关注
已关注
已认证
粉丝量 0
400-860-5168转1446
仪器信息网认证电话，请放心拨打
  |
Features
 | Typical Applications
|
Product Description |
The Nano-M350 is a compact three axis (X, Y, Z) nanopositioning system constructed from aluminum combined with titanium or constructed completely from invar for the highest degree of thermal stability. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 is also available in high vacuum (non-bakeable) compatible models. |
Technical Specifications | |
| Range of motion (X) | 50 μm |
| Range of motion (Y) | 50 μm |
| Range of motion (Z) | 25 μm |
| Resolution (25/50 μm) | 0.05/0.1 nm |
| Resonant Frequency (X) | 1 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Resonant Frequency (Z) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al and Titanium, or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-M350 Drawing | Nano-M350 Catalog Pages |
Related Products |
|
MCL关注纳米位移台Nano-M350的工作原理介绍
位移台Nano-M350的使用方法?
MCL关注纳米Nano-M350多少钱一台?
位移台Nano-M350可以检测什么？
位移台Nano-M350使用的注意事项？
MCL关注纳米Nano-M350的说明书有吗？
MCL关注纳米位移台Nano-M350的操作规程有吗？
MCL关注纳米位移台Nano-M350报价含票含运吗？
MCL关注纳米Nano-M350有现货吗？
北京欧兰科技发展有限公司
公司地址
北京市海淀区上地十街1号辉煌国际中心1号楼1006室
客服电话
公司名称： 北京欧兰科技发展有限公司
公司地址： 北京市海淀区上地十街1号辉煌国际中心1号楼1006室 联系人： 李俊杰 邮编： 100085 联系电话： 400-860-5168转1446
仪器信息网APP
展位手机站