PR1-9000A
Positive Resist PR1-9000A is a positive tone photoresist designed for 365 or 436 nm wavelength
exposure, using tools such as wafer steppers, scanning projection aligners, proximity printers and
contact printers. PR1-9000A excels in applications when superior adhesion is required. Use of
adhesion promoters, such as HMDS is not recommended with PR1-9000A.
The following are advantages of PR1-9000A over other resists:
- superior resolution capability
- fast photospeed
- superior linewidth control due to suppression of reflective notching
- substrate adhesion which is superior to that of any commercial positive resist
- ease of removal after RIE process
- shelf life exceeding 1 year at room temperature storage.
The formulation and processing of PR1-9000A were designed with regard to occupational and
environmental safety. The principal solvent in PR1-9000A is 1-methoxy-2-propanol and
development of PR1-9000A is accomplished in a basic water solution.
Properties
♦ Solids content (%): 43-47
♦ Principal solvent: 1-methoxy-2-propanol
♦ Appearance: light yellow liquid
♦ Coating characteristic: very uniform, striation free
♦ Film thickness information:
Coating spin speed,
40 s spin (rpm)
Film thickness after 115°C hotplate
bake for 6 min (nm)
800 17100-18900
2000 11276-12463
3000 8550-9450
4000 7738-8552
5000 6716-7423
♦ Sensitivity (mJ/cm² for 1 μm thick film):
365 nm exposure wavelength: 70
436 nm exposure wavelength: 40
♦ Guaranteed shelf life at 25°C storage (years): 2
Processing
1 Application of resist by spin coating at selected spin speed for 40 s.
2 Application of Edge Bead Remover EBR1 to bottom and edge of the coated wafer for 10s, until
5 s before completion of spin cycle.
企业名称
陕西思的信息资讯有限公司
企业信息已认证
企业类型
信用代码
610000100148177
成立日期
2008-10-14
注册资本
100
经营范围
2-庚酮、环己酮、正丁醇、苯甲醚、环戊酮、乙酸[含量>80%]、丙二醇乙醚、甲硫醚、乙酸正丁酯、乙二醇异丙醚、丙酸乙酯、乙酸正丙酯(剧毒化学品、成品油、易制爆危险化学品除外)(无储存场所)(危险化学品经营许可证有效期至2020年12月26日);货物与技术的进出口经营(国家限制、禁止和须经审批进出口的货物和技术除外);机电设备、仪器仪表、科研仪器、精细化学品、化工产品及化工原材料(不含危险、监控、易制毒化学品)、工业设备的销售;计算机软硬件的开发、销售;计算机系统集成(须经审批除外);网站的开发、建设;广告的设计、制作、代理、发布(须经审批除外);企业营销策划;市场营销策划;展览展示活动的组织、策划;公关咨询;光刻工艺设备、颗粒表征仪器、干法蚀刻设备和湿法蚀刻设备的售后维修、服务。(依法须经批准的项目,经相关部门批准后方可开展经营活动)
陕西思的信息资讯有限公司
公司地址
西安市高新区高新路65号信力大厦11105室
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