzer at 298 K and 77 K. The pores of a-MCMBs are described as slit-shaped with a pore size distribution (PSD). The PSD is determined by a combined method of grand canonical Monte Carlo (GCMC) simulation and statistics integral equation (SIE) from the experimental isotherm of nitrogen on a-MCMBs. In GCMC simulation, methane and hydrogen molecules are modeled as the Lennard- Jones spherical molecules, and the well-known Steele’s 10-4-3 potential is used to represent the interaction between the fluid molecule and the solid wall. Good agreement between simulated and experimental data indicates that our model represents well the mechanism of adsorption on a-MCMBs. Then, this model is used to predict adsorption of methane and hydrogen over a wide range of pressure up to 12 MPa. The prediction shows that adsorption amount of methane reaches 36 wt % at 298 K and 4 MPa, which is superior to the results in the literature. The hydrogen adsorption amount at 10 MPa can reach 3.2 wt % and 15 wt % at 298 K and 77 K, respectively, which are also higher scores, compared with the other carbon materials.

The microaerophilic flagellated protist Giardia intestinalis, the commonest protozoal agent of intestinal infections worldwide, is of uncertain phylogeny, but is usually regarded as the earliest branching of the eukaryotic clades. Under strictly anaerobic conditions, a mass spectrometric investigation of gas production indicated a low level of generation of dihydrogen (2 nmol minN1 per 107 organisms), about 10-fold lower than that in Trichomonas vaginalis under similar conditions. Hydrogen evolution was O2 sensitive, and inhibited by 100 lM metronidazole. Fluorescent labelling of G. intestinalis cells using monoclonal antibodies to typical hydrogenosomal enzymes from T. vaginalis (malate enzyme, and succinyl-CoA synthetase a and b subunits), and to the large-granule fraction (hydrogenosome-enriched, also from T. vaginalis) gave no discrete localization of epitopes. Cell-free extracts prepared under anaerobic conditions showed the presence of a CO-sensitive hydrogenase activity. This first report of hydrogen production in a eukaryote with no recognizable hydrogenosomes raises further questions about the early branching status of G. intestinalis; the physiological characterization of its hydrogenase, and its recently elucidated gene sequence, will aid further phylogenetic investigations.

在相邻电极的脉冲电子束产生的氩和氧的等离子体中，测量时间分辨离子的流量和能量分布。氩离子和氧离子的能量和流量的时间变化，是跟等离子体的电子温度和离子密度相关的。氧等离子体的延迟时间要比氩的短。这可以通过分析各种离子的损失机理来推断。

在相邻电极的脉冲电子束产生的氩和氧的等离子体中，测量时间分辨离子的流量和能量分布。氩离子和氧离子的能量和流量的时间变化，是跟等离子体的电子温度和离子密度相关的。氧等离子体的延迟时间要比氩的短。这可以通过分析各种离子的损失机理来推断。

英国Hiden公司设计的智能重量法吸附分析仪IGA是目前重量分析仪中功能最全的商业化仪器。在全世界的吸附研究领域有着广泛的用户。他们利用IGA对自己的研究实验进行分析表征，取得了辉煌成绩。在Nature和Science上均有多偏文章发表.

文章简单介绍了SIMS的工作原理及可应用范围。 EQS 是差式泵式二次离子质谱（SIMS-Secondary Ion Mass Spectrometer ‘Bolt-On’ probe），可分析来自固体样品的二次阴、阳离子和中性粒子。采用最新技术的SIMS 探针，便于连结到现有的UHV表面科学研究反应室。

EQP等离子体质量和能量分析仪在半导体行业中的芯片加工工艺研究中有着很重要的应用。尤其对等离子体刻蚀设备的研究开发有很大的帮助。

EQP等离子体质量和能量分析仪在半导体行业中的芯片加工工艺研究中有着很重要的应用。尤其对等离子体刻蚀设备的研究开发有很大的帮助。

脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析

脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析，脉冲等离子体时间分辨离子流分析

Hiden公司的IGAsorp蒸气吸附系统除了进行水分和有机蒸气的吸附外，还可以进行比表面积BET的精确计算。这就极大的扩展了仪器的功能。

英国Hiden公司设计的智能重量法吸附分析仪IGA是目前重量分析仪中功能最全的商业化仪器。在全世界的吸附研究领域有着广泛的用户。他们利用IGA对自己的研究实验进行分析表征，取得了辉煌成绩。在Nature和Science上均有多偏文章发表。