环形测力传感器

近日，来自中国科学院安徽光学精密机械研究所、中国科学院沈阳应用生态研究所、中国科学技术大学、法国蓝海岸大学法国滨海大学的联合研究团队发表了一种基于法拉第旋转光谱的、采用环形阵列永磁体NO2传感器。Recently, the joint research team from Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Institute of Applied Ecology, Chinese Academy of Sciences, University of Science and Technology of China, and Université du Littoral Cô te d’Opale published a NO2 Sensor Based on Faraday Rotation Spectroscopy Using Ring Array Permanent Magnets.法拉第旋转光谱（FRS）通过检测沉浸在外部纵向磁场中的气体介质所引起的线偏振光偏振状态的变化，从而实现对顺磁分子的高选择性和高灵敏度检测。该光谱检测方法对水汽、CO2等抗磁性分子具有天然的免疫力，这使得其表现出高度的样品特异性。同时，由于采用了一对相互接近正交的偏振器极大抑制了激光噪声，因此法拉第旋转光谱具有非常高的检测灵敏度。Farraday Rotational Spectroscopy (FRS) achieves highly selective and sensitive detection of paramagnetic molecules by detecting the changes in polarization state of linearly polarized light induced by the gas medium immersed in an external longitudinal magnetic field. This spectroscopic detection method exhibits inherent immunity to diamagnetic molecules such as water vapor and CO2, which results in a high degree of sample specificity. Additionally, the implementation of a pair of closely spaced orthogonal polarizers effectively suppresses laser noise, thus providing FRS with a very high detection sensitivity.通常情况下，使用螺线管提供纵向磁场来产生磁光效应。然而，这种方法存在功耗过大和易受电磁干扰的缺点。研究团队提出了一种基于钕铁硼永磁体环形阵列和Herriott多次通过吸收池相结合的新型FRS方法。根据磁场的空间分布特性，使用14个相同的钕铁硼永磁体环以非等距形式组合，产生纵向磁场。在长度为380毫米的范围内，平均磁场强度为346高斯。宁波海尔欣光电科技有限公司为该项目提供了前置放大制冷一体型碲镉汞红外探测器（HPPD-B-08-10-150 K)，项目团队使用量子级联激光器以40毫瓦的光功率，针对最佳的441 ← 440 Q支氮氧化物跃迁（1613.25 cm–1，6.2 μm）。与Herriott多次通过吸收池耦合，积分时间为70秒，实现了0.4 ppb的最低检测限。实验结果也表明，低功耗FRS二氧化氮传感器有望发展成为一个稳健的现场可部署的环境监测系统。Usually, a solenoid coil is used to provide a longitudinal magnetic field to produce the magneto-optical effect. However, such a method has the disadvantages of excessive power consumption and susceptibility to electromagnetic interference. The research team proposed a novel FRS approach based on a combination of a neodymium iron boron permanent magnet ring array and a Herriott multipass absorption cell is proposed. A longitudinal magnetic field was generated by using 14 identical neodymium iron boron permanent magnet rings combined in a non-equidistant form according to their magnetic field’s spatial distribution characteristics. The average magnetic field strength within a length of 380 mm was 346 gauss. HealthyPhoton Co.,Ltd provided an integrated TE-cooled mercury cadmium telluride (MCT) infrared detector with front-end amplification(HPPD-B-08-10-150 K) for this project. A quantum cascade laser was used to target the optimum 441 ← 440 Q-branch nitrogen dioxide transition at 1613.25 cm–1 (6.2 μm) with an optical power of 40 mW. Coupling to a Herriott multipass absorption cell, a minimum detection limit of 0.4 ppb was achieved with an integration time of 70 s. The low-power FRS nitrogen dioxide sensor proposed in this work is expected to be developed into a robust field-deployable environment monitoring system.