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产品种类： 电动位移台
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Features
 | Typical Applications
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Product Description |
The Nano-HS3M is a high speed, XYZ precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance. |
Technical Specifications | |
| Range of motion (XY) | 10 μm |
| Range of motion (Z) | 5 μm |
| Resolution | 0.01 nm |
| Resonant Frequency (X) | 1.6 kHz |
| Resonant Frequency (Y) | 1.5 kHz |
| Resonant Frequency (Z) | 13.5 kHz |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Aluminum or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum | ||
| The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. | ||
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Additional Information | |
Nano-HS3M Drawing | Nano-HS3M Catalog Pages |
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北京欧兰科技发展有限公司
公司地址
北京市海淀区上地十街1号辉煌国际中心1号楼1006室
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公司名称： 北京欧兰科技发展有限公司
公司地址： 北京市海淀区上地十街1号辉煌国际中心1号楼1006室 联系人： 李俊杰 邮编： 100085 联系电话： 400-860-5168转1446
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