VELION--FIB-SEM 系统

FIB-SEM for FIB-centric nanofabrication

VELION is a novel FIB-SEM instrument concept for nanoscale science and engineering. FIB nanofabrication is established as a standard technique for fabricating three-dimensional and high-resolution nanostructures such as plasmonic devices, nano-fluidics, localized implantation, and functionalization. VELION meets the demanding requirements of nanofabrication. The concept comprises a configurable platform with features including

• Dedicated nanoFIB ion column

• Liquid metal alloy source for multi-species ion beam technology

• Laser Interferometer Stage

• Tailored FE-SEM column

• Various options / system configurations including gas injection and nanomanipulators

VELION features a vertically mounted FIB-column and side-mounted SEM. In combination with Raith’s Laser Interferometer Stage and mature lithography technology, VELION represents a unique FIB-SEM nanofabrication set-up. The dedicated FIB-centric system architecture ensures unrivaled stability, accuracy, and automation. Even the most complex structures in both 2D and 3D can be fabricated completely unattended to the highest precision standards over extensive areas and long periods.

Moreover, IONselect technology offers a range of ion species to choose from. This feature will pave the way for new breakthroughs in next-generation research. Adaption of ion properties to specific application enhances FIB processing. Find out more about the nanoFIB column here.