静态磁场法拉第旋转光谱传感装置Static magnetic field Faraday rotation spectral sensing device海尔欣前置放大制冷一体型碲镉汞红外探测器（HPPD-B-08-10-150 K)Integrated preamplifier and cryocooler type mercury cadmium telluride (MCT) infrared detector环形阵列永磁体及其纵向磁场分布特征Circular array permanent magnets and their longitudinal magnetic field distribution characteristics(a) 对于等距离的NdFeB永磁环阵列，模拟得到了中央纵向磁场的分布情况。(b) 对于非等距离的NdFeB永磁环阵列，模拟得到了中央纵向磁场的分布情况（黑线），并进行了实测（红线）。(c) 示意图显示了Herriott腔和非等距离的NdFeB永磁环阵列的配置。(a) Simulated distribution of the central longitudinal magnetic field for an equidistant NdFeB permanent magnet ring array (b) simulated (black line) and measured (red line) distributions of the central longitudinal magnetic field for a non-equidistant NdFeB permanent magnet ring array (c) schematic configuration of the Herriott cell and the non-equidistant NdFeB permanent magnet ring array.法拉第旋转光谱信号及其信噪比与检偏器偏转角度的变化关系The Relationship between FRS signal and its SNR and the Deflection Angle of the Polarizer(a) 法拉第旋转光谱信号幅度(b) SNR作为分析器角度α的函数(a) FRS signal amplitude and (b) SNR as a function of the analyzer angle α.Reference:Yuan Cao, Kun Liu, Ruifeng Wang, Xiaoming Gao, Ronghua Kang, Yunting Fang, Weidong Chen，NO2 Sensor Based on Faraday Rotation Spectroscopy Using Ring Array Permanent Magnets, Anal. Chem. 2023, 95, 2, 1680–1685https://doi.org/10.1021/acs.analchem.2c04821Copyright © 2023 American Chemical Society

近日，来自中国科学院安徽光学精密机械研究所、先进激光技术安徽省实验室、中国科学技术大学、法国滨海大学大气物理化学实验室联合研究团队发表了《基于钕铁硼环形磁体阵列的双中红外波长法拉第旋转光谱NOx传感器》论文。Recently, the joint research team from Anhui Institute of Optics and Fine Mechanics, HFIPS, Chinese Academy of Sciences, Advanced Laser Technology Laboratory of Anhui Province, University of Science and Technology of China, Laboratoire de Physicochimie de l′ Atmosph`ere, Universit´ e du Littoral C&circ ote d′ Opale, published an academic papers Dual mid-infrared wavelength Faraday rotation spectroscopy NOx sensor based on NdFeB ring magnet array.氮氧化物（NOx，包括二氧化氮（NO2）和一氧化氮（NO））是对流层臭氧的重要前体，同时也影响羟基和过氧基自由基的浓度。大多数气态化合物在被氧化和从空气中去除或转化成其他化学物质时，都会直接或间接接触到NOx。在典型的羟基自由基水平下，NOx的寿命取决于季节和光化学反应速率，通常为几小时。根据IPCC第六次评估报告，NOx的排放导致净正向变暖，因为它既形成短期臭氧（变暖），又破坏环境甲烷（冷却）。此外，NOx还导致酸沉降以及化学烟雾和气溶胶的形成。NO和NO2在大气光化学反应中起着核心作用，针对它们的检测有助于理解这两种气体的来源和去向，以及研究陆地生态系统与大气之间的NOx交换通量。Nitrogen oxides (NOx, the sum of nitrogen dioxide (NO2) and nitric oxide (NO)) are important precursors of tropospheric ozone, and they also influence the concentration of hydroxyl and peroxyl radicals. Most of the compounds that are oxidized and removed from the air or converted to other chemical species are in direct or indirect contact with NOx. At typical hydroxyl radical levels, the life time of NOx depends on the season and the photochemical reaction rate, which is typically a few hours. According to the IPCC sixth assessment report, the emissions of NOx result in net-positive warming from the formation of short-term ozone (warming) and the destruction of ambient methane (cooling). Additionally, NOx contributes to acid deposition and the formation of chemical smog and aerosols. Since NO and NO2 play a central role in atmospheric photochemical reactions, their simultaneous detection helps to understand the sources and sinks of these two gases, in addition to studying the NOx exchange fluxes between terrestrial ecosystems and the atmosphere.