核心参数
产品种类: 电动位移台
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Features
![]() | Typical Applications
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Product Description |
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning system with a 0.25” diameter center aperture. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.![]() |
Technical Specifications | |
Range of motion (X) | 50 μm |
Range of motion (Y) | 50 μm |
Range of motion (Z) | 25 μm |
Range of motion (θX) | 1 mradian |
Range of motion (θY) | 1 mradian |
Resolution (X) | 0.1 nm |
Resolution (Y) | 0.1 nm |
Resolution (Z) | 0.05 nm |
Resolution (θX) | 2 nradian |
Resolution (θY) | 2 nradian |
Resonant Frequency (X) | 1 kHz ±20% |
Resonant Frequency (Y) | 700 Hz ±20% |
Resonant Frequency (Z) | 700 Hz ±20% |
Stiffness | 1.0 N/μm |
Recommended max. load (horizontal)* | 0.2 kg |
Recommended max. load (vertical)* | 0.2 kg |
Body Material | Al and Titanium, or Invar |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
Additional Information | |
Nano-Man5 Drawing![]() | Nano-Man5 Catalog Pages![]() |
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企业名称
北京欧兰科技发展有限公司
企业信息已认证
企业类型
信用代码
110108003886158
成立日期
2002-06-14
注册资本
50000
经营范围
技术开发、技术转让、技术咨询、技术服务;计算机技术培训;基础软件服务;应用软件服务;计算机系统服务;数据处理;计算机维修;销售计算机、软件及辅助设备、电子产品、机械设备、通讯设备、五金、交电、化工产品(不含危险化学品及一类易制毒化学品)、文化用品、体育用品、日用品。(企业依法自主选择经营项目,开展经营活动;依法须经批准的项目,经相关部门批准后依批准的内容开展经营活动;不得从事本市产业政策禁止和限制类项目的经营活动。)
北京欧兰科技发展有限公司
公司地址
北京市海淀区上地十街1号辉煌国际中心1号楼1006室
客服电话