产品概要：

The PHEMOSe-X is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by semiconductor device defects.

基本信息：

Since the PHEMOSe-X is usable in combination with a general-purpose prober,you can do various analysis tasks by using the sample setups you are already familiar with. Installing an optional laser scan system allows acquiring high-resolution pattern images. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-X supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober.

技术优势：

应用方向：

主要应用于失效分析、缺陷定位