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产品种类： 电动位移台
400-860-5168转1446
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Features
 | Typical Applications
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Product Description |
The Nano-Theta is a unique piezo-actuated rotational stage having 2 milliradians of total motion. With nanoradian resolution, the Nano-Theta is designed for applications in lithography, optical disk manufacturing, and laser beam tracking or scanning. The innovative design of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror to be mounted so that it is co-planar with the axis of rotation. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with nanoradian accuracy under closed loop control. |
Technical Specifications | |
| Range of motion | 2.0 mradians |
| Resolution | 4 nradians |
| Resonant Frequency (unloaded). | 2 kHz ±20% |
| Body Material | Al or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Theta Drawing | Nano-Theta Catalog Pages |
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MCL关注纳米位移台Nano-Theta的工作原理介绍
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北京欧兰科技发展有限公司
公司地址
北京市海淀区上地十街1号辉煌国际中心1号楼1006室
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公司名称： 北京欧兰科技发展有限公司
公司地址： 北京市海淀区上地十街1号辉煌国际中心1号楼1006室 联系人： 李俊杰 邮编： 100085 联系电话： 400-860-5168转1446
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