低损耗反射镜 和连续/纳秒激光镜片
低损耗反射镜 和 cw/ns-Laser [1030–1064 nm] 连续/纳秒激光镜片反射率和透光率的主要曲线低损耗反射镜的反射特性曲线和中心波长的定义(CWL) 和带宽 (__)低损耗反射镜的透射特性曲线和中心波长的定义(CWL) 和带宽 (__) CWLRCWL[%]TCWL[ppm]λR[%]T[ppm]SubstrateDimensionsNo.ImperfectionsItem #350(±7) nm 99.973035 nm99.9650? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.016140970140949520(±10) nm 99.992065 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.016140969140964640(±15) nm 99.9920100 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.016140968140965760(±15) nm 99.99515110 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.016140967140966960(±20) nm 99.99520110 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409921409741 045(±20) nm 99.99520120 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409731409711 260(±20) nm 99.99515190 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409911409751 392(±20) nm 99.99515200 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409891409761 550(±20) nm 99.9950130 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409871409771 670(±20) nm 99.9925180 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409861409801 980(±20) nm 99.9940180 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.0161409841409812 300(±30) nm 99.9940220 nm99.99100? 12.7 I t 6.35 I CC 1000? 25.0 I t 6.35 I CC 1000R13S13?e85/ 2 x 0.016?e205/ 2 x 0.04 I ?e10 5/ 2 x 0.016140983140982cw/ns-Laser [1030–1064 nm]连续/纳秒激光镜片a Laser Mirror 0° 激光反射镜b Pump Mirror 0° 泵浦镜c1 Turning Mirror 22.5 – 45°, 1030 – 1064 nm 调谐镜c2 Turning Mirror 22.5 – 45°, 515 – 532 nm 调谐镜d1 Turning Mirror 45°, 1030 – 1064 nm 调谐镜d2 Turning Mirror 45°, 515 – 532 nm 调谐镜l1 Non-Polarizing Beamsplitter 45°, 1030 nm 非偏振分束器l2 Non-Polarizing Beamsplitter 45°, 1064 nm 非偏振分束器l3 Non-Polarizing Beamsplitter 45°, 515 nm 非偏振分束器l4 Non-Polarizing Beamsplitter 45°, 532 nm 非偏振分束器n Separator 45° 分离器o1 Thin Film Polarizer 56°, 1030 nm 薄膜偏振片o2 Thin Film Polarizer 56°, 1064 nm 薄膜偏振片o3 Thin Film Polarizer 56°, 515 nm 薄膜偏振片o4 Thin Film Polarizer 56°, 532 nm 薄膜偏振片p Window 0° 窗片a Laser Mirror 0° Layertec激光反射镜Coating 141321HR s,p (0 – 10°, 1030 – 1064 nm) 99.95 %LIDT6/ 50 J/cm2 1064 nm 7 ns ? 270 μm YERTECSubstrate DimensionsNo.ImperfectionsItem #? 12.7 mm | t 6.35 mmA45/ 1 x 0.04141864? 25.0 mm | t 6.35 mmB45/ 3 x 0.04141868? 50.0 mm | t 9.5 mmC35/ 4 x 0.063141866b Pump Mirror 0° Layertec泵浦镜S2: Coating 141325HR s,p (0–10°, 1030–1064 nm) 99.95 %R s,p (0–10°, 808 nm) S1: Coating 141355AR s,p (0–10°, 808 nm) LIDT6/ 30 J/cm2 1064 nm 7 ns ? 270 μmLAYERTECSubstrate DimensionsNo.ImperfectionsItem #? 