化学发光检测（NO + O3 → NO2 + O2 + hν）是测量NOx的传统方法。在通过化学发光反应（Mo + 3NO2 → MoO3 + 3NO）测量之前，NO2首先需要在高温（~325°C）下转化为NO。虽然这种方法被广泛使用，但其他氧化氮化合物，如过乙酰亚硝酸酯（PAN）和硝酸（HNO3），可能会在测量NOx浓度时引起交叉干扰。同时，这种方法不能区分NO和NO2。红外吸收法也可用于测量NO和NO2。在这种方法中，通常需要通过转化器将NO2还原为NO。由于NO和NO2是顺磁分子，法拉第旋转光谱（FRS）可以用作实现其高度敏感和选择性检测的潜在方法。FRS通过检测气态介质在纵向磁场中引起的光偏振状态的变化，实现对物种浓度的高灵敏度检测。该方法通过测量光学色散实现气体浓度的检测，因此其动态测量范围比基于比尔-兰伯定律的吸收光谱（动态范围上限≤10%）更大。FRS的另一个重要优势是它对于抗磁性分子（如水和二氧化碳）具有较强的抗干扰能力，从而使其具有高样品特异性。Chemiluminescence detection (NO+O3→NO2+O2+hν) is the conventional method for measuring NOx. NO2 first needs to be converted to NO at high temperature (~325 ◦ C) before it can be measured by chemiluminescence reaction (Mo+3NO2→MoO3+3NO). Although this method is more widely used, other oxidized nitrogen compounds, such as peroxyacetyl nitrate (PAN) and nitric acid (HNO3), can cause cross-interference in the measurement of NOx concentrations. Simultaneously, this method is non-selective in discriminating between NO and NO2. The infrared absorption method can also be used for NO and NO2 measurements. In this method, NO2 usually needs to be reduced to NO by the converter. As NO and NO2 are paramagnetic molecules, Faraday rotation spectroscopy (FRS) can be used as a potential method to achieve their highly sensitive and selective detection. FRS enables highly sensitive detection of species concentrations by detecting changes in the polarization state of light induced by a gaseous medium immersed in a longitudinal magnetic field. This method realizes the detection of gas concentration by measuring optical dispersion, so it has a higher dynamic measurement range than absorption spectroscopy (dynamic range upper limit ≤10%) based on Beer-Lambert law. Another significant advantage of FRS is that it is reasonably immune to diamagnetic species (e.g., water and carbon dioxide), which allows it to exhibit high sample specificity. 大多数这些报道的FRS传感器使用螺线管提供外部纵向磁场，从而导致能耗高和产生过多焦耳热。同时产生目标磁场所需的高电流交流电路会产生不受控制的电磁干扰（EMI），通常会降低FRS传感器的长期稳定性。此外，当前报道的FRS传感器只能在吸收池中进行单组分测量，不能满足复杂环境中同时进行多组分测量的需求。Most of these reported FRS sensors use solenoid coils to provide an external longitudinal magnetic field, which makes them suffer from high power consumption and excessive Joule heat generation. The high-current alternating current circuit required to generate the target magnetic field produces uncontrolled electromagnetic interference (EMI), which usually deteriorates the long-term stability of the FRS sensors. In addition, the currently reported FRS sensors are only capable of single-component measurements in the absorption cell and cannot meet the demand for simultaneous multi-component measurements in complex environments.