热真空箱

Vacuum Pumps
High Vacuum: Brooks CTI OnBoard 8 Closed Cycle Helium Cryopump,
ISO200 Main Flange, KF25 roughing connection
External Purge Gas Heater for N2
Pumping Speed, 1500l/s air, 4,000l/s water vapor
Ultimate Vacuum <2x10-7 Torr
Rough Vacuum Alcatel ACP28 Dry Roots Pump 28 m3/hr
Vacuum Gauges
Rough Vacuum Mini-Convectron Module model 275
1000 Torr to 1x10-3 Torr
High Vacuum Micro-Ion Module
1x10-9 Torr to 5x10-2 Torr
Control System
PLC Proprietary Intlvac Autosys controller
Display 19” Digital Flat Panel Display
PC Most Current Version
User Interface LabView 6.1 run time engine with Intlvac GUI
Control Rack Full Size control rack for 19” rack mountable component
Autosys controller, power distribution
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