12.7 mm | t 6.35 mmA45/ 1 x 0.04141877? 25.0 mm | t 6.35 mmB45/ 3 x 0.04141881c1 Turning Mirror 22.5–45°, 1030–1064 nm Layertec调谐镜Coating 141496Ag + multilayerHR s,p (22.5–45°, 1030–1064 nm) 99.7 %for application outside the resonatorno transmission @ VIS / NIRSubstrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 6.35 mmB45/ 3 x 0.04141942? 50.0 mm | t 9.5 mmC35/ 4 x 0.06314194525 × 25 mm | t 6.35 mmD25/ 3 x 0.0414195425 × 36 mm | t 6.35 mmE25/ 4 x 0.0414195850 × 50 mm | t 9.5 mmF35/ 4 x 0.063141960c2 Turning Mirror 22.5-45°, 515-532 nm Layertec调谐镜Coating 141497Ag + multilayerHRs,p (22.5-45°, 515-532nm) 99.7 %for application outside the resonatorno transmission @ VIS / NIRSubstrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 6.35 mmB45/ 3 x 0.0414194925 x 25 mm | t 6.35 mmD25/ 3 x 0.04141956d1 Turning Mirror 45°, 1030-1064 nm Layertec调谐镜Coating 141327HRs,p (45°, 1030 -1064 nm) 99.95 %LIDT6/ 50 J/cm2 1064 nm 7 ns ? 270μmSubstrate DimensionsNo.ImperfectionsItem #? 12.7 mm | t 6.35 mmA45/ 1 x 0.04141896? 25.0 mm | t 6.35 mmB45/ 3 x 0.04141500? 50.0 mm | t 9.5 mmC35/ 4 x 0.06314190425 x 25 mm | t 6.35 mmD25/ 3 x 0.0414195325 x 36 mm | t 6.35 mmE25/ 4 x 0.0414195750 x 50 mm | t 9.5 mmF35/ 4 x 0.063141959d2 Turning Mirror 45°, 515 - 532 nm Layertec调谐镜Coating 141329HRs,p (45°, 515-532 nm) 99.9%LIDT6/ 10 J/cm2 532 nm 7 ns 10Hz ?270μmSubstrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 6.35 mmB45/ 3 x 0.0414194625 x 25 mm | t 6.35 mmD25/ 3 x 0.04141955l1 Non-Polarizing Beamsplitter 45°, 1030 nm Layertec非偏振分束器S2: Coating 141335PRs,p (45°, 1030 nm) = 50 (±3) %I Rs - Rp I S1: Coating 141331ARs,p (45°,1030 - 1064 nm) I Rs - Rp I Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141604L2 Non-Polarizing Beamsplitter 45°, 1064 nm Layertec非偏振分束器S2: Coating 141338PRs,p (45°, 1064 nm) = 50 (±3) %I Rs – Rp I S1: Coating 141331ARs,p (45°, 1030-1064 nm) I Rs – Rp I Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141607L3 Non-Polarizing Beamsplitter 45°, 515 nm Layertec非偏振分束器S2: Coating 141344PRs,p (45°,515 nm) = 50 (±3) %I Rs – Rp I S1: Coating 141341ARs,p (45°,515-532 nm) I Rs –Rp I Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141608L4 Non-Polarizing Beamsplitter 45°, 532 nm Layertec非偏振分束器S2: Coating 141346PRs,p (45°, 532 nm) = 50 (±3) %I Rs - Rp I S1: Coating 141341ARs,p (45°, 515 - 532 nm) I Rs - Rp I Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141609N Separator 45° Layertec分离器S2: Coating 141359HRs,p (45°,515- 532nm) 99.8 %Rs (45°, 1030 - 1064nm) Rp (45°, 1030- 1064nm) S1: Coating 141377ARs,p (45°, 1030-1064 nm) Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141892? 