核心参数
产品种类: 电动位移台
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Features
![]() | Typical Applications
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Product Description |
The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/Hz in XY and 400 femtometers/√Hz in Z) of these nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include the Nano-METZ, Nano-MET10 and Nano-MET20 nanopositioning systems.![]() |
Technical Specifications | |
Range of motion (XY) | 75 μm |
Range of motion (Z) | 5 μm |
Resolution (XY) | 0.15 nm |
Resolution (Z) | 0.005 nm |
Resonant Frequency (XY, Nano-MET2) | 1.4 kHz |
Resonant Frequency (XY, Nano-MET3)) | 1.0 kHz |
Resonant Frequency (Z, Nano-MET3) | 13.5 kHz |
Recommended max. load (horizontal)* | 100 g |
Recommended max. load (vertical)* | 100g |
Body Material | Aluminum |
Controller | Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
Position Noise Spectrum | ||
The Nano-MET Series demonstrates less than 4 picometers of position noise on X and Y and less than 400 femtometers of position noise on Z. Click below to enlarge and view the data for each axis. | ||
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Additional Information | |
Nano-MET2 Drawing (2 Axis)![]() Nano-MET3 Drawing (3 Axis) ![]() | Nano-MET Series Catalog Pages![]() |
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企业名称
北京欧兰科技发展有限公司
企业信息已认证
企业类型
信用代码
110108003886158
成立日期
2002-06-14
注册资本
50000
经营范围
技术开发、技术转让、技术咨询、技术服务;计算机技术培训;基础软件服务;应用软件服务;计算机系统服务;数据处理;计算机维修;销售计算机、软件及辅助设备、电子产品、机械设备、通讯设备、五金、交电、化工产品(不含危险化学品及一类易制毒化学品)、文化用品、体育用品、日用品。(企业依法自主选择经营项目,开展经营活动;依法须经批准的项目,经相关部门批准后依批准的内容开展经营活动;不得从事本市产业政策禁止和限制类项目的经营活动。)
北京欧兰科技发展有限公司
公司地址
北京市海淀区上地十街1号辉煌国际中心1号楼1006室
客服电话