在科研中,很多用户需要用到光栅或点阵这些周期性的结构。有时用户不需要研究微纳米加工工艺,这样如果能花费低廉的价格买到这些成品将十分方便,只要接着从事后续的工作就可以了;有的用户自已拥有微纳米加工设备及经验,但纳米量级的尺寸要采用电子束曝光的方法来进行光刻,若有效面积超过1平方厘米,占机时间会很长,并需要调整电子束光刻及干法刻蚀工艺来优化成品。 鉴于此,我们向用户提供光栅及点阵的纳米结构成品。衬底材料为硅单晶,可广泛应用于各类科学研究。 产品类型: 标准模板一 ○ 光栅纳米结构模板 (线条+间距)○ 二维纳米模板(矩形或六边形)标准模板二 ○ 光栅结构○ 柱状点阵模板○ 孔阵模板2x2cm2模板四英寸模板六英寸模板标准模板一 我们可提供纳米级微结构,衬底材料为硅单晶,广泛应用于科学研究。批量生产,质量有保证,且性价比高。 产品精度: 线宽/深度:±15%周期精度:优于0.5%衬底宽度和高度误差:± 0.2 mm衬底厚度:0.675 ± 0.050 mm 具体规格如下表所示: 光栅纳米结构模板 (线条+间距) Linear Nanostamps (line+space) 序号周期沟槽深度占空比 ①线宽 ②样片尺寸③1139 nm50 nm50%69.5 nm12.5×12.5×0.7 mm2139 nm50 nm50%69.5 nm25×25×0.7 mm ⑤3278 nm④110 nm50%139 nm12.5×12.5×0.7 mm4416.6 nm110 nm50%208 nm12.5×12.5×0.7 mm5500 nmmultiple ⑥44%220 nm8×8.3×0.7 mm6500 nmmultiple ⑥60%300 nm8×8.3×0.7 mm7555.5 nm110 nm50%278 nm20×9×0.7 mm8555.5 nm140 nm50%278 nm20×9×0.7 mm9555.5 nm110 nm29%158 nm20×9×0.7 mm10555.5 nm140 nm29%158 nm20×9×0.7 mm11600 nmmultiple ⑥43%260 nm8×8.3×0.7 mm12600 nmmultiple ⑥55%330 nm8×8.3×0.7 mm13606 nm190 nm50%303 nm29×12×0.7 mm14606 nm④190 nm50%303 nm29×12×0.7 mm15606 nm190 nm50%303 nm29×24.2×0.7 mm ⑤16675 nm170 nm32%218 nm24×10×0.7 mm17675 nm170 nm32%218 nm24×30.4×0.7 mm ⑤18700 nmmultiple ⑥47%330 nm8×8.3×0.7 mm19700 nmmultiple ⑥55%375 nm8×8.3×0.7 mm20833.3 nm200 nm50%416 nm12.5×12.5×0.7 mm21833.3 nm200 nm50%416 nm25×25×0.7 mm ⑤ ①占空比表示线宽和周期的比率。③第二个尺寸相当于沟槽的长度。④scientific" grade offered at a discount. It has at least 80% of usable area. Up to 80/100 scratch/dig/particles and irregular substrate shape may present.⑤可定做更大尺寸⑥深度可做成150, 250 和 350 nm。 二维纳米模板(矩形或六边形)2D nanostamps (rectangular and hexagonal lattice) 序号周期晶格类型沟槽深度特征宽度衬底尺寸1500 nmrect postmultiple ①135 nm8×8.3×0.7 mm2500 nmrect postmultiple ①210 nm8×8.3×0.7mm3600 nmrect postmultiple ①195 nm8×8.3×0.7mm4600 nmrect postmultiple ①275 nm8×8.3×0.7mm5700 nmrect postmultiple ①260 nm8×8.3×0.7mm6700 nmrect postmultiple ①350 nm8×8.3×0.7mm7500 nmhex postmultiple ①165 nm8×8.3×0.7mm8600 nmhex postmultiple ①165 nm8×8.3×0.7mm9600 nmhex postmultiple ①240 nm8×8.3×0.7mm10700 nmhex postmultiple ①220 nm8×8.3×0.7mm11700 nmhex postmultiple ①290 nm8×8.3×0.7mm12600 nmhex holemultiple ①180 nm8×8.3×0.7mm13700 nmhex holemultiple ①200 nm8×8.3×0.7mm14700 nmhex holemultiple ①290 nm8×8.3×0.7mm ①深度可做成150, 250 和 350 nm rect post:hex post:hex hole:标准模板二 我们可提供纳米级微结构,衬底材料为硅单晶,广泛应用于科学研究。批量生产,质量有保证,且性价比高。产品精度:直径±10%线宽±10%高度/深度±15%产品说明:硅片厚度:0.5mm(特殊情况另标注)模板尺寸:产品规格+/-0.2mm缺陷面积:1% 具体规格如下表所示: 光栅结构(周期,线宽,高度,有效面积,衬底尺寸) Part NoDescriptionImagePattern 10Line gratingPeriod: 70 nmWidth: 25 nmor 35 nmHeight: 32nmor 40 nmArea: 4x 0.5 x 1.2 mm2Substrate: Si 20 x 20 mm2Pattern 2Line gratingPeriod: 300 nmWidth: 170 nmHeight: 210 nmArea: 30 x 30 mm2Substrate: Si 30 x 30 mm2Pattern 23Line arryPeriod: 150 nmWidth: 75 nmHeight: 116 nmArea:25 x25 mm2Substrate:Si 30 x 30 mm2 柱状点阵模板(周期,柱直径,高度,有效面积,衬底尺寸) Part NoDescriptionImagePattern 1Square pillar arrayPeriod: 