X射线光栅

姓名：王工（Karl）                            

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X-ray di?raction grating

Rectangular grooves with period from 0.5 μm
Groove height up to 200 nm
Grating size up to 20×20 mm²

Substrate: Si, SiO₂

Coatings:

• thin ?lms W, Al, Au etc. 

• multilayer mirrors W/Si, Mo/Be, Cr/Sc etc.

• substrate etching

Multilayer di?raction grating

   period D=2 μm     50 W/Si bilayers (d=50 ?)

2D grating with round re?ecting multilayer elements

X-ray focusing

Grazing incidence phase Fresnel zone plates 1D or 2D x-ray focusing
Groove height up to 100 nm

Zone plate size:

• 1D focusing up to 50×50 mm²

• 2D focusing up to 20×0.2 mm²

Substrate: Si, SiO₂

Coatings: 

• thin ?lms W, Al, Au etc

• substrate etching 

                        Central and outermost zones of grazing incidence zone plate