Fabrication and characterization of microlens arrays using a cantilever-based spotter

2008-04-30 14:50

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We present a quantitative study on the fabrication of microlenses using a low-cost polymer dispending technique. Our method is based on the use of a silicon micro-cantilever robotized spotter system. We first give a detailed description of the technique. In a second part, the fabricated microlenses are fully characterized by means of SEM (Scanning Electron Microscope), AFM (Atomic Force Microscopy) non contact optical profilometry and Mach-Zehnder interferometry. Diameters in the range [25- 130μm] are obtained with an average surface roughness of 2.02nm. Curvature radii, focal lengths as well as aberrations are also measured for the first time: the fabricated microlenses present focal lengths in the range [55-181μm] and exhibit high optical quality only limited by diffraction behaviour with RMS aberration lower than λ/14.

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Fabrication and characterization of microlens arrays using a cantilever-based spotter

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