300 nmDiameter: 145 nmHeight: 170 nmArea: 14 x 14 mm2Substrate: Si 14 x 14 mm2Pattern 6High-resolution pillar arrayPeriod: 35 nmand 42 nmDiameter: 15 - 20 nmHeight: 25nmArea: each period 25x25 um2Substrate: Si 12.5 x 12.5 mm2Pattern 3Hexagonal pillar arrayPeriod: 600 nmDiameter: 300 nmHeight: 310 nmArea: 20 x 20 mm2Substrate: Si 20 x 20 mm2Pattern 15Hexagonal pillar arrayPeriod: 750 nmDiameter: 325 nmHeight: 260 nmArea: 25 x 25 mm2Substrate: Si 25 x 25 mm2Pattern 7Hexagonal pillar arrayPeriod: 1000 nmDiameter: 400 nmHeight: 280 nmArea: 20 x 20 mm2Substrate: Si 26 x 26 mm2Pattern 17Hexagonal pillar arrayPeriod: 1010 nmDiameter: 470 nmHeight: 750 nmArea: 25 x 25 mm2Substrate: Si (0.7mm) 25 x 25 mm2Pattern 20Hexagonal pillar arrayPeriod: 3000 nmDiameter: 1800 nmHeight: 1200 nmArea: 20 x 20 mm2Substrate: Si 25 x 25 mm2 孔阵模板(周期,孔直径,高度,有效面积,衬底尺寸) Part NoDescriptionImagePattern 11Square hole arrayPeriod: 90 nmDiameter: 45 nmHeight: 50 nmArea: 4x 0.6 x 0.6 mm2Chip size: 15 x 15 mm2Pattern 13Square hole arrayPeriod: 300 nmDiameter: 150 nmHeight: 300 nmArea: 4 x 4 mm2Chip size: 15 x 15 mm2Substrate: Quartz (2.3 mm thick)Pattern 24Square hole arrayPeriod: 350 nmDiameter: 225 nmHeight: 300 nmArea: 20 x 20 mm2Substrate: Si 20 x 20 mm2Pattern 4Hexagonal hole arrayPeriod: 600 nmDiameter: 300 nmHeight: 50 nm, 450 nmArea: 20 x 20 mm2Substrate: Si 20 x 20 mm2Pattern 5Hexagonal hole arrayPeriod: 600 nmDiameter: 400 nmHeight: 680 nmArea: 20 x 20 mm2Substrate: Si 20 x 20 mm2Pattern 14Hole array on Rhombic latticePeriod:* x=610nm, y=425nmDiameter: 150 nmHeight: 300 nmArea: 20 x 20 mm2Chip size: Si 24 x 24 mm2* center-to-center distance in x and yPattern 16Hexagonal hole arrayPeriod: 750 nmDiameter: 380 nmHeight: 420 nmArea: 25 x 25 mm2Substrate: Si 25 x 25 mm2Pattern 18Hexagonal hole arrayPeriod: 1010 nmDiameter: 490 nmHeight: 470 nmArea: 25 x 25 mm2Substrate: Si (1mm) 25 x 25 mm2Pattern 19Hexagonal hole arrayPeriod: 1500 nmDiameter: 780 nmHeight: 550 nmArea: 25 x 25 mm2Substrate: Si (1mm) 25 x 25 mm2Pattern 21Hexagonal hole arrayPeriod: 3000 nmDiameter: 1500 nmHeight: 850 nmArea: 20 x 20 mm2Substrate: Si 25 x 25 mm2Pattern 22Hexagonal hole arrayPeriod: 3000 nmDiameter: 1200 nmHeight: 1500 nmArea: 20 x 20 mm2Substrate: Si 25 x 25 mm22x2cm2标准纳米压印模板 我们提供电子束光刻方法制备的硅模板,衬底尺寸为20x20mm2。图形分辨率高,有效区域为5x5mm2。批量生产,质量有保证,且性价比高。产品精度: 标准高度:100nm直径: ±10%线宽: ±10%缺陷面积: 1% 具体规格如下表所示: 孔阵(矩形孔阵) 序号ProductPeriodAreaDiameter / Height1P100s_h_5w5100nm5x5mm250nm/ 100nm2P150s_h_5w5150nm5x5mm260nm/ 100nm3P200s_h_5w5200nm5x5mm270nm/ 100nm 孔阵(六边形孔阵) 序号ProductPeriodAreaDiameter / Height1P200h_h_5w5200nm5x5mm280nm/ 100nm2P300h_h_5w5300nm5x5mm2125nm/ 100nm3P400h_h_5w5400nm5x5mm2150nm/ 100nm 柱状点阵(矩形柱状点阵) 序号ProductPeriodAreaDiameter / Height1P100s_p_5w5100nm5x5mm250nm/ 100nm2P150s_p_5w5150nm5x5mm260nm/ 100nm3P200s_p_5w5200nm5x5mm280nm/ 100nm 柱状点阵(六边形柱状点阵) 序号ProductPeriodAreaDiameter / Height1P200h_p_5w5200nm5x5mm270nm/ 100nm2P300h_p_5w5300nm5x5mm2110nm/ 100nm3P400h_p_5w5400nm5x5mm2120nm/ 100nm 大面积四英寸模板我们提供四英寸硅或石英模板,可用于压印工艺。