石墨烯生长炉

石墨烯生长设备(TCVD) - 配备热壁石英管和LabVIEW自动控制软件。

技术规格如下：

1. 石英管及工艺炉 QUARTZ TUBE & FURNACE
    - Tube Dimensions: ф100*1200mm
    - Furnace Body (WxHxD): 500x500x350
    - Heater: Kanthal Wire w/ Glass Wool Molding
    - Maximum Temperature: 1,100°C
    - Thermocouple: K type, ID 6.5 mm
    - Heating Zone: 1-zone, ф100*350mm
    - Linear Motion Control Unit
    - Manual Furnace Door

2. 气路 GAS SUPPLY UNIT
     - Three (3) Mass Flow Controllers w/ 1% FS Accuracy
        a) Hydrogen (H2), 100sccm

        b) Methane (CH4), 200sccm
        c) Argon (Ar): 1,000sccm
     - Open Mounting Bay for Fourth (4th) MFC
     - 0.25” Stainless Steel Tubing
     - Five (5) 0.25” Pneumatic-Type Diaphragm Valves

3. 真空及压力控制 VACUUM & PRESSURE CONTROL UNIT
     - Convection Gauge

     - Convection Gauge Controller
     - 10 Torr Capacitance Manometer
     - Motor-Geared Throttle Valve
     - Pressure & Flow Controller
     - Oil Rotary Pump (340L/M)

4. 系统控制单元 SYSTEM CONTROL UNIT
     - MS Windows 7 Embedded PC
     - PLC Module with National Inst. LabVIEW Interface
     - 19” LCD Monitor

5. 安全及冷却 SAFETY & COOLING
     - Water Cooled End Flanges
     - Buzzer Alarm & System Error Display
     - Interlock System

6. 设备尺寸及实验室要求 DIMENSIONS & UTILITY REQUIREMENTS
     - Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
     - Weight: ~200kg
     - Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A
     - Air: 4-5kgf/cm2, 0.25” tube
     - Water: 2-3kgf/cm2, 0.25” tube

参考用户：

剑桥大学，牛津大学，曼彻斯特大学，莱斯大学，斯坦福大学，新加坡国立大学，东京技术研究所，东京大学，韩国东国大学等...