25.0 mm | t 6.35 mmB45/ 3 x 0.04141895O1 Thin Film Polarizer 56°, 1030 nm Layertec薄膜偏振片S2: Coating 141352TFP (56° *, 1030 nm) Rs 99.9 % Rp *specifications will be achieved by ±2° angle adjustmentS1: Uncoated Brewster angle ? Rp (56°) ~ 0 %O2 Thin Film Polarizer 56°, 1064 nm Layertec薄膜偏振片S2: Coating 141353TFP (56° *, 1064 nm) Rs 99.9 % Rp *specifications will be achieved by ±2° angle adjustmentS1: Uncoated Brewster angle ? Rp (56°) ~ 0 %Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141536O3 Thin Film Polarizer 56°, 515 nm Layertec薄膜偏振片S2: Coating141350TFP (56° *, 515 nm) Rs 99.9% Rp *specifications will be achieved by ±2° angle adjustmentS1: Uncoated Brewster angle ? Rp (56°) ~ 0 %Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141537O4 Thin Film Polarizer 56°, 532 nm Layertec薄膜偏振片S2: Coating 141351TFP (56°*, 532 nm) Rs 99.9 % Rp *specifications will be achieved by ±2° angle adjustmentS1: Uncoated Brewster angle ? Rp (56°) ~ 0%Substrate DimensionsNo.ImperfectionsItem #? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141539P Window 0° Layertec窗片S2+S1: Coating 141348AR (0°, 515-532 nm) AR (0°, 1030-1064 nm) Substrate DimensionsNo.ImperfectionsItem #? 12.7 mm | t 1 mmA25/ 1 x 0.04141890? 25.0 mm | t 3.05 mmB35/ 3 x 0.04141885德国Layertec公司创建于 1990年. 凭借多年在光学镜片的设计开发和生产经验,已成为全球知名的光学镜片厂商,LAYERTEC的镜片品质非常出众,广泛赢得客户的赞誉。光学镜片应用波长范围从157-2940nm,包括了科研以及工业上主流的激光器的应用,材质有YAG, Sapphire,CaF2,IR-fused silica,Fused Silica,BK7,尺寸大部份为0.5inch-2inch。Layertec专注于提供激光光学元件的镀膜,波长范围从 VUV(157nm及以下) 到 NIR波段(~4um)。最常见的光学镀膜类型是高反射镜(从正入射或者AOI=45°的转向镜),用于输出耦合的部分反射镜,以及分束器和用于窗口和透镜的抗反射膜。对于更复杂的激光器镀膜,包括3个以上波长的高反射率(例如激光器波长和倍频波长),以及3个以上波长的高透射率(例如泵浦波长,倍频或者抑制其他激光波长)。宽带反射镜,针对平滑群延迟和群延迟色散光谱优化的反射镜,这些在宽带激光输出应用中会用到,例如染料激光器,钛宝石激光器,光参量震荡器(OPO)和飞秒激光器。除了反射率和透射率,激光应用的镀膜必须满足低光学损耗和高激光损伤阈值。在VIS和NIR波段的溅射光学镀膜具有低杂散光和低吸收损耗(数量级都在10–5)。磁控溅射镀膜的HR镜反射率或者部分反射镜的反射透射率之和都超过99.9%。最近测量了在溅射和蒸发镀膜中的NIR波长吸收损耗都在3-30ppm。在VIS-NIR波长范围,蒸发镀膜会产生杂散光损失大约10-3级,在UV和VUV波长可以达到10-2。尽管如此,蒸发镀膜在UV波长的吸收损耗比较低。在CW和纳秒激光器光学元件的损伤主要跟热效应有关,例如增大的吸收,镀膜材料的固有吸收或者缺陷造成的吸收, 或者 镀膜较差的热导率 以及较低的熔化温度。 高能量的镀膜要求控制镀膜材料的固有特性以及减少膜层的缺陷。皮秒和飞秒激光元件的激光损伤主要是场强效应造成的。针对这类激光器的高功率镀膜要求非常特殊的设计。根据ISO 11254-1 (cw- LIDT and 1 on 1–LIDT, 例如单脉冲 LIDT), ISO 11254-2 (S on 1, 例如多脉冲 LIDT) 以及 ISO 11254-3 (一定数量的脉冲LIDT )标准中对激光损伤阈值LIDT的定义要求激光系统工作在单频模式下,精确的光束诊断和在线/离线损伤探测系统。因为这个原因,数量有限的配有少数几种激光器的测量系统可以使用(例如Laserzentrum Hannover 公司的1064nm)。对于比较特殊的激光器波长例如氩离子激光器(488nm或者514nm),没有测量系统可以用来验证LIDT数据。