在本研究中，提出了一种新型的低能耗FRS传感器，基于钕铁硼（NdFeB）环形磁体阵列，实现在单个吸收池中同时检测NO和NO2。分析了同轴双波长赫里奥特池（DWHC）的环形磁体阵列的磁场分布特性。使用两台室温连续波中红外量子级联激光器（QCL），波长分别为5.33 µ m（1875.81 cm&minus 1）和6.2 µ m（1613.25 cm&minus 1），同时探测DWHC内的磁光效应。通过对激光波长进行高频调制，有效抑制了1/f噪声。优化了双波长FRS NOx传感器的性能，包括调制幅度、调制频率、样品气压和分析器偏置角。本研究提出的FRS传感器为现场可部署的微量气体检测设备提供了理想解决方案。宁波海尔欣光电科技有限公司为此研究提供了HPPD-M-B 前置放大制冷一体型碲镉汞（MCT）光电探测器，用以分别检测2个激光束。In the present work, a novel low-power FRS sensor based on a neodymium-iron-boron (NdFeB) ring magnet array was proposed to achieve simultaneous detection of NO and NO2 in a single absorption cell. The magnetic field distribution characteristics of a ring magnet array coaxial to a dual-wavelength Herriott cell (DWHC) were analyzed. Two room-temperature continuous wave mid-infrared quantum cascade lasers (QCL) with wavelengths of 5.33 µ m (1875.81 cm&minus 1) and 6.2 µ m (1613.25 cm&minus 1), respectively, were used simultaneously to probe magneto-optical effects within the DWHC. The 1/f noise was effectively suppressed by high-frequency modulation of the laser wavelength. The performance of the dual-wavelength FRS NOx sensor was optimized with respect to modulation amplitude, modulation frequency, sample gas pressure, and analyzer offset angle. The FRS sensor proposed in this work provides a preferable solution for field deployable trace gas detection equipment. The laser detected by two TEC-cooled mid-infrared thermoelectrically cooled mercury-cadmium- telluride (MCT) photodetectors (Healthy Photon, model HPPD-B- 10–150 K).(a) Schematic diagram of the dual mid-infrared wavelength FRS NOx sensor based on a NdFeB ring magnet array (b) Optical layout of the FRS NOx sensor.thermoelectrically cooled mercury-cadmium- telluride (MCT) photodetectors (Healthy Photon, model HPPD-B- 10–150 K),结论本研究开发了一种基于NdFeB环形磁铁阵列的双中红外波长FRS传感器，用于同时检测NO2和NO。在光学路径长度为23.7米，积分时间为100秒的条件下，NO2和NO的检测限分别为0.58 ppb和0.95 ppb。高频激光波长调制与外部静态磁场相结合，最大程度地减小了低频噪声对FRS信号的影响。基于有限元方法分析了使用的永磁体阵列的磁场分布特性，帮助确定与其耦合的吸收池长度。采用双波长赫里奥特池放大两种不同偏振光波长与氮氧化物分子之间的相互作用，从而实现了在单个吸收池内对两种顺磁分子的高灵敏度检测。本文提出的FRS NOx传感器在大气环境监测或生态系统NOx通量观测等领域，具有进一步发展成为便携式、可在实地使用的仪器的巨大潜力。Conclusion In this work, a dual mid-infrared wavelength FRS sensor based on a NdFeB ring magnet array was developed for the simultaneous detection of NO2 and NO. The detection limits for NO2 and NO were 0.58 ppb and 0.95 ppb, respectively, at an optical path length of 23.7 m and an integration time of 100 s. High frequency laser wavelength modulation was combined with an external static magnetic field to minimize the effect of low frequency noise on the FRS signal. The magnetic field distribution characteristics of the used permanent magnet array were analyzed based on the finite element method, which helped to determine the length of the absorption cell coupled to it. A dual-wavelength Herriott cell was used to amplify the