台阶仪及AFM在3D MEMS量测中的应用

Stylus-based surface profiling is a standard technique for accurate, repeatable surface shape, topography and step height measurement in applications ranging from semiconductor R&D to solar cell QC.

Stylus-based surface profiling is a standard technique for accurate, repeatable surface shape, topography and step height measurement in applications ranging from semiconductor R&D to solar cell QC. In recent years, the ability to map surfaces in 3D has greatly increased the capability of stylus profilers; yet despite such recent advancements, it is not uncommon in cutting-edge fabs, solar cell companies, industrial manufacturing facilities, colleges, universities and various research institutes to see R&D, QC and process monitoring operations performed still using technologies developed over sixty years ago.

Dektak® stylus profilers provide accurate, high resolution measurement of surface shape and texture. The heart of a Dektak system is its measurement stylus, which runs over the surface as the sample is moved beneath it on the stage. A variety of stylus shapes and sizes are available to optimize measurement for particular applications. This paper describes the variety of styli that are currently available from Veeco, and guidelines for choosing the optimal tips for your application.

Understanding surface texture requires both accurate assessment of the surface profile and the proper analytical functions to characterize the surface. Dektak stylus profilers provide both, with low-force, high precision scanning and a comprehensive set of analytical functions and filters to make the most of scan data. For more on surface texture analysis, please review the excellent sources shown below.