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| Resolution HV mode | 3.0 nm (30 kV) 15.0 nm (1.0 kV) |
|---|---|
| Resolution LV mode | 4.0 nm (30 kV BED) |
| Magnification | ×5 to ×300,000 |
| Preset magnifications | 6 levels (Can be set by the user) |
| Electron gun | Fully automatic/Manual adjustment available |
| Filament | Factory pre-centered tungsten hairpin filament |
| Accelerating voltage | 0.3 kV to 30 kV |
| Probe current | 1 pA to 1 μA |
| Low vacuum pressure setting range*1 | 10 to 650 Pa |
| Condenser lens | High precision zoom condenser lens |
| Objective lens | Conical lens |
| Objective-lens aperture | 3-step selectable with click-stops Fine position adjustment in X and Y possible. |
| Astigmatism memory | Available |
| Image shift | ±50 μm (WD 10 mm) |
| Automatic function | Focus Brightness/Contrast, astigmatism correction |
| Specimen exchange | Changed by opening the specimen chamber door |
| Maximum specimen | Diameter: 200 mm Height: 80 mm (WD10 mm) |
| Specimen stage | Eucentric goniometer stage (5 axes motor drive stage) X:125 mm Y:100 mm Z:80 mm Tilt: -10 to 90° Rotation: 360° |
| Recipe | Available |
| Image mode | Secondary electron image, REF image, Composition image, Topographic image, Shadow image |
| Comparison window (Snap shot) | 6 shots (Save, load, imaging condition can be reproduced) |
| OS | Windows®7 |
| Monitor | 23-inch touch panel (Display resolution 1,920 × 1,080) |
| Number of pixels | 640 × 480 1,280 × 960 2,560 × 1,920 5,120 × 3,840 |
| Image display mode | Multi view, Full screen view, Flexible view, Add Signals |
| Look up table | Available (Gamma correction, pseudo-color) |
| Histogram display | Available |
| Measurement function | Available (Distance between 2 points, distance between parallel lines, diameter, etc.) |
| 3D measurement | Available*2 |
| Anaglyph image | Available |
| Report creation software | Built in |
| Language configuration | Available on UI (Japanese/English) |
| Image format | BMP,TIFF,JPEG |
| Image auto save | Available |
| Evacuation system | Fully automatic system TMP: 1 RP: 1 or 2 *1 |
| Switching vacuum mode | Available on UI (HV/LV) |
产品货期: 30天
整机质保期: 1年
培训服务: 安装调试现场免费培训
安装调试时间: 到货后14天内
电话支持响应时间: 12小时内
是否提供维保合同: 是
维修响应时间: 7天内
节假日是否提供上门服务: 是
核心零部件货期: 30天
核心零部支持时间: 3月
是否支持上门巡检: 否
是否提供预防性维护计划: 否
是否提供期间核查方案: 否
是否提供免费应用支持: 否
是否提供付费应用支持: 是
是否提供线上售后平台: 是
维修付款方式: 先付款后维修
基本维修资料公开: 维修手册
无理由退换货: 不支持
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