interaction between two different wavelengths of linearly polarized light and nitrogen oxide molecules, thus achieving highly sensitive detection of two paramagnetic molecules within a single absorption cell. The FRS NOx sensor presented in this work shows great potential for further development into a portable, field-deployable instrument with applications in atmospheric environmental monitoring or ecosystem NOx flux observation. (a) Schematic diagram of a dual-wavelength Herriott cell (DWHC) with a NdFeB ring magnet array (b) Characteristics of the magnetic inductance line distribution around a NdFeB ring magnet array (c) Ray tracing results in a DWHC (d) Spot distribution on a concave mirror.Optimization of laser modulation frequency for the dual mid-infrared wavelength FRS NOx sensor.Optimization of laser modulation amplitude for the dual mid-infrared wavelength FRS NOx sensor.(a), (b) Measured FRS NOx signal as a function of analyzer angle (c), (d) Calculated FRS NOx noise as a function of analyzer angle (e), (f) Calculated SNR as a function of analyzer angle.Measured FRS NOx signal amplitude as a function of sample pressure.(a) , (b) FRS signals for different concentrations of NOx (c), (d) Linear dependence of FRS signal amplitude as a function of NOx concentration.Allan deviation plot of the dual mid-infrared wavelength FRS NOx sensor.Reference:Yuan Cao, Kun Liu, Ruifeng Wang, Guishi Wang, xiaoming Gao, Weidong Chen，Dual mid-infrared wavelength Faraday rotation spectroscopy NOx sensor based on NdFeB ring magnet array, Sensors & Actuators: B. Chemical 388 (2023) 133805https://doi.org/10.1016/j.snb.2023.133805

在工业自动化生产过程中，力传感器发挥着重要作用，它可以帮助设备实现高精度、高效率的自动化控制。力标准机是力值量传的标准设备，能够确保各行业力值计量器具的准确性。开展超大力值的力传感器研究，构建超大力值试验能力，有助于提升我国大力值传感器领域的技术水平，不断提高行业整体基础技术和共性技术能力。上海仪电旗下上海工业自动化仪表研究院有限公司面向工业领域超大力值测量及应用需求，于2019年承担起上海市工业强基专项“超大力值传感器和100MN力标准测力机研制及应用”项目。验算建模，力标准机主体设备一次吊装成功！100MN力标准机装置的总重量约500吨，其中最重的结构件约80吨，四根方立柱的长度近12米，约30吨/根，需从20米高的安装孔中垂直吊装进入场地，并直接安装就位。不仅安装难度极高，而且由于结构件重量重、长度长，吊装存在较大安全风险。项目研发团队通过反复验算、建模，并结合实地测量，最终确定了安装施工方案和安全防护方案。2021年1月25日，随着四辆巨型运输车抵达自仪院松江分院，项目迎来了最为重要的建设环节——力标准机主体设备吊装。在项目研发团队、安装技术人员、安全管理人员的全力配合保障下，主体设备仅用2天就一次吊装就位，确保了安装过程的安全可控。驻守现场，保障国际首台套设备研制进度！2021年初，在100MN标准测力机建设调试阶段，项目调试进程遇到了挑战。为保障设备研制进度，自仪院项目研发团队、安装技术人员迎难而上，连续两个月驻守现场展开了持续调试。在一次调试中，在回程卸压到3000吨时，突发液压无法正常卸载，问题非常棘手。调试人员尝试通过松动管路密封卡套螺帽，实现液压缸的卸荷。刚松开3圈时油液四射，调试人员在保障安全的前提下，浑然不顾全身淋满了液压油，当即先控制住了液压油管。最终查明原因是由于狭小的阀芯被堵塞进而导致回油不畅，问题得到了及时解决。最终，项目团队克服重重困难，顺利完成100MN标准测力机一次性满负荷加载试压试验，为项目后续落地应用争取了宝贵时间。突破瓶颈，关键核心技术获多项国外发明专利！自仪院充分发挥转制科研院所的经验优势，项目研发团队着力攻克关键核心技术难题，陆续突破了材料研制难关、传统热处理工艺、传感器结构优化等多个瓶颈。其中，“精度检测方法技术”获得美国、欧盟、日本和韩国多项国际发明专利。2020年6月，新研制的金属材料试制的测力传感器性能测试结果不理想。项目团队开始通宵达旦分析讨论，终于找出问题在于采取的热处理制度不能满足传感器的要求。分析结果指明了努力方向，经过艰苦攻关，最终制成的测力传感器性能得到了大幅改善，这意味着在传感器材料和热处理工艺方面向前迈出了一大步。自2019年开始，项目历时4年时间，成功研制70MN超大力值传感器，以及国际首台套100MN力标准测力机装置，综合技术达到国内领先、国际先进水平。从2023年起，项目研制的超大力值传感器、张力传感器“及测量系统装置已经在国内钢厂几十条热轧或冷轧生产线现场进行了国产化替代应用，并走向海外市场。通过持续完善改进，产品已达到与国外同类产品的同等技术水平。