采用UVISEL相调制型椭圆偏振光谱仪对ZrO2 Thin Films on Glass Substrates样品进行分析,研究其膜层厚度和相应光学性质。

Ellipsometry is a very versatile optical technique that has applications in many different fields, from the micro electronics and semiconductor industries (for characterizing oxides or photoresists on silicon wafers, for ex ample) to biology. This very sensitive measurement technique provides unequalled capabilities for thin film metrology, and has the advantage that it is non-destructive as it uses polarized light to probe the dielectr properties of a sample.

采用UVISEL相调制型椭圆偏振光谱仪对ZrO2 Thin Films on Glass Substrates样品进行分析,研究其膜层厚度和相应光学性质。

LabRAM HR Evolution的超低波数附件使高通量单级光谱仪的最低检测波数低至5cm-1，其操作非常方便。新一代的notch和带通滤光片确保仪器能够检测到其它普通光谱仪中难以获得的光谱范围，从而可以表征更多的样品特征信息。