Physical |
压力传感器类型 640B绝对压力器 641B集成仪表压力控制器 |
• 640B • 641B |
Pressure Ranges (Full Scales) 压力范围(满刻度) | 10, 100, 1000 mmHg (Torr); 60, 100 psi |
Transducer Overpressure Limit 传感器过压限值 | 45 psia or 2x Full Scale, whichever is greater |
Orifice Full Scale Ranges 孔板满标度范围 | 50, 200, 1000, 5000, 10000, 20000, 50000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atm. on outlet) |
Maximum Differential Pressure (consistent with transducer overpressure limit) 最大压差(与传感器过压限值一致) | • 150 psi for 50 to 10,000 sccm orifices • 30 psi for 20,000 and 50,000 sccm orifices |
Control Mode 控制模式 | Downstream standard; Upstream optional |
Performance 表现 |
Pressure Reading 压力读数精度 Accuracy Temp. Coefficients临时系数
Time Response时间响应
| • ±0.5% of Reading (includes linearity, hysteresis, and repeatability) • Zero: ±0.02% of Full Scale/°C • Span: ±0.04% of Reading/°C • <100 msec |
Pressure Control 压力控制装置 Range 范围 Accuracy 精确 Time Response 时间响应 |
• >2 to 100% of Full Scale • ±0.2% of Full Scale • <1.0 sec (excluding system time constant) |
Environmental 环境方面 |
Operating Temperature | 0° to 50°C (32° to 122°F) |
Storage Temperature | -20° to 80°C (-4° to 176°F) |
Electrical与电有关 |
|
Power Required | ±15 VDC ±5%, 200 mA max. |
Input/Output Signals 输入/输出信号 | 0-5 VDC standard; 0-10 VDC optional |
Connector连接器 | 15-pin male type “D” |
Cable Length电缆长度 | 100 ft. (30 m) max. |
RFI Sensitivity RFI灵敏度 |
SAMA 33.1, 1-abc:<0.2% of Full Scale |
Trip Points Rated Adjustable Hysteresis Indicators 跳闸点 额定可调滞后指示器 | • Two open-collector transistors • 250 mA @ 30 VDC • 1 to 100% of Full Scale • 3% of Full Scale • Green LEDs on when actuated |
Compliance 合规性 | CE |
Mechanical |
Materials Exposed to Gas 接触气体的材料
Standard 标准 Optional可选择的 |
• 316L S.S., 316L/VAR S.S., Inconel, Nickel • Viton®, Kalrez®, Kel-F® |
Leak Integrity 泄漏完整性 External外部的 Internal1,2 (through closed valve) 内部1,2(通过关闭的阀门) | • <10-9 scc/sec He • Elastomer valve:<10-4 scc/sec He • Metal valve:<1% of Full Scale. (N2 @ 1 atm. ?P) • Kel-F valve:<0.5% of Full Scale (N2 @ 1 atm. ?P) |
Fittings配件 | Swagelok® 4 VCR®, 8 VCR, or 1/4” Swagelok, Surface Mount |
Dimensions尺寸 | 1.5'' (38.1 mm) x 4.88'' (124 mm) (4 VCR) x 5.50'' (140 mm) max. |
Weight | 2.54 lbs. (1.15 kg) |