Made in UK, 英国EM Resist Ltd出品的光刻胶(1%-17% PMMA、SML系列电子束曝光阻剂),PMMA是常用的普通正阻剂;SML系列阻剂是高分辨率高深宽比的正阻剂。高档的SML正阻剂特点:无需邻近效应校正,低加速电压下也能使用,可提高EBL设备能力并制作出传统PMMA做不出来的新颖微纳器件,特别适合科研应用;有SML50、SML100、SML300、SML600、SML1000、SML2000等系列型号(数字表示光刻胶涂布厚度)。
[资料]PMMA (Polymethyl – Methacrylate;聚甲基丙烯酸甲酯;positive tone, polymer chain scission type for Electron beam, DUV, x-ray and multi-level lithography) is a widely used, versatile resist that is used for many imaging (and non-imaging) micro-electronic applications as well as a protective coating for wafer thinning, a bonding adhesive and as a sacrificial layer, but is commonly used as a high resolution positive resist for direct write with e-beam. EM Resist Ltd specialises in electron beam lithography resists and applications. We develop and manufacture electron beam resists in a purpose built clean-room facility to ensure maximum quality and performance.Our products and expertise are the result of many years research by experienced physicists and material scientists in both academia and industry. EM Resist products are provided in a clean room compatible box, if you need Material Safety Data Sheets, Process Information, Example design files and other useful information, please contact with our Chinese Distributor(www.tansi.com.cn).
PMMA Product Options. First,select which solvent(Anisole or Chlorobenzene) best suits your application. Second,select which solid percentage(1%-17%, 20nm-3500nm) of thickness required.Third,choose a volume to suit your usage needs.
企业名称
南京覃思科技有限公司
企业信息已认证
企业类型
有限责任公司(自然人投资或控股)
信用代码
913201067594581806
成立日期
2004-03-12
注册资本
500万元整
经营范围
电子光学仪器、光学仪器、分析仪器、测量仪器、仪器仪表研发及销售;计算机系统集成;计算机软硬件、工业自动化系统设计、安装、调试及技术服务;仪器仪表设备维修及销售;化工产品、耗材、建筑材料、环保设备、五金交电、办公设备、机电产品、日用百货销售;自营和代理各类商品及技术的进出口业务(国家限定企业经营或禁止进出口商品和技术的除外)。(依法须经批准的项目,经相关部门批准后方可开展经营活动)
南京覃思科技有限公司
公司地址
南京市中山北路281号新城市广场虹桥中心2-728B
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