AFM - 原子力显微镜系统参数 标准扫描模式 * Intermittent Contact / Phase Contrast * Contact * Non-contact * Lateral Force * MFM * EFM (Any single mode standard, additional modes may be added as options.) 可选扫描模式 * Scanning Tunneling Microscope (STM) * Piezo Response Force Microscope (PrFM) * Kelvin Probe Force Microscope (KPFM) * Scanning Spreading Resistance Microscope (SSRM) * Conductive AFM * Capacitance Force Microscopy (CFM) * Force Modulation Microscopy (FMM) * AFM Spectroscopies * Nanoindentation * Nanolitography Maximum Z Resolution * <0.03nm with 100μmx100μm scanner * <0.01nm with 40μmx40μm scanner * <0.005nm with 4μmx4μm scanner Static/Dynamic RMS Cantilever Z Noise * <25fm √Hz noise floor with laser RF modulation Scan Range * 4x4x2 μm or 40x40x4 μm or 100x100x8 μm STM Current Range * 1pA-10nA, < 10fA / √Hz noise floor Maximum Sample Size/Height * 30x30x10 mm Approach * Software controlled * Motorized * <50 mm range with <250 nm sensivity Camera * CCD analog colour camera Camera Resolution * < 2 μm Light Source for Optical Microscope * White LED, adjustable from software Signal Processing * 16 bit ADCs / 24 bit DACs * Digital feedback with FPGA / DSP * Simultaneous scan of 16 channels up to 4096x4096 pixels Cantilevers * All of the commercial cantilevers can be used Acoustic and Vibration Isolation * Multilayer acoustic enclosure 180°access 0.3Hz passive vibration isolation table