爱拓利 mfm330流量计

介质要求 Applicable media

洁净干燥无气体 Clean, dry gases

气体种类 Gas type

98+气体可选 Available for 98 types of gas

量程 Full scale（N2 equivalent）

0-5, 10, 20, 50, 100, 300, 500 sccm；0-1, 2, 5, 10, 20, 30, 50 slpm

测量范围Measurement range

0.5%-100% F.S.

准确度 Accuracy

±0.5% F.S.

重复精度Repeatability

±0.2% F.S.

线性度Linearity

±0.2% F.S.

分辨率 Resolution ratio

0.001 sccm (<10L/min), 1sccm(10-50L/min)

传感器响应时间 Sensor response time

<1s

预热时间 Warm-up time

5 min (T95), 30分钟最佳   30min for optimum accuracy

泄露率 Leak integrity

1*10-8 Pa·m3/sec He

最大工作压力 Maximum pressure

3 MPa (30bar）

工作温度范围Operating temperature range

-20 ~ 65℃ (环境和气体 ambient and gas)

湿度范围 Relative humidity range

0 - 98% 无凝露 No-condensing

气路接头类型Process connections

快插、快拧、卡套、 VCR  （可选）

(Push-in fitting, Push-on fitting, Compression fitting, VCR optional)

气体接触材质Wetted Materials

氟橡胶、316不锈钢 (FKM, 300-series Stainless steel)

密封材质 Seals

氟橡胶 FKM

防护等级 Ingress protection (housing)

IP40

安装方式 Mounting

水平安装方向校准 Calibrated in horizontal mounting orientation

固定孔 Mounting holes

M4   5mm

重量 Weight

 0.82 kg

电气连接接口类型Electrical connection

DB – 9公头 (Male)

模拟信号 Analog input and output options

0 – 5 VDC, 4 – 20 mA （可定制）

输入输出阻抗 Impedance resistance

输入阻抗>10MΩ,输出阻抗<1KΩ

模拟数据更新频率Analog data update rate

200Hz

数字信号 Digital input and output options

Modbu RTU (RS232, RS485), CAN (CAN)

通信速率 Digital data update rate

9600(default), 14400, 19200, 38400, 56000, 57600, 115200 bps（可修改）

电源 Power requirements

15 – 40 VDC,  <200 mA

显示更新频率Display update rate

50Hz

模拟信号精度 Analog signal accuracy

± 0.05%F.S.

标况 STP reference conditions

20℃ and 1 atm

气体选择Gas Select

98种气体可选，具体参考说明书气体系数

98 user selectable gases stored internally, refer to the Gas Correction Factors

软件Software

Aitoly 分阶流量软件

Full scale flow

Height

Width

Depth

A

B

C

D

E

重 量

5 sccm~50 slpm

125.00 mm

76.00 mm

32.00 mm

64.00 mm

17.80 mm

7.00 mm

6.00 mm

M4     5mm

≈0.82 kg

4.921 in

2.992 in

1.260 in

2.520 in

0.701 in

0.276 in

0.236 in

M4     0.197 in

≈2.1 lb

100slpm-500slpm

138mm

82mm

38mm

62mm

30mm

4mm

10mm

M4    8mm

1kg

5.43in

3.22in

1.496in

2.440in

1.181in

0.157in

0.393in

M4    0.31in

2.21lb