批量生产制作,质量有保证且性价比高。 产品精度: 高度/深度:±15%直径:±10%线宽:±10%缺陷面积:1% 具体规格如下表所示: Holes on Hexagonal Lattice(六边形孔阵) Part NoProductPeriodDiameterAreaMax. Etch depth (Si/Quartz)Image1P520h_h_20w20520 nm260nm20x20 mm2450 nm/200 nm2P600h_h_46w46600 nm300nm46x46 mm2450 nm/200 nm3P600h_h_100d600 nm300nm4-inch450 nm/200 nm4P750h_h_51w51750 nm350nm51x51 mm2450 nm/200 nm5P780h_h_20w20780 nm350nm20x20 mm2450 nm/200 nm6P1000h_h_20w201000 nm400nm20x20 mm2600 nm/300 nm7P1000h_h_51w511000 nm300nm~500nm51x51 mm2600 nm/300 nm8P1500h_h_20w201500 nm400nm~650nm20x20 mm2600 nm/300 nm9P1500h_h_51w511500 nm400nm~650nm51x51 mm2600 nm/300 nm10P3000h_h_100d3000 nm600nm~1400nm4-inch1000 nm/400 nm Holes on Square Lattice(矩形孔阵) Part NoProductPeriodDiameterAreaMax. Etch depth (Si/Quartz)Image11P350s_h_20w20350 nm250nm20x20 mm2300 nm/150 nm12P350s_h_100d350 nm250nm100dia300 nm/150 nm Pillars on Hexagonal Lattice(六边形柱状) Part NoProductPeriodDiameterAreaMax. Etch depth (Si/Quartz)Image13P600h_p_46w46600 nm300nm46x46 mm2450 nm/200 nm14P600h_p_100d600 nm300nm4-inch450 nm/200 nm15P750h_p_51w51750 nm350nm51x51 mm2450 nm/200 nm16P780h_p_20w20780 nm350nm20x20 mm2450 nm/200 nm17P1000h_p_20w201000 nm400nm20x20 mm2600 nm/300 nm18P1000h_p_51w511000 nm300nm~500nm51x51 mm2600 nm/300 nm19P1500h_p_20w201500 nm400nm~650nm20x20 mm2600 nm/300 nm20P1500h_p_51w511500 nm400nm~650nm51x51 mm2600 nm/300 nm21P3000h_p_100d3000 nm600nm~1400nm4-inch1000 nm/400 nm Pillars on Square Lattice(矩形柱状点阵) Part NoProductPeriodDiameterAreaMax. Etch depth (Si/Quartz)Image22P150s_p_30w30150 nm75nm30x30 mm275 nm/ —23P250s_p_30w30250 nm110nm30x30 mm2200 nm/100 nm24P300s_p_30w30300 nm130nm30x30 mm2200 nm/100 nm25P400s_p_30w31400nm250nm30x30 mm3200 nm/100 nm26P500s_p_30w30500 nm250nm30x30 mm2450 nm/200 nm Linear Gratings(光栅结构) Part NoProductPeriodWidthAreaMax. Etch depth (Si/Quartz)Image27P150L_p_30w30150nm70nm30x30 mm275 nm/ —28P250L_p_30w30250nm110nm30x30 mm2200 nm/100 nm29P300L_p_30w30300nm130nm30x30 mm2200 nm/100 nm30P400L_p_30w30400nm200nm30x30 mm2200 nm/100 nm31P500L_p_30w30500nm250nm30x30 mm2450 nm/200 nm Multi-pattern(复合结构) Part NoProductDescriptionDiameterPeriodAreaMax. Etch depth (Si/Quartz)32MHSL_400-800Linear, hexagonal, square array combination,Periods: 400-800nmpitch dependentho, les/lineseach period,7.5mm x 7.5mm400 nm/150 nm33MP250L300Multi-period linear grating combination 1, Periods: 250nm, 275nm, 300nmLinewidth(+/15nm): 90/250 100/275 120/300lineseach period,7mm x 7mm200 nm/100 nm34MP300L600Multi-period linear grating combination 2,Periods: 300nm, 400nm, 500nm, 600nmLinewidth(+/15nm): 90/250 100/275 120/300lineseach period,10mm x 10mm300 nm/150 nm
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