卷对卷柔性薄膜沉积设备Cassette houses flexible material卷筒用于装载柔性衬底材料Cassette transported from one process chamber to another via a robotic handler制备薄膜时,卷筒可由真空机器手从一个腔室输送至另一个腔室Advantages 此沉积系统的优点- Eliminates cross-contamination 在制备多层膜器件时消除了交互掺杂影响- Flexibility to adjust parameters on any part of the process. 制备薄膜时,能灵活控制各种运转沉积参数- Down time reduced, i.e. each chamber can be serviced independently 因每个腔室可单独维护,减少了停机非运转时间Reel to Reel Cassette Cluster toolsCluster tool w/ 8 port locations具有8个腔室的团簇型沉积系统15cm and 30cm webwidth柔性衬底的宽度可从15cm至30cmComputer controlled可完全由电脑程序控制操作运行PECVD, HWCVD and Sputter capability制备方式包括等离子体和热丝化学气相沉积,及溅射(US patent #6,258,408B1)(本产品获美国专利#6,258,408B1)
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