技术参数 Measuring head CX CI Image acquistion module BM 512 Digital camera with progressive- scan technology, up to 25fps, 512 x 512 Pixel, 8bit, Firewire Fast digital camera with progressive- scan technology, up to 58fps, 512 x 512 Pixel, 12 Bit, Firewirs light source, adjustable Halogen light source (LS 100) Powerfull-Xe-light source (LX 100, LX 180) Scan modules x, y-axis module MS 50 Precision x, y-table, 50 x 50mm, resolution 0.1&mu m z-axis module ZM 100 Precision scanning module, range 100mm, resolution 0.1&mu m z-axis module NV 350 - Fast precision scanning module (Piezo), measuring range 350&mu m, resolution 1nm Optic modules1) 1600 S 800 L / S / XS 320 L / S / XS 160 L / S Measurement area (x/y)(um)2 (XY测量范围) 1600 x 1600 800 x 800 320 x 320 160 x 160 Numerical aperture (NA值) 0.3 0.4 / 0.46 / 0.6 0.5 / 0.8 / 0.95 0.8 / 0.95 Working distance(mm) Z方向测量范围 10.1 12 / 3.1 / 0.9 10.6 / 0.66 / 0.3 3.4 / 0.31 Resolution in z-direction(nm)CX (Z方向范围分辨率) CI2) 50 20 35 / 30 / - 6 / 5 / 4 25 / 15 / - 4 / 2 / 2 - 2 / 1 Resolution in x,y-direction (XY分辨率) 2.9 1.5 0.6 0.31 1) L : long working distance, S : normal working distance, XS : short working distance, 2) noise level (